JPS61130000U - - Google Patents
Info
- Publication number
- JPS61130000U JPS61130000U JP1333185U JP1333185U JPS61130000U JP S61130000 U JPS61130000 U JP S61130000U JP 1333185 U JP1333185 U JP 1333185U JP 1333185 U JP1333185 U JP 1333185U JP S61130000 U JPS61130000 U JP S61130000U
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- replenishment device
- automatic
- liquid
- level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000000615 nonconductor Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1333185U JPS61130000U (enExample) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1333185U JPS61130000U (enExample) | 1985-02-01 | 1985-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61130000U true JPS61130000U (enExample) | 1986-08-14 |
Family
ID=30497240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1333185U Pending JPS61130000U (enExample) | 1985-02-01 | 1985-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61130000U (enExample) |
-
1985
- 1985-02-01 JP JP1333185U patent/JPS61130000U/ja active Pending