JPS61189025U - - Google Patents

Info

Publication number
JPS61189025U
JPS61189025U JP7353385U JP7353385U JPS61189025U JP S61189025 U JPS61189025 U JP S61189025U JP 7353385 U JP7353385 U JP 7353385U JP 7353385 U JP7353385 U JP 7353385U JP S61189025 U JPS61189025 U JP S61189025U
Authority
JP
Japan
Prior art keywords
magazine
positioning
positioning device
view
gripping mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7353385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7353385U priority Critical patent/JPS61189025U/ja
Publication of JPS61189025U publication Critical patent/JPS61189025U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Automatic Assembly (AREA)
  • Packaging Frangible Articles (AREA)
JP7353385U 1985-05-20 1985-05-20 Pending JPS61189025U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7353385U JPS61189025U (enExample) 1985-05-20 1985-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7353385U JPS61189025U (enExample) 1985-05-20 1985-05-20

Publications (1)

Publication Number Publication Date
JPS61189025U true JPS61189025U (enExample) 1986-11-25

Family

ID=30612991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7353385U Pending JPS61189025U (enExample) 1985-05-20 1985-05-20

Country Status (1)

Country Link
JP (1) JPS61189025U (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置
JPH0710943U (ja) * 1993-07-07 1995-02-14 住友精密工業株式会社 ウエハキャリア位置決め機構
JPH0919833A (ja) * 1995-07-04 1997-01-21 Central Motor Co Ltd 位置決め装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置
JPH0710943U (ja) * 1993-07-07 1995-02-14 住友精密工業株式会社 ウエハキャリア位置決め機構
JPH0919833A (ja) * 1995-07-04 1997-01-21 Central Motor Co Ltd 位置決め装置

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