JPS61197035U - - Google Patents

Info

Publication number
JPS61197035U
JPS61197035U JP8148785U JP8148785U JPS61197035U JP S61197035 U JPS61197035 U JP S61197035U JP 8148785 U JP8148785 U JP 8148785U JP 8148785 U JP8148785 U JP 8148785U JP S61197035 U JPS61197035 U JP S61197035U
Authority
JP
Japan
Prior art keywords
wafer
cap
suctioning
conical member
shaped conical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8148785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328029Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985081487U priority Critical patent/JPH0328029Y2/ja
Publication of JPS61197035U publication Critical patent/JPS61197035U/ja
Application granted granted Critical
Publication of JPH0328029Y2 publication Critical patent/JPH0328029Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985081487U 1985-05-30 1985-05-30 Expired JPH0328029Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985081487U JPH0328029Y2 ( ) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985081487U JPH0328029Y2 ( ) 1985-05-30 1985-05-30

Publications (2)

Publication Number Publication Date
JPS61197035U true JPS61197035U ( ) 1986-12-09
JPH0328029Y2 JPH0328029Y2 ( ) 1991-06-17

Family

ID=30628314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985081487U Expired JPH0328029Y2 ( ) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPH0328029Y2 ( )

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013730A1 (fr) * 1990-03-16 1991-09-19 Nagoya Oilchemical Co., Ltd. Disque aspirant
JP2014227260A (ja) * 2013-05-22 2014-12-08 株式会社ハーモテック 搬送装置
EP3354608A1 (en) * 2017-01-31 2018-08-01 Brother Kogyo Kabushiki Kaisha Article holding device
WO2022158486A1 (ja) * 2021-01-22 2022-07-28 株式会社コガネイ 非接触搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124836A (ja) * 1983-12-09 1985-07-03 Nec Corp 半導体集積回路装置の製造装置
JPS61254437A (ja) * 1985-04-27 1986-11-12 Fujitsu Ltd ウエハ−チヤツク

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124836A (ja) * 1983-12-09 1985-07-03 Nec Corp 半導体集積回路装置の製造装置
JPS61254437A (ja) * 1985-04-27 1986-11-12 Fujitsu Ltd ウエハ−チヤツク

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013730A1 (fr) * 1990-03-16 1991-09-19 Nagoya Oilchemical Co., Ltd. Disque aspirant
JP2014227260A (ja) * 2013-05-22 2014-12-08 株式会社ハーモテック 搬送装置
EP3354608A1 (en) * 2017-01-31 2018-08-01 Brother Kogyo Kabushiki Kaisha Article holding device
CN108453777A (zh) * 2017-01-31 2018-08-28 兄弟工业株式会社 物品保持装置
WO2022158486A1 (ja) * 2021-01-22 2022-07-28 株式会社コガネイ 非接触搬送装置

Also Published As

Publication number Publication date
JPH0328029Y2 ( ) 1991-06-17

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