JPS61196143A - 光学式欠陥検査装置 - Google Patents

光学式欠陥検査装置

Info

Publication number
JPS61196143A
JPS61196143A JP3851685A JP3851685A JPS61196143A JP S61196143 A JPS61196143 A JP S61196143A JP 3851685 A JP3851685 A JP 3851685A JP 3851685 A JP3851685 A JP 3851685A JP S61196143 A JPS61196143 A JP S61196143A
Authority
JP
Japan
Prior art keywords
light
guide rod
case
light beam
diffuser plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3851685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0569184B2 (https=
Inventor
Yoshinori Utsu
宇津　義徳
Kotaro Kuwabara
桑原　孝太郎
Yoshikazu Kodama
児玉　義和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Engineering Co Ltd Fukuoka
Original Assignee
Asahi Engineering Co Ltd Fukuoka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Engineering Co Ltd Fukuoka filed Critical Asahi Engineering Co Ltd Fukuoka
Priority to JP3851685A priority Critical patent/JPS61196143A/ja
Publication of JPS61196143A publication Critical patent/JPS61196143A/ja
Publication of JPH0569184B2 publication Critical patent/JPH0569184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP3851685A 1985-02-27 1985-02-27 光学式欠陥検査装置 Granted JPS61196143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3851685A JPS61196143A (ja) 1985-02-27 1985-02-27 光学式欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3851685A JPS61196143A (ja) 1985-02-27 1985-02-27 光学式欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS61196143A true JPS61196143A (ja) 1986-08-30
JPH0569184B2 JPH0569184B2 (https=) 1993-09-30

Family

ID=12527433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3851685A Granted JPS61196143A (ja) 1985-02-27 1985-02-27 光学式欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS61196143A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002328006A (ja) * 2001-05-07 2002-11-15 Tokimec Jido Kenki:Kk 位置検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203903A (ja) * 1984-03-28 1985-10-15 Fuji Photo Film Co Ltd 光検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203903A (ja) * 1984-03-28 1985-10-15 Fuji Photo Film Co Ltd 光検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002328006A (ja) * 2001-05-07 2002-11-15 Tokimec Jido Kenki:Kk 位置検出装置

Also Published As

Publication number Publication date
JPH0569184B2 (https=) 1993-09-30

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