JPS61188354U - - Google Patents
Info
- Publication number
- JPS61188354U JPS61188354U JP7279985U JP7279985U JPS61188354U JP S61188354 U JPS61188354 U JP S61188354U JP 7279985 U JP7279985 U JP 7279985U JP 7279985 U JP7279985 U JP 7279985U JP S61188354 U JPS61188354 U JP S61188354U
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- semiconductor wafer
- turntable
- grooves
- support body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279985U JPH0316278Y2 (it) | 1985-05-16 | 1985-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279985U JPH0316278Y2 (it) | 1985-05-16 | 1985-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61188354U true JPS61188354U (it) | 1986-11-25 |
| JPH0316278Y2 JPH0316278Y2 (it) | 1991-04-08 |
Family
ID=30611551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7279985U Expired JPH0316278Y2 (it) | 1985-05-16 | 1985-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316278Y2 (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112186A (ja) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | 横軸回転式基板乾燥装置 |
| JP2001144038A (ja) * | 1999-11-16 | 2001-05-25 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
-
1985
- 1985-05-16 JP JP7279985U patent/JPH0316278Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112186A (ja) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | 横軸回転式基板乾燥装置 |
| JP2001144038A (ja) * | 1999-11-16 | 2001-05-25 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316278Y2 (it) | 1991-04-08 |