JPS61207035U - - Google Patents
Info
- Publication number
- JPS61207035U JPS61207035U JP9236085U JP9236085U JPS61207035U JP S61207035 U JPS61207035 U JP S61207035U JP 9236085 U JP9236085 U JP 9236085U JP 9236085 U JP9236085 U JP 9236085U JP S61207035 U JPS61207035 U JP S61207035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer mounting
- vacuum
- pin
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9236085U JPS61207035U (de) | 1985-06-17 | 1985-06-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9236085U JPS61207035U (de) | 1985-06-17 | 1985-06-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61207035U true JPS61207035U (de) | 1986-12-27 |
Family
ID=30649088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9236085U Pending JPS61207035U (de) | 1985-06-17 | 1985-06-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61207035U (de) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63142829A (ja) * | 1986-12-05 | 1988-06-15 | Nippon Telegr & Teleph Corp <Ntt> | 基板吸着固定装置 |
JPS63244643A (ja) * | 1987-03-30 | 1988-10-12 | Tokyo Electron Ltd | プローブ装置 |
JPS63308336A (ja) * | 1987-06-10 | 1988-12-15 | Tokyo Electron Ltd | 載置体機構 |
JPS6424440A (en) * | 1987-07-21 | 1989-01-26 | Canon Kk | Device for transferring and positioning flat-platelike object |
WO2003075343A1 (en) * | 2002-03-05 | 2003-09-12 | Sharp Kabushiki Kaisha | Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate |
JP2006294793A (ja) * | 2005-04-08 | 2006-10-26 | Canon Inc | ステージ装置および露光装置 |
-
1985
- 1985-06-17 JP JP9236085U patent/JPS61207035U/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63142829A (ja) * | 1986-12-05 | 1988-06-15 | Nippon Telegr & Teleph Corp <Ntt> | 基板吸着固定装置 |
JPS63244643A (ja) * | 1987-03-30 | 1988-10-12 | Tokyo Electron Ltd | プローブ装置 |
JPS63308336A (ja) * | 1987-06-10 | 1988-12-15 | Tokyo Electron Ltd | 載置体機構 |
JPS6424440A (en) * | 1987-07-21 | 1989-01-26 | Canon Kk | Device for transferring and positioning flat-platelike object |
WO2003075343A1 (en) * | 2002-03-05 | 2003-09-12 | Sharp Kabushiki Kaisha | Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate |
JP2006294793A (ja) * | 2005-04-08 | 2006-10-26 | Canon Inc | ステージ装置および露光装置 |
JP4673117B2 (ja) * | 2005-04-08 | 2011-04-20 | キヤノン株式会社 | ステージ装置および露光装置 |
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