JPH1032231A - Inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device, which can veryfy the display contents of a display panel easily and rapidly without being controlled by a use language and can cope rapidly with an error. SOLUTION: This probing device is provided with a loader part 13 provided with a tweezers 12 for transferring semiconductor wafers W in cassette C, a prober part 14 for inspecting the wafers W transferred via the above tweezers 12, a controller 15 for controlling this prober part 14 and the loader part 13 and a display device 16 having a display panel for displaying an operating key 161A of this controller 15, an identification symbol key S1 to correspond to the above key 161A is displayed on the display panel 161 along with the key 161A and the operational contents of the key 161A are displayed in another expression different from the language of a use country by the operation of the key S1 .

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus capable of quickly performing maintenance measures such as error measures without being influenced by the language of the country of use.

[0002]

2. Description of the Related Art As shown in FIGS. 7 to 9, a conventional inspection apparatus, for example, a probe apparatus 10 for performing an electrical inspection of a semiconductor wafer, mounts a semiconductor wafer W stored in a cassette C on a cassette. Loading section 11 and cassette loading section 1
A loader section 13 having tweezers 12 for carrying one semiconductor wafer W; and tweezers 12 of the loader section 13
Comprising a prober unit 14 for inspecting the semiconductor wafer W transferred through the controller, a controller 15 for controlling the prober unit 14 and the loader unit 13, and a display device 16 having a display panel for operating the controller 15. Have been.

The loader section 13 is provided with a sub-chuck 17 for performing a so-called pre-alignment, which adjusts the direction of the semiconductor wafer W with reference to an orientation flat. Therefore, the tweezers 12 unloads the semiconductor wafer from the cassette, pre-aligns the semiconductor wafer W with the sub chuck 17, and then transfers the semiconductor wafer W to the prober unit 1.
4.

In the prober section 14, a main chuck 18 on which a semiconductor wafer W is mounted can be moved in X, Y, Z and θ directions, and the semiconductor wafer W mounted on the main chuck 18 is inspected. An alignment mechanism 19 for accurately aligning the position and a probe card 20 having probe needles 20A for performing an electrical inspection of the semiconductor wafer W aligned by the alignment mechanism 19 are provided. A test head 21 is rotatably arranged on the prober unit 14, and the probe card 20 and a tester (not shown) are electrically connected to each other via the test head 21 swiveled on the prober unit 14. From the main chuck 1 via the probe card 20.
8 is applied to the semiconductor wafer W on the semiconductor wafer W, and a plurality of IC chips formed on the semiconductor wafer W are sequentially subjected to electrical inspection by a tester.

[0005] Then, the tweezers 12 removes the uninspected semiconductor wafer W from the cassette C of the loader unit 13 by the prober unit 1.
4 to the main chuck 18 and the main chuck 1
The semiconductor wafer W having been inspected is received from 8 and returned to the cassette C.

Meanwhile, in the case of the conventional probe device 10, an error such as an inspection result of the semiconductor wafer W, an operation status of the loader unit 13 and the prober unit 14, or an operation error or an operation error is displayed on the display panel 161. The indication is made in the language of the country of use. An operation panel is displayed on the display panel 161, and when operating the probe device 10, the operation is performed via operation keys displayed on the operation panel. The operation keys are displayed in the language of the country of use, and various operations are performed according to the display contents of the operation keys.

[0007]

However, in the case of the conventional probe device 10, the display panel 161 is displayed in the language of the country of use. For example, when the country of use is Korea, the display panel 161 is displayed in Korean characters. For display, for example, a Japanese operator checks the inspection status of the semiconductor wafer W, the operation status of the loader unit 13 and the prober unit 14, or the error status such as an operation error and an operation error in order to perform maintenance of the probe device. Even for Japanese, Hangul characters are often incomprehensible,
When performing maintenance, the operation contents of the operation keys must be checked every time the operation is performed.For the confirmation, a comparison table etc. corresponding to each display content must be prepared in advance, and the operation must not be performed according to the comparison table. Therefore, there is a problem that time is required for the control work, a large amount of time is required for maintenance, and it is not possible to quickly perform maintenance measures such as error measures.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and can easily and quickly check the display contents of a display panel without being influenced by a language used, and can take maintenance measures such as error measures. It is an object of the present invention to provide an inspection device capable of performing inspection quickly.

