JPS6253931U - - Google Patents
Info
- Publication number
- JPS6253931U JPS6253931U JP14498985U JP14498985U JPS6253931U JP S6253931 U JPS6253931 U JP S6253931U JP 14498985 U JP14498985 U JP 14498985U JP 14498985 U JP14498985 U JP 14498985U JP S6253931 U JPS6253931 U JP S6253931U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- vacuum chuck
- vacuum
- chuck
- suction hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14498985U JPS6253931U (de) | 1985-09-21 | 1985-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14498985U JPS6253931U (de) | 1985-09-21 | 1985-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6253931U true JPS6253931U (de) | 1987-04-03 |
Family
ID=31056109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14498985U Pending JPS6253931U (de) | 1985-09-21 | 1985-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6253931U (de) |
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1985
- 1985-09-21 JP JP14498985U patent/JPS6253931U/ja active Pending