JPS61196175A - Automatic handler for automatically changing over kind of products - Google Patents

Automatic handler for automatically changing over kind of products

Info

Publication number
JPS61196175A
JPS61196175A JP60036341A JP3634185A JPS61196175A JP S61196175 A JPS61196175 A JP S61196175A JP 60036341 A JP60036341 A JP 60036341A JP 3634185 A JP3634185 A JP 3634185A JP S61196175 A JPS61196175 A JP S61196175A
Authority
JP
Japan
Prior art keywords
data
test
lsi
lsis
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60036341A
Other languages
Japanese (ja)
Inventor
Takeyoshi Uchibori
内堀 剛好
Katsuhiko Takeda
竹田 勝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60036341A priority Critical patent/JPS61196175A/en
Publication of JPS61196175A publication Critical patent/JPS61196175A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To contrive automation and labor saving of inspection work, by providing a printed character reader ad an automatic test adaptor board change-over mechanism for ICs/LSIs. CONSTITUTION:ICs/LSIs set on a loader mechanism 2 are supplied sequentially to a positioning mechanism 3 and when the positioning is completed, an end signal is fed to a printed character reader 6. After finishing the reading, the unit 6 sends the data read to a host CPU 8 and an automatic test adaptor board change-over mechanism 7. On the other hand, the CPU 8 in which a table of test data product names and the like for the respective ICs/LSIs product names are memorized and collates the product name sent from the unit 6 with the product names of the table to identify data corresponding to the coincident item name and stores the matched data from an external memory 10 by indexing to be processed to such a level that it is can be tested with an LSI tester 9. Then, the processed data is fed to the tester 9. The mechanism 7 processes the product name data received to automatically turn it to the corresponding test adaptor board. At the same time, the tester 9 is started to perform a test on set conditions to discriminate and the product inspected is discharged 5.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、LSI検査等のマテハンの自動化に係り、特
に検査工数の低減、省力化に有効なオートハンドラに関
する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to automation of material handling such as LSI inspection, and particularly relates to an autohandler that is effective in reducing inspection man-hours and saving labor.

〔発明の背景〕[Background of the invention]

従来のオートハンドラについては、タケダ理研@)発行
のカタoグLSI/VLSI  TESTSYSTEM
S  ADVANTEST(1983年10月)P13
〜P16にHandierとして製品紹介されている。
For conventional autohandlers, please refer to the catalog LSI/VLSI TESTSYSTEM published by Takeda Riken@).
S ADVANTEST (October 1983) P13
The product is introduced as Handier on page 16.

これらハンドラは、テストヘッドをIC/LSIの品種
に応じて人手で交換する必要がありまたI C/L S
 Iの品種に対応する検査データの切換え指令も人手で
VDTよりキーインする必要がある。このため、比較的
少品種かつ一品種あたりの生産量が多いIC/LSIに
は有効な自動検査設備であるが、多品種少量生産の場合
、品種が変わる毎に人手によるテストヘッドの交換並び
にVDTからの人手キーインによる検査データの切換え
を繁雑に実施する必要があり、オートハンドラとしての
効果が大巾に低下する欠点があった。
These handlers require manual replacement of test heads depending on the type of IC/LSI, and IC/LSI
It is also necessary to manually enter a command to switch the inspection data corresponding to the type I from the VDT. For this reason, automatic inspection equipment is effective for IC/LSIs that have a relatively small number of products and a high production volume per product. However, in the case of high-mix, low-volume production, it is necessary to manually replace the test head and VDT each time the product changes. It is necessary to perform complicated switching of inspection data by manual key-in, which has the disadvantage that the effectiveness as an autohandler is greatly reduced.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、試験すべき多品種のIC/LSIに関
し、各品種に対応する検査データ及びテストアダプタボ
ードを自動的に切換え試験し、人手介入を全く必要とし
ないIC/LSI用オートハンドラを提供することにあ
る。
An object of the present invention is to provide an IC/LSI autohandler that automatically switches and tests inspection data and test adapter boards corresponding to each type of IC/LSI to be tested, and does not require any human intervention. It is about providing.

〔発明の概要〕[Summary of the invention]

本発明の特徴は、上記目的を達成するために試験すべき
I C/L S Iの捺印文字を、例えば画像処理方式
による捺印文字読取り装置で読取り、結果をホス)CP
U及びテストアダプタボード自動切換機構に送り、ホス
トCPUからは対応する試験データ、試験プログラムが
検索されLSIテスタへ返され、対応するテストアダプ
タボードがセットされるという一連の品種切換動作を自
動で行なうものである。
The present invention is characterized in that, in order to achieve the above object, the stamped characters of the IC/LSI to be tested are read by a stamped character reading device using, for example, an image processing method, and the results are read by a host)
The host CPU automatically performs a series of type switching operations in which the test data and test program are retrieved from the host CPU and returned to the LSI tester, and the corresponding test adapter board is set. It is something.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を添付図面に基づいて説明する
Hereinafter, one embodiment of the present invention will be described based on the accompanying drawings.