[0009]

According to a first aspect of the present invention, there is provided an inspection apparatus for mounting an object to be inspected contained in a container and transporting the object to be inspected in the mounting portion. A loader unit having a transport mechanism, a prober unit for inspecting an object to be inspected transported via the transport mechanism of the loader unit, a controller for controlling the prober unit and the loader unit, and a display for operating the controller A display device having a panel, wherein an operation key for operating the controller is displayed on the display panel in a language of a country of use on the display panel, the identification key corresponding to the operation key being the operation key Together with the display panel, and the operation of the operation key is displayed in another expression different from the language of the country of use by operating the identification key.

According to a second aspect of the present invention, there is provided an inspection apparatus including a mounting portion for mounting an inspection object stored in a container, and a transport mechanism for transporting the inspection object in the mounting portion. A display unit having a loader unit, a prober unit for inspecting an object to be inspected conveyed via a transfer mechanism of the loader unit, a controller for controlling the prober unit and the loader unit, and a display panel for operating the controller. An inspection apparatus comprising an apparatus and an operation key for operating the controller is displayed on the display panel in the language of the country of use, and an identification symbol corresponding to the operation key is displayed on the display panel together with the operation key. Displaying the operation history of the operation key with a common symbol by operating the specific key displayed when an error occurs with reference to the identification symbol. A.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on the embodiments shown in FIGS. The probe device 10 of the present embodiment is mechanically structured in accordance with a conventional device. That is, this probe device 10 of the present embodiment
As shown in FIG. 9 to FIG. 9, a mounting portion 11 for mounting a semiconductor wafer W as an object to be inspected stored in a cassette C, and a transfer mechanism for transferring the semiconductor wafer W mounted on the mounting portion 11 Loader unit 13 with tweezers 12
A prober unit 14 for inspecting the semiconductor wafer W transferred via the tweezers 12 of the loader unit 13, a controller 15 for controlling the prober unit 14 and the loader unit 13, and a display panel 161 for operating the controller 15 And a display device 16 having the same. The display panel 161 displays the inside of the prober unit 14 captured by a CCD camera or the like, or displays an operation panel for operating the probe device 10 via the controller 15 by switching the display screen. . An operation key is displayed on a part of the display panel 161, and by touching the operation key, for example, the display screen is switched from the display screen of the captured image to the display screen of the operation panel. In the following, the operation panel will be described with the same reference numerals as those of the display panel, as necessary.

The display panel 161 displays display screens in various modes such as a screen display mode, an operation display mode, and an error display mode, and each screen is assigned a screen code number. Each mode is displayed on the display panel 161 according to a predetermined program, and is stored in the storage device. In the screen display mode, a data file such as an inspection result of a semiconductor wafer is read and displayed on the display panel 161, and the screen is stored in a history file together with a screen code. Similarly, in the operation display mode or the error display mode, the operation history or the error history of the operation key is stored in the history file. Thus, the operation history of the operation keys and the error history can be appropriately confirmed at the time of maintenance or the like.

For example, in the operation display mode, operation keys 161A are displayed on the display panel 161 as shown in FIGS. 1A to 1C, and the probe device 10 can be operated by touching the operation keys 161A. So that
In addition, another operation key is used to sequentially switch to another operation panel. Each operation panel 161 displays an operation key 161A for starting a predetermined process, for example, as shown in FIGS.
The processing is started by touching 1A. If the country of use of the probe device 10 is Japan, "Start" is displayed in Japanese on the operation key 161A (see (a) of the figure), and if the country of use is English-speaking, the operation key 1 is displayed.
"Start" is displayed in English on 61A (see (b) of the figure), and if the country of use is Korea, "Start" is displayed on the operation key 161A in Korean characters (see (c) of the figure). ), The operation key 161A can be recognized as a start operation key for starting the processing. Accordingly, the operation keys 161A include operation keys for performing various operations, and the operation keys 161A display the respective operation contents in the language of the country of use.

