JPS61196528U - - Google Patents

Info

Publication number
JPS61196528U
JPS61196528U JP5716185U JP5716185U JPS61196528U JP S61196528 U JPS61196528 U JP S61196528U JP 5716185 U JP5716185 U JP 5716185U JP 5716185 U JP5716185 U JP 5716185U JP S61196528 U JPS61196528 U JP S61196528U
Authority
JP
Japan
Prior art keywords
wafer support
dry etching
etching apparatus
wafer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5716185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5716185U priority Critical patent/JPS61196528U/ja
Publication of JPS61196528U publication Critical patent/JPS61196528U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5716185U 1985-04-17 1985-04-17 Pending JPS61196528U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5716185U JPS61196528U (no) 1985-04-17 1985-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5716185U JPS61196528U (no) 1985-04-17 1985-04-17

Publications (1)

Publication Number Publication Date
JPS61196528U true JPS61196528U (no) 1986-12-08

Family

ID=30581431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5716185U Pending JPS61196528U (no) 1985-04-17 1985-04-17

Country Status (1)

Country Link
JP (1) JPS61196528U (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225121A (ja) * 1988-03-04 1989-09-08 Hitachi Ltd 低温ドライエッチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225121A (ja) * 1988-03-04 1989-09-08 Hitachi Ltd 低温ドライエッチング装置

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