JPS61192443U - - Google Patents
Info
- Publication number
- JPS61192443U JPS61192443U JP7619385U JP7619385U JPS61192443U JP S61192443 U JPS61192443 U JP S61192443U JP 7619385 U JP7619385 U JP 7619385U JP 7619385 U JP7619385 U JP 7619385U JP S61192443 U JPS61192443 U JP S61192443U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- thin film
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7619385U JPS61192443U (cs) | 1985-05-22 | 1985-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7619385U JPS61192443U (cs) | 1985-05-22 | 1985-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61192443U true JPS61192443U (cs) | 1986-11-29 |
Family
ID=30618113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7619385U Pending JPS61192443U (cs) | 1985-05-22 | 1985-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61192443U (cs) |
-
1985
- 1985-05-22 JP JP7619385U patent/JPS61192443U/ja active Pending
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