Further, in the case of the probe device 10 of the present embodiment, as shown in FIGS. 1A to 1C, various operation keys 161A are provided with identification symbol keys Sn corresponding to the respective operation keys 161A.
(However, n is a natural number: In the case of FIG. 1, it is shown as n = 1), and the identification symbol key Sn is displayed on the operation panel 161 alongside the operation key 161A. For example, when a touch operation identification symbol key S ₁ displayed in the FIG. 1 (a) ~ (c) , for example, operation contents of the operation keys 161A to the common space 161B with a common space 161B opens to the lower end portion of the operation panel 161 Can be displayed in a different language from the language of the country of use. By displaying the operation content of the operation key 161A in a different expression different from the language of the country of use, the maintenance staff of the country of shipment can maintain the device in the country of use even if the country of use and the country of shipment are different. If the operation key 161A is displayed in Korean language, which is the country of use, as shown in FIG. 1 (c), for example, the operation key 161A is displayed in Korean. Operation keys 161 even if you do not understand
By operating the identification symbol key S ₁ which is adjacent to the A, operation key is expressed as "START" in English, the international common language of the operation contents of the 161A to the common space 161B, common operation contents of the operation key 161A space 161B Can be easily and promptly confirmed from the displayed contents of the operation key 161A to operate the operation key 161A. Further, when an error occurs in the apparatus, a specific operation key 161A and an identification symbol key Sn are displayed side by side, and the operation history or error history of the operation key is displayed by a predetermined symbol by touching these keys. By reading the symbols, the history of the operation keys and the error history can be confirmed, so that measures against errors can be taken promptly. The identification key Sn is allocated as a unique identification key Sn to each of a large number of operation keys 161A displayed on the display panel 161. If the identification key Sn is touch-operated, the common space 161B is described above. Opens at the lower end of the display panel 161 to display the operation contents of each operation key 161A in an expression understandable by the operator.

For example, as shown in FIG. 1B, when the country of shipment of the probe device 10 is Japan and the country of use is English-speaking, the operation key 161A indicates the operation content "Start".
Is displayed in English, the language of the country of use, and the common space 1
In FIG. 61B, "START" meaning "start" is displayed. In the case where the shipping country of the probe device 10 is Japan and the country of use is Korea as shown in FIG. 3C, the operation key "161" is the language of the country of use in the operation key 161A. "STAR" which is displayed in Korean characters and means "start" in the common space 161B.
T "is displayed. Therefore, even if the operator cannot understand the meaning of “start” expressed in Korean characters, by touching the identification symbol key S ₁ , the “START” displayed in the common space 161B is touched.
By reading the display, the operation content of the operation key 161A can be easily and quickly confirmed.

Next, the operation of checking the operation history and error history of the probe device 10 using the screen display mode and the error display mode displayed on the display panel 161 will be described with reference to FIGS. When the error history is checked at the time of maintenance or the like, the error display mode is used. In the error display mode, the error content and the history are displayed on the display panel 161 according to the flowchart shown in FIG. When checking the error history, if the country of use of the probe device 10 is South Korea, the display panel 16
1 is displayed in Hangul characters. If the operator cannot understand the Hangul characters, the operation contents of the various operation keys 161A displayed on the error display mode screen are operated by operating the identification key Sn assigned to each. The operation content is confirmed every time the operation is performed, and the error content can be easily and quickly confirmed on the display panel 161. Further, the identification symbol key Sn (e.g. FIG. 4 the identification symbol key S ₂ to S ₆₎ appears as ○ mark key of the operation keys 161A lower right labeled such as "various functions" in the display screen of FIG. 4 , "various functions", which is the operation contents of the operation key 161A by the ○ mark key S ₅ at the bottom right of the (operation key 161A to display a variety of functions to the next screen) touch operation "various functions" (FIG. 4 Is displayed in Japanese that can be understood by the Japanese operator, but may be expressed in Hangul characters or the like that are difficult for the Japanese operator to understand). The operation key 161A is displayed on the display panel 161B, and after confirming that the operation key 161A is an operation key for displaying “various functions” on the next screen, the operation key 161A is touch-operated. It is so as to display the contents of various functions in the following screen shown in FIG. 5 to 1. Similarly, FIG. 5, for example identification symbol key S ₁₁ is displayed as the operation keys 161A ○ mark key lower right labeled "Error Log", the operation key 161 of the "error log" corresponding to the identification symbol keys S ₁₁
When touched A, next screen shown in Figure 6 is displayed on the display panel 161, the next available ○ mark keys and contents of the error log (S ₁₄ ~S ₁₇₎ is displayed. In FIG. 4, since the symbol of the identification symbol key Sn cannot be entered in the circle, the symbol is shown using a leader line for convenience.

