JPS61193787A - 電子ビ−ム加工機の焦点制御装置 - Google Patents

電子ビ−ム加工機の焦点制御装置

Info

Publication number
JPS61193787A
JPS61193787A JP60033785A JP3378585A JPS61193787A JP S61193787 A JPS61193787 A JP S61193787A JP 60033785 A JP60033785 A JP 60033785A JP 3378585 A JP3378585 A JP 3378585A JP S61193787 A JPS61193787 A JP S61193787A
Authority
JP
Japan
Prior art keywords
electron beam
workpiece
focus
data
focusing coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60033785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH048153B2 (enExample
Inventor
Masahiko Sakamoto
雅彦 阪本
Masatake Hiramoto
平本　誠剛
Masaharu Moriyasu
雅治 森安
Yoshio Yamane
山根　義雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60033785A priority Critical patent/JPS61193787A/ja
Publication of JPS61193787A publication Critical patent/JPS61193787A/ja
Publication of JPH048153B2 publication Critical patent/JPH048153B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP60033785A 1985-02-21 1985-02-21 電子ビ−ム加工機の焦点制御装置 Granted JPS61193787A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60033785A JPS61193787A (ja) 1985-02-21 1985-02-21 電子ビ−ム加工機の焦点制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60033785A JPS61193787A (ja) 1985-02-21 1985-02-21 電子ビ−ム加工機の焦点制御装置

Publications (2)

Publication Number Publication Date
JPS61193787A true JPS61193787A (ja) 1986-08-28
JPH048153B2 JPH048153B2 (enExample) 1992-02-14

Family

ID=12396120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60033785A Granted JPS61193787A (ja) 1985-02-21 1985-02-21 電子ビ−ム加工機の焦点制御装置

Country Status (1)

Country Link
JP (1) JPS61193787A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027563A (ja) * 1996-07-10 1998-01-27 Jeol Ltd 走査電子顕微鏡
JP2001118537A (ja) * 1999-10-19 2001-04-27 Hitachi Ltd ビーム走査形検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617194A (en) * 1979-07-17 1981-02-18 Daihen Corp Method and apparatus for charged particle beam working

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617194A (en) * 1979-07-17 1981-02-18 Daihen Corp Method and apparatus for charged particle beam working

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027563A (ja) * 1996-07-10 1998-01-27 Jeol Ltd 走査電子顕微鏡
JP2001118537A (ja) * 1999-10-19 2001-04-27 Hitachi Ltd ビーム走査形検査装置

Also Published As

Publication number Publication date
JPH048153B2 (enExample) 1992-02-14

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