JPS6119483Y2 - - Google Patents

Info

Publication number
JPS6119483Y2
JPS6119483Y2 JP1980001166U JP116680U JPS6119483Y2 JP S6119483 Y2 JPS6119483 Y2 JP S6119483Y2 JP 1980001166 U JP1980001166 U JP 1980001166U JP 116680 U JP116680 U JP 116680U JP S6119483 Y2 JPS6119483 Y2 JP S6119483Y2
Authority
JP
Japan
Prior art keywords
mask
back plate
small
processing chamber
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980001166U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56104134U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980001166U priority Critical patent/JPS6119483Y2/ja
Publication of JPS56104134U publication Critical patent/JPS56104134U/ja
Application granted granted Critical
Publication of JPS6119483Y2 publication Critical patent/JPS6119483Y2/ja
Expired legal-status Critical Current

Links

JP1980001166U 1980-01-11 1980-01-11 Expired JPS6119483Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980001166U JPS6119483Y2 (enExample) 1980-01-11 1980-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980001166U JPS6119483Y2 (enExample) 1980-01-11 1980-01-11

Publications (2)

Publication Number Publication Date
JPS56104134U JPS56104134U (enExample) 1981-08-14
JPS6119483Y2 true JPS6119483Y2 (enExample) 1986-06-12

Family

ID=29598044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980001166U Expired JPS6119483Y2 (enExample) 1980-01-11 1980-01-11

Country Status (1)

Country Link
JP (1) JPS6119483Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51152956U (enExample) * 1975-05-30 1976-12-06

Also Published As

Publication number Publication date
JPS56104134U (enExample) 1981-08-14

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