In place of the identification key Sn, a specific key (a simple 印 key) may be provided as shown in FIGS. 5 and 6, and the identification symbol Sn may be attached immediately above each 印 key.
In this case, the operation key 161 corresponding to the identification symbol Sn
A list showing the operation contents of A is opened in a part of the screen, and by operating a specific key while referring to this list, the operation history of the operation keys 161A is displayed in a common symbol (for example, the same symbol as the identification symbol). Sn). In this case, the operator can display the operation history from the history file as a screen displayed with a common symbol by operating a specific key, and the display content of the display panel 161 is not affected by the language used by the common symbol. Can be easily and quickly confirmed, and an error can be promptly dealt with.

Therefore, according to the flowchart shown in FIG. 2, when it is detected that an error has occurred in the probe device 10 and it is determined that an error has occurred (step 1),
The error code is saved in a history file, and the date and time when the error occurred, the content, and the like are saved (step 2). Next, an error occurrence notification screen for notifying the operator of the occurrence of an error is shown in FIG.
Is displayed on the display panel 161 (step 3). Then, it is checked which of the error processing keys displayed in FIG. 4 has been selected (step 4), and "various functions"
If it is confirmed that the operation key 161A displayed as "Touch operation" has been touched, a display selection screen for error processing is displayed on the display panel 161 as shown in FIG. 5 (step 5). Next, it is determined whether to display the error history or the operation history (step 6), and it is determined that the operation key 161A indicated as “error log” in FIG. 5 is touch-operated to display the error history. In this case, the error code can be read from the history file and displayed on the display panel 161 as shown in FIG. 6 to list the date and time when the error occurred, the content of the error, and the like (step 7). However, FIG.
Only the format of the error history display screen is shown, and specific error contents are not shown. On the other hand, the operation key 16 displayed as “operation log” in FIG.
If it is determined that 1A has been touched and the operation history is to be displayed, the operation code is read from the history file and the content is displayed on the display panel 161 according to the display content of FIG. 6 (step 8).

Thereafter, the process waits for selection of a process on the screen (step 9). It is determined whether or not the error display mode or the history display mode is terminated and the display returns to the previous screen. A selection screen is displayed on the display panel 161, and the display selection in step 6 is waited. In step 6, when the operation key 161A displayed as "previous screen" is selected on the display selection screen shown in FIG. 5, the process returns to step 3 to display the error occurrence notification screen shown in FIG. 4 on the display panel 161. , And waits for the next processing to be selected in step 4. When the operation key 161A displayed as "Retry" is selected on the error occurrence notification screen shown in FIG. 4 in step 4, the display of the error occurrence notification screen is terminated, and the process returns to step 1 to display the next error. Wait until it happens. By repeating such a series of operations, the error history of the probe device 10 is stored. When the operator checks the error history, the operator calls the error history display screen on the display panel 161 and lists the error history. Thus, the error history of the probe device 10 can be always grasped. Further, the history can be printed out by a printer (step 10) or saved to a floppy disk by touching a key displayed as "FD writing" on the error history display screen (step 11). The operator can grasp the past operation history, promptly investigate the error, and promptly take an error countermeasure. When the operation contents displayed on each operation key 161A cannot be understood in the above operation, the operation contents can be confirmed by touching each of the O keys as described above.

The history display mode processes according to the flowchart shown in FIG. Also in this case, if the operation key 161A displayed on the display panel 161 or the ○ mark key as the identification symbol key Sn is operated, the contents of the operation can be confirmed each time the operation is performed. That is, after the screen in the history display mode is displayed on the display panel 161 by touching the operation key 161A of "operation log" (step 21), the screen data file is read out (step 22). The operator determines whether or not the screen data file has been changed (step 23). If it is determined that the screen data file has been changed, the operator saves the changed screen code in the history file (step 2).
4). Subsequently, it is determined whether or not the operation of the operation key 161A has been performed (step 25).
Is determined to have been executed, the operation code (including the identification symbol Sn which is a common symbol) is saved in a history file (step 26), and it is determined whether or not an instruction to change the display panel 161 has been issued (step 26). 27). If it is determined that the change instruction of the display panel 161 has been issued, the process returns to step 22 and the above processing is repeated. save. If it is determined in step 23 that there is no change in the screen data file, the process jumps to step 25, and the processes from step 25 to step 27 are sequentially executed. If it is determined in step 25 that no new key operation has been performed, the process jumps to step 27. By repeating such a series of operations, the probe device 1
Since the operation history of 0 is stored, when the operator checks the operation history, the history file is read and the operation history is displayed on the display panel 161 by the identification symbol S which is a common symbol.
The operation history of the probe device 10 can be always grasped without being restricted to the language of the country of use by displaying the same in an international common language such as n or English, and the history can be printed out by a printer. Can grasp the past operation history and use the operation history as a reference for maintenance.

