JPS61195051U - - Google Patents
Info
- Publication number
- JPS61195051U JPS61195051U JP7856885U JP7856885U JPS61195051U JP S61195051 U JPS61195051 U JP S61195051U JP 7856885 U JP7856885 U JP 7856885U JP 7856885 U JP7856885 U JP 7856885U JP S61195051 U JPS61195051 U JP S61195051U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etching solution
- liquid level
- processing container
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7856885U JPS61195051U (enExample) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7856885U JPS61195051U (enExample) | 1985-05-28 | 1985-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195051U true JPS61195051U (enExample) | 1986-12-04 |
Family
ID=30622660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7856885U Pending JPS61195051U (enExample) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195051U (enExample) |
-
1985
- 1985-05-28 JP JP7856885U patent/JPS61195051U/ja active Pending