JPS63103738U - - Google Patents
Info
- Publication number
- JPS63103738U JPS63103738U JP19679986U JP19679986U JPS63103738U JP S63103738 U JPS63103738 U JP S63103738U JP 19679986 U JP19679986 U JP 19679986U JP 19679986 U JP19679986 U JP 19679986U JP S63103738 U JPS63103738 U JP S63103738U
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic waves
- oven
- vacuum container
- plasma
- stirrer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19679986U JPH0517150Y2 (https=) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19679986U JPH0517150Y2 (https=) | 1986-12-23 | 1986-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63103738U true JPS63103738U (https=) | 1988-07-05 |
| JPH0517150Y2 JPH0517150Y2 (https=) | 1993-05-10 |
Family
ID=31155935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19679986U Expired - Lifetime JPH0517150Y2 (https=) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517150Y2 (https=) |
-
1986
- 1986-12-23 JP JP19679986U patent/JPH0517150Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517150Y2 (https=) | 1993-05-10 |
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