JPS61197035U - - Google Patents
Info
- Publication number
- JPS61197035U JPS61197035U JP8148785U JP8148785U JPS61197035U JP S61197035 U JPS61197035 U JP S61197035U JP 8148785 U JP8148785 U JP 8148785U JP 8148785 U JP8148785 U JP 8148785U JP S61197035 U JPS61197035 U JP S61197035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cap
- suctioning
- conical member
- shaped conical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図および第２図は従来装置の側断面図、第
３図は本考案の側断面図、第４図は第３図の―
線矢視図。 １０：ノズル、１６：笠状円錐部材、２２：ウ
エハ、２４：基準バー。
３図は本考案の側断面図、第４図は第３図の―
線矢視図。 １０：ノズル、１６：笠状円錐部材、２２：ウ
エハ、２４：基準バー。
Claims (1)
- 笠状円錐部材の内部を負圧とすることにより、
ウエハを吸着固定する装置において、前記笠状円
錐部材の底面部に、ウエハを吸着するための基準
バーを設けたことを特徴とするウエハ搬送用吸着
装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081487U JPH0328029Y2 (ja) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081487U JPH0328029Y2 (ja) | 1985-05-30 | 1985-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61197035U true JPS61197035U (ja) | 1986-12-09 |
| JPH0328029Y2 JPH0328029Y2 (ja) | 1991-06-17 |
Family
ID=30628314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985081487U Expired JPH0328029Y2 (ja) | 1985-05-30 | 1985-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328029Y2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991013730A1 (fr) * | 1990-03-16 | 1991-09-19 | Nagoya Oilchemical Co., Ltd. | Disque aspirant |
| JP2014227260A (ja) * | 2013-05-22 | 2014-12-08 | 株式会社ハーモテック | 搬送装置 |
| EP3354608A1 (en) * | 2017-01-31 | 2018-08-01 | Brother Kogyo Kabushiki Kaisha | Article holding device |
| WO2022158486A1 (ja) * | 2021-01-22 | 2022-07-28 | 株式会社コガネイ | 非接触搬送装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60124836A (ja) * | 1983-12-09 | 1985-07-03 | Nec Corp | 半導体集積回路装置の製造装置 |
| JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
-
1985
- 1985-05-30 JP JP1985081487U patent/JPH0328029Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60124836A (ja) * | 1983-12-09 | 1985-07-03 | Nec Corp | 半導体集積回路装置の製造装置 |
| JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991013730A1 (fr) * | 1990-03-16 | 1991-09-19 | Nagoya Oilchemical Co., Ltd. | Disque aspirant |
| JP2014227260A (ja) * | 2013-05-22 | 2014-12-08 | 株式会社ハーモテック | 搬送装置 |
| EP3354608A1 (en) * | 2017-01-31 | 2018-08-01 | Brother Kogyo Kabushiki Kaisha | Article holding device |
| CN108453777A (zh) * | 2017-01-31 | 2018-08-28 | 兄弟工业株式会社 | 物品保持装置 |
| WO2022158486A1 (ja) * | 2021-01-22 | 2022-07-28 | 株式会社コガネイ | 非接触搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0328029Y2 (ja) | 1991-06-17 |