JPS61203541U - - Google Patents
Info
- Publication number
- JPS61203541U JPS61203541U JP1985086828U JP8682885U JPS61203541U JP S61203541 U JPS61203541 U JP S61203541U JP 1985086828 U JP1985086828 U JP 1985086828U JP 8682885 U JP8682885 U JP 8682885U JP S61203541 U JPS61203541 U JP S61203541U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- etched
- introduction pipe
- cassette
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985086828U JPH0249723Y2 (enExample) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985086828U JPH0249723Y2 (enExample) | 1985-06-11 | 1985-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203541U true JPS61203541U (enExample) | 1986-12-22 |
| JPH0249723Y2 JPH0249723Y2 (enExample) | 1990-12-27 |
Family
ID=30638485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985086828U Expired JPH0249723Y2 (enExample) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249723Y2 (enExample) |
-
1985
- 1985-06-11 JP JP1985086828U patent/JPH0249723Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249723Y2 (enExample) | 1990-12-27 |
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