JPS6119906Y2 - - Google Patents

Info

Publication number
JPS6119906Y2
JPS6119906Y2 JP16432383U JP16432383U JPS6119906Y2 JP S6119906 Y2 JPS6119906 Y2 JP S6119906Y2 JP 16432383 U JP16432383 U JP 16432383U JP 16432383 U JP16432383 U JP 16432383U JP S6119906 Y2 JPS6119906 Y2 JP S6119906Y2
Authority
JP
Japan
Prior art keywords
polishing
mounting base
carriage
axis direction
belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16432383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6071553U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16432383U priority Critical patent/JPS6071553U/ja
Publication of JPS6071553U publication Critical patent/JPS6071553U/ja
Application granted granted Critical
Publication of JPS6119906Y2 publication Critical patent/JPS6119906Y2/ja
Granted legal-status Critical Current

Links

JP16432383U 1983-10-24 1983-10-24 研磨装置 Granted JPS6071553U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16432383U JPS6071553U (ja) 1983-10-24 1983-10-24 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16432383U JPS6071553U (ja) 1983-10-24 1983-10-24 研磨装置

Publications (2)

Publication Number Publication Date
JPS6071553U JPS6071553U (ja) 1985-05-20
JPS6119906Y2 true JPS6119906Y2 (OSRAM) 1986-06-14

Family

ID=30360293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16432383U Granted JPS6071553U (ja) 1983-10-24 1983-10-24 研磨装置

Country Status (1)

Country Link
JP (1) JPS6071553U (OSRAM)

Also Published As

Publication number Publication date
JPS6071553U (ja) 1985-05-20

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