JPS61203541U - - Google Patents
Info
- Publication number
- JPS61203541U JPS61203541U JP8682885U JP8682885U JPS61203541U JP S61203541 U JPS61203541 U JP S61203541U JP 8682885 U JP8682885 U JP 8682885U JP 8682885 U JP8682885 U JP 8682885U JP S61203541 U JPS61203541 U JP S61203541U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- etched
- introduction pipe
- cassette
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8682885U JPH0249723Y2 (https=) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8682885U JPH0249723Y2 (https=) | 1985-06-11 | 1985-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203541U true JPS61203541U (https=) | 1986-12-22 |
| JPH0249723Y2 JPH0249723Y2 (https=) | 1990-12-27 |
Family
ID=30638485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8682885U Expired JPH0249723Y2 (https=) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249723Y2 (https=) |
-
1985
- 1985-06-11 JP JP8682885U patent/JPH0249723Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249723Y2 (https=) | 1990-12-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61203541U (https=) | ||
| JPS61203542U (https=) | ||
| JP2000200698A (ja) | プラズマ処理方法及び装置 | |
| JPS61192446U (https=) | ||
| JPS63127125U (https=) | ||
| JPH07296991A (ja) | マイクロ波プラズマ発生装置 | |
| JPS63128722U (https=) | ||
| JPH07283203A (ja) | 表面処理装置 | |
| JPS6421080A (en) | Plasma cvd device | |
| JPH01158942U (https=) | ||
| JPH0138911Y2 (https=) | ||
| JPS63159821U (https=) | ||
| JPS63103738U (https=) | ||
| JPS63103737U (https=) | ||
| JPS62107439U (https=) | ||
| JPS6418727U (https=) | ||
| JPH01125357U (https=) | ||
| JPS6018541U (ja) | 気相成長装置 | |
| JPS63147815U (https=) | ||
| JPH01118400U (https=) | ||
| JPS6273542U (https=) | ||
| JPH0176033U (https=) | ||
| JPS63153527U (https=) | ||
| JPS5837137U (ja) | 半導体基板保持治具 | |
| JPH0374665U (https=) |