第1図は、本発明による品種自動切換えオートハンドラ
と関係機器のブロック図である。1は品種自動切換えオ
ートハンドラ本体、2は工C/LSIを順次供給するロ
ーダ機構、3は供給されたI C/L S Iをあらか
じめ設定した所定の位置まで搬送し位置決めを行なう搬
送位置決め機構、4は被試験物となるIC/LSIをテ
ストヘッドへハンドリングするハンドリング機構、5は
試験終了したLSIを良否に判別し収納するアンローダ
機構、6はIC/LSIの捺印文字読取り装置で実施例
では画像処理方式によっている。7はテストボード切換
え機構で関係機器として外部補助記憶装置10を持つホ
ストCPU8及びLSIテスタ9がある。
FIG. 1 is a block diagram of an automatic product type switching autohandler and related equipment according to the present invention. 1 is a main body of an autohandler for automatic type switching; 2 is a loader mechanism that sequentially supplies the IC/LSI; 3 is a transport positioning mechanism that transports and positions the supplied IC/LSI to a preset position; 4 is a handling mechanism that handles the IC/LSI to be tested to the test head; 5 is an unloader mechanism that determines whether the LSI that has been tested is good or bad and stores it; and 6 is an IC/LSI stamp reading device, which is an image sensor in the embodiment. It depends on the processing method. Reference numeral 7 denotes a test board switching mechanism, and related equipment includes a host CPU 8 and an LSI tester 9 having an external auxiliary storage device 10.

次に品種自動切換えオートハンドラの動作について説明
する。ローダ機構2にセット、準備されたIC/LSI
は該機構2により順次搬送位置決め機構3に供給されて
くる。搬送位置決め機構3は供給されたIC/LSIを
所定の位置で止め、位置決めをし、位置決めが完了した
時点で、完了信号を捺印文字読取り装置6に送信する。
Next, the operation of the automatic type switching autohandler will be explained. IC/LSI set and prepared in loader mechanism 2
are sequentially supplied to the transport positioning mechanism 3 by the mechanism 2. The transport positioning mechanism 3 stops and positions the supplied IC/LSI at a predetermined position, and when the positioning is completed, transmits a completion signal to the stamped character reading device 6.

捺印文字読取り装置6はこの完了信号を受信確認後読取
りを開始する。該装置6は読取り終了後、読取りデータ
をIC/LSIの品名として、ホス)CPU8とテスト
アダプタボード自動切換え機構7に送る。第2図は、各
IC/LSI品名に対応する試験データ名、試験プログ
ラム名及びテストアダプタボードのテーブルを示す。こ
のテーブルは、ホストCPU8の内部記憶装置に記憶さ
れており、ホス)CPU8は捺印文字読取り装置6から
送られた品名とテーブルの品名を照合比較し、一致した
品名に対応する行のデータを、例えば品名nい試験デー
タ名dい試験プログラム名p1、テストアダプタボード
t、を抜き出してくる6次にホストCPU8は、試験デ
ータ名d、及び試験プログラム名p、で表わされるデー
タを外部記憶装置10より索引して一致したデータを8
の内部記憶装置に格納し、LSIテスタ9が試験実行で
きるレベルにデータ処理し、LSIテスタ9に処理デー
タを受は渡す。
The stamped character reading device 6 starts reading after receiving and confirming the completion signal. After the reading is completed, the device 6 sends the read data as the IC/LSI product name to the host CPU 8 and the test adapter board automatic switching mechanism 7. FIG. 2 shows a table of test data names, test program names, and test adapter boards corresponding to each IC/LSI product name. This table is stored in the internal storage device of the host CPU 8, and the host CPU 8 compares and compares the product name sent from the stamped character reader 6 with the product name in the table, and stores the data in the row corresponding to the matched product name. For example, the host CPU 8 extracts the product name (n), the test data name (d), the test program name (p1), and the test adapter board (t). 8 indexed and matched data
The LSI tester 9 stores the data in its internal storage device, processes the data to a level at which the LSI tester 9 can execute the test, and then passes the processed data to the LSI tester 9.

