JPS61195046U - - Google Patents
Info
- Publication number
- JPS61195046U JPS61195046U JP7866585U JP7866585U JPS61195046U JP S61195046 U JPS61195046 U JP S61195046U JP 7866585 U JP7866585 U JP 7866585U JP 7866585 U JP7866585 U JP 7866585U JP S61195046 U JPS61195046 U JP S61195046U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- pretreatment
- cleaning water
- pretreatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7866585U JPS61195046U (no) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7866585U JPS61195046U (no) | 1985-05-27 | 1985-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195046U true JPS61195046U (no) | 1986-12-04 |
Family
ID=30622848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7866585U Pending JPS61195046U (no) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195046U (no) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS501628A (no) * | 1973-05-04 | 1975-01-09 | ||
| JPS5441676A (en) * | 1977-09-09 | 1979-04-03 | Hitachi Ltd | Photo resist coating unit |
| JPS5759438B2 (no) * | 1972-06-16 | 1982-12-14 | Hitachi Ltd | |
| JPS5815234A (ja) * | 1981-07-20 | 1983-01-28 | Seiko Epson Corp | スピンコ−タのノズル構造 |
| JPS5882521A (ja) * | 1981-07-10 | 1983-05-18 | Hitachi Ltd | スピンナ |
-
1985
- 1985-05-27 JP JP7866585U patent/JPS61195046U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759438B2 (no) * | 1972-06-16 | 1982-12-14 | Hitachi Ltd | |
| JPS501628A (no) * | 1973-05-04 | 1975-01-09 | ||
| JPS5441676A (en) * | 1977-09-09 | 1979-04-03 | Hitachi Ltd | Photo resist coating unit |
| JPS5882521A (ja) * | 1981-07-10 | 1983-05-18 | Hitachi Ltd | スピンナ |
| JPS5815234A (ja) * | 1981-07-20 | 1983-01-28 | Seiko Epson Corp | スピンコ−タのノズル構造 |
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