JPH047535B2 - - Google Patents
Info
- Publication number
- JPH047535B2 JPH047535B2 JP60049634A JP4963485A JPH047535B2 JP H047535 B2 JPH047535 B2 JP H047535B2 JP 60049634 A JP60049634 A JP 60049634A JP 4963485 A JP4963485 A JP 4963485A JP H047535 B2 JPH047535 B2 JP H047535B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- voltage
- ion beam
- diode
- series circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60049634A JPS61208740A (ja) | 1985-03-12 | 1985-03-12 | 集束イオンビ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60049634A JPS61208740A (ja) | 1985-03-12 | 1985-03-12 | 集束イオンビ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61208740A JPS61208740A (ja) | 1986-09-17 |
| JPH047535B2 true JPH047535B2 (enrdf_load_stackoverflow) | 1992-02-12 |
Family
ID=12836646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60049634A Granted JPS61208740A (ja) | 1985-03-12 | 1985-03-12 | 集束イオンビ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61208740A (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5662070A (en) * | 1979-10-25 | 1981-05-27 | Jeol Ltd | Generating device for high voltage |
| JPS5662069A (en) * | 1979-10-25 | 1981-05-27 | Jeol Ltd | Generating device for high voltage |
| JPS58158849A (ja) * | 1982-03-16 | 1983-09-21 | Jeol Ltd | イオン銃用電源 |
| JPS5944800A (ja) * | 1982-09-03 | 1984-03-13 | 日本電子株式会社 | 直流高電圧電源 |
-
1985
- 1985-03-12 JP JP60049634A patent/JPS61208740A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61208740A (ja) | 1986-09-17 |
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