JPS61208740A - 集束イオンビ−ム装置 - Google Patents

集束イオンビ−ム装置

Info

Publication number
JPS61208740A
JPS61208740A JP60049634A JP4963485A JPS61208740A JP S61208740 A JPS61208740 A JP S61208740A JP 60049634 A JP60049634 A JP 60049634A JP 4963485 A JP4963485 A JP 4963485A JP S61208740 A JPS61208740 A JP S61208740A
Authority
JP
Japan
Prior art keywords
voltage
ion beam
circuit
diodes
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60049634A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047535B2 (enrdf_load_stackoverflow
Inventor
Yoshizo Sakuma
佐久間　美三
Ryuzo Aihara
相原　竜三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60049634A priority Critical patent/JPS61208740A/ja
Publication of JPS61208740A publication Critical patent/JPS61208740A/ja
Publication of JPH047535B2 publication Critical patent/JPH047535B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60049634A 1985-03-12 1985-03-12 集束イオンビ−ム装置 Granted JPS61208740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60049634A JPS61208740A (ja) 1985-03-12 1985-03-12 集束イオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60049634A JPS61208740A (ja) 1985-03-12 1985-03-12 集束イオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS61208740A true JPS61208740A (ja) 1986-09-17
JPH047535B2 JPH047535B2 (enrdf_load_stackoverflow) 1992-02-12

Family

ID=12836646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60049634A Granted JPS61208740A (ja) 1985-03-12 1985-03-12 集束イオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS61208740A (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662069A (en) * 1979-10-25 1981-05-27 Jeol Ltd Generating device for high voltage
JPS5662070A (en) * 1979-10-25 1981-05-27 Jeol Ltd Generating device for high voltage
JPS58158849A (ja) * 1982-03-16 1983-09-21 Jeol Ltd イオン銃用電源
JPS5944800A (ja) * 1982-09-03 1984-03-13 日本電子株式会社 直流高電圧電源

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662069A (en) * 1979-10-25 1981-05-27 Jeol Ltd Generating device for high voltage
JPS5662070A (en) * 1979-10-25 1981-05-27 Jeol Ltd Generating device for high voltage
JPS58158849A (ja) * 1982-03-16 1983-09-21 Jeol Ltd イオン銃用電源
JPS5944800A (ja) * 1982-09-03 1984-03-13 日本電子株式会社 直流高電圧電源

Also Published As

Publication number Publication date
JPH047535B2 (enrdf_load_stackoverflow) 1992-02-12

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