JPS61214700A - 漏洩弾性表面波トランスジユ−サ - Google Patents
漏洩弾性表面波トランスジユ−サInfo
- Publication number
- JPS61214700A JPS61214700A JP5419085A JP5419085A JPS61214700A JP S61214700 A JPS61214700 A JP S61214700A JP 5419085 A JP5419085 A JP 5419085A JP 5419085 A JP5419085 A JP 5419085A JP S61214700 A JPS61214700 A JP S61214700A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- transducer
- liquid
- conversion efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 7
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000010408 film Substances 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 235000014676 Phragmites communis Nutrition 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 239000005350 fused silica glass Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5419085A JPS61214700A (ja) | 1985-03-20 | 1985-03-20 | 漏洩弾性表面波トランスジユ−サ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5419085A JPS61214700A (ja) | 1985-03-20 | 1985-03-20 | 漏洩弾性表面波トランスジユ−サ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61214700A true JPS61214700A (ja) | 1986-09-24 |
| JPH0441877B2 JPH0441877B2 (enrdf_load_stackoverflow) | 1992-07-09 |
Family
ID=12963621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5419085A Granted JPS61214700A (ja) | 1985-03-20 | 1985-03-20 | 漏洩弾性表面波トランスジユ−サ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61214700A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01101799A (ja) * | 1987-10-15 | 1989-04-19 | Koji Toda | 液中超音波トランスデューサ |
| JPH01101800A (ja) * | 1987-10-15 | 1989-04-19 | Koji Toda | 液中超音波トランスデューサ |
| JPH02185239A (ja) * | 1989-01-13 | 1990-07-19 | Koji Toda | 超音波トランスデューサ及び該トランスデューサを用いた音響撮像装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113713A (en) * | 1976-03-22 | 1977-09-24 | Hitachi Ltd | Array type ultra-high frequency sound oscillator |
| JPS5474695A (en) * | 1977-11-26 | 1979-06-14 | Tdk Corp | Ultrasonic wave pick up system |
| JPS5515807U (enrdf_load_stackoverflow) * | 1978-07-14 | 1980-01-31 |
-
1985
- 1985-03-20 JP JP5419085A patent/JPS61214700A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113713A (en) * | 1976-03-22 | 1977-09-24 | Hitachi Ltd | Array type ultra-high frequency sound oscillator |
| JPS5474695A (en) * | 1977-11-26 | 1979-06-14 | Tdk Corp | Ultrasonic wave pick up system |
| JPS5515807U (enrdf_load_stackoverflow) * | 1978-07-14 | 1980-01-31 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01101799A (ja) * | 1987-10-15 | 1989-04-19 | Koji Toda | 液中超音波トランスデューサ |
| JPH01101800A (ja) * | 1987-10-15 | 1989-04-19 | Koji Toda | 液中超音波トランスデューサ |
| JPH02185239A (ja) * | 1989-01-13 | 1990-07-19 | Koji Toda | 超音波トランスデューサ及び該トランスデューサを用いた音響撮像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441877B2 (enrdf_load_stackoverflow) | 1992-07-09 |
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