As described above, according to the present embodiment,
An identification key Sn corresponding to the operation key 161A is provided on the display panel 161 together with the operation key 161A.
Is displayed in the common space 161B at the lower edge of the display device, and the contents of the operation keys 161A are displayed in an expression that can be understood by a Japanese operator different from the country of use, such as Korea, by operating the identification key Sn. When the Japanese operator checks the error content of the probe device 10, the operation key 16 is operated by operating the identification key Sn.
1A can be easily and quickly operated to easily confirm the contents of the error. Therefore, unlike the conventional probe device, there is no need to prepare a comparison table of Hangul characters and Japanese, and maintenance measures such as error measures can be taken promptly.

The present invention is not limited to the above-described embodiment, but displays an identification key corresponding to the operation key on the display panel together with the operation key, and operates the identification key to display the contents of the operation key. The present invention encompasses all inspection devices that are displayed in another understandable language different from the language of the country of use. The identification key is
The present invention encompasses any system that operates as a simple symbol with reference to the symbol list without using the operation key and displays the operation history with a common symbol.

[0023]

According to the first aspect of the present invention, the display contents on the display panel can be easily and quickly confirmed without depending on the language used, and the error can be quickly dealt with. Can be provided.

According to the second aspect of the present invention, the operation history displayed on the display panel can be easily and quickly confirmed by the common symbol without depending on the language used. An inspection device capable of promptly responding to an operation error can be provided.

[Brief description of the drawings]

FIG. 1 is a front view showing a display screen of a display panel of a probe device which is an embodiment of an inspection device of the present invention.

FIG. 2 is a flowchart of a program for performing a process of displaying an error display mode on a display panel.

FIG. 3 is a flowchart of a program for displaying a screen display mode on a display panel.

FIG. 4 is a diagram showing an error occurrence notification screen displayed on a display panel.

FIG. 5 is a diagram showing a display selection screen displayed on a display panel.

FIG. 6 is a diagram showing an error history display screen displayed on a display panel.

FIG. 7 is a perspective view showing an appearance of a probe device.

FIG. 8 is a partial cross-sectional view showing a prober section of the probe device shown in FIG.

FIG. 9 is a plan view showing the overall configuration of the probe device shown in FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Probe apparatus 11 Cassette mounting part 12 Tweezers (transport mechanism) 13 Loader part 14 Prober part 15 Controller 16 Display device 18 Main chuck (mounting table) 161 Display panel 161A Operation key 161B Common space Sn Identification symbol key (or identification symbol) S ₁ Identification key (or identification) W Semiconductor wafer (inspection object) C Cassette (container)

Claims (2)

[Claims] A loader provided with a mounting portion for mounting an object to be inspected stored in a container, a transport mechanism for transporting the object to be inspected in the mounting portion, and a transport mechanism of the loader. A prober unit for inspecting the object to be inspected and transported, a controller for controlling the prober unit and the loader unit, and a display device having a display panel for operating the controller, and an operation key for operating the controller. In the inspection device configured to display on the display panel in the language of the country of use, an identification key corresponding to the operation key is displayed on the display panel together with the operation key, and the operation key is operated by operating the identification key. An inspection device characterized by displaying the operation content of the user in a different expression different from the language of the country of use. 2. A loader having a mounting portion for mounting an object to be inspected stored in a container, a transport mechanism for transporting the object to be inspected in the mounting portion, and a transfer mechanism of the loader. A prober unit for inspecting the object to be inspected and transported, a controller for controlling the prober unit and the loader unit, and a display device having a display panel for operating the controller, and an operation key for operating the controller. In the inspection device configured to display on the display panel in the language of the country of use, an identification symbol corresponding to the operation key is displayed on the display panel together with the operation key, and a specific key displayed when an error occurs is displayed. An inspection apparatus characterized in that an operation history of operation keys is displayed by a common symbol by operating with reference to the identification symbol.