JPH0375530U - - Google Patents
Info
- Publication number
- JPH0375530U JPH0375530U JP13617489U JP13617489U JPH0375530U JP H0375530 U JPH0375530 U JP H0375530U JP 13617489 U JP13617489 U JP 13617489U JP 13617489 U JP13617489 U JP 13617489U JP H0375530 U JPH0375530 U JP H0375530U
- Authority
- JP
- Japan
- Prior art keywords
- spin
- rinsing liquid
- spin chuck
- rotating
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007791 liquid phase Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13617489U JPH0375530U (no) | 1989-11-24 | 1989-11-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13617489U JPH0375530U (no) | 1989-11-24 | 1989-11-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0375530U true JPH0375530U (no) | 1991-07-29 |
Family
ID=31683397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13617489U Pending JPH0375530U (no) | 1989-11-24 | 1989-11-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0375530U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009214052A (ja) * | 2008-03-11 | 2009-09-24 | Tokyo Electron Ltd | 塗布装置、塗布方法及び記憶媒体 |
-
1989
- 1989-11-24 JP JP13617489U patent/JPH0375530U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009214052A (ja) * | 2008-03-11 | 2009-09-24 | Tokyo Electron Ltd | 塗布装置、塗布方法及び記憶媒体 |