一方テストアダプタボード自動切換え機構7は、受信し
た品名データを処理し、該当するテストアダプタボード
に自動的に切換える。この間被試験物のIC/LSIは
搬送位置決め機構3よりハンドリング機構4によりテス
トヘッドにセットされ試験準備光となる。この時、LS
Iテスタ9に試験開始の起動がかかり、LSIテスタ9
はテストヘッドにセットされたIC/LSIに一致した
試験条件、試験データで試験される。試験終了後は良否
によってアンローダ機構5で判別排出される。
On the other hand, the test adapter board automatic switching mechanism 7 processes the received product name data and automatically switches to the corresponding test adapter board. During this time, the IC/LSI to be tested is set on the test head by the handling mechanism 4 from the transport positioning mechanism 3, and becomes a test preparation light. At this time, L.S.
The I tester 9 is activated to start the test, and the LSI tester 9
is tested using test conditions and test data that match the IC/LSI set in the test head. After the test is completed, the unloader mechanism 5 determines whether it is good or bad and discharges it.

本実施例によれば、多品種のIC/LSIの試験が全自
動で実施でき、検査効率向上の効果がある。
According to this embodiment, testing of a wide variety of IC/LSIs can be carried out fully automatically, which has the effect of improving testing efficiency.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、多品種少量生産のI C/LSIの試
験が効率良〈実施でき、検査作業の自動化、省力化に大
きな効果がある。
According to the present invention, testing of IC/LSI for high-mix, low-volume production can be carried out efficiently, and it is highly effective in automating testing work and saving labor.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の品種自動切換オートハンド
ラのブロック図、第2図はLSI品名に対応する各パラ
メータをテーブル形式で示す表示図である。 2・・・ローダ機構 5・・・搬送位置決め機構 4・・・ハンドリング機構 5・・・アンローダ機構 6・・・捺印文字読喉す装置 8・・・ホストCPU 9・・・LSIテスタ 10・・・外部補助記憶装置 第 1 図 第2図
FIG. 1 is a block diagram of an automatic product type switching autohandler according to an embodiment of the present invention, and FIG. 2 is a display diagram showing parameters corresponding to LSI product names in a table format. 2...Loader mechanism 5...Transfer positioning mechanism 4...Handling mechanism 5...Unloader mechanism 6...Sealed character reading device 8...Host CPU 9...LSI tester 10...・External auxiliary storage device Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1、LSIを順次供給するローダ機構と、供給されたL
SIを所定の位置まで搬送し位置決めを行う搬送位置決
め機構と、LSIを試験すべくテストヘッドへハンドリ
ングするハンドリング機構と、試験終了後のLSIを良
否に判別収納するアンローダ機構より成るオートハンド
ラにおいて、IC/LSIの捺印文字読取り装置とテス
トアダプタボード自動切換え機構を設けたことを特徴と
する品種自動切換えオートハンドラ。
1. Loader mechanism that sequentially supplies LSIs and supplied LSIs
An autohandler consists of a transport positioning mechanism that transports and positions the SI to a predetermined position, a handling mechanism that handles the LSI to the test head for testing, and an unloader mechanism that determines whether the LSI is good or bad after the test and stores it. /An automatic product type switching autohandler characterized by being equipped with an LSI stamped character reading device and a test adapter board automatic switching mechanism.
JP60036341A 1985-02-27 1985-02-27 Automatic handler for automatically changing over kind of products Pending JPS61196175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60036341A JPS61196175A (en) 1985-02-27 1985-02-27 Automatic handler for automatically changing over kind of products

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60036341A JPS61196175A (en) 1985-02-27 1985-02-27 Automatic handler for automatically changing over kind of products

Publications (1)

Publication Number Publication Date
JPS61196175A true JPS61196175A (en) 1986-08-30

Family

ID=12467127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60036341A Pending JPS61196175A (en) 1985-02-27 1985-02-27 Automatic handler for automatically changing over kind of products

Country Status (1)

Country Link
JP (1) JPS61196175A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179267A (en) * 1987-01-21 1988-07-23 Tokyo Electron Ltd Measuring instrument for many kinds of articles
JPH01292270A (en) * 1988-05-19 1989-11-24 Tokyo Electron Ltd Probe device
JPH028757A (en) * 1988-06-27 1990-01-12 Tokyo Electron Ltd Probe apparatus
US7562350B2 (en) 2000-12-15 2009-07-14 Ricoh Company, Ltd. Processing system and method using recomposable software

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179267A (en) * 1987-01-21 1988-07-23 Tokyo Electron Ltd Measuring instrument for many kinds of articles
JPH01292270A (en) * 1988-05-19 1989-11-24 Tokyo Electron Ltd Probe device
JPH028757A (en) * 1988-06-27 1990-01-12 Tokyo Electron Ltd Probe apparatus
US7562350B2 (en) 2000-12-15 2009-07-14 Ricoh Company, Ltd. Processing system and method using recomposable software

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