JPS61199036U - - Google Patents
Info
- Publication number
- JPS61199036U JPS61199036U JP8305285U JP8305285U JPS61199036U JP S61199036 U JPS61199036 U JP S61199036U JP 8305285 U JP8305285 U JP 8305285U JP 8305285 U JP8305285 U JP 8305285U JP S61199036 U JPS61199036 U JP S61199036U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- core tube
- furnace core
- entrance
- loader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8305285U JPH02909Y2 (en:Method) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8305285U JPH02909Y2 (en:Method) | 1985-05-31 | 1985-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199036U true JPS61199036U (en:Method) | 1986-12-12 |
| JPH02909Y2 JPH02909Y2 (en:Method) | 1990-01-10 |
Family
ID=30631328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8305285U Expired JPH02909Y2 (en:Method) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02909Y2 (en:Method) |
-
1985
- 1985-05-31 JP JP8305285U patent/JPH02909Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02909Y2 (en:Method) | 1990-01-10 |