JPS61188351U - - Google Patents

Info

Publication number
JPS61188351U
JPS61188351U JP7050485U JP7050485U JPS61188351U JP S61188351 U JPS61188351 U JP S61188351U JP 7050485 U JP7050485 U JP 7050485U JP 7050485 U JP7050485 U JP 7050485U JP S61188351 U JPS61188351 U JP S61188351U
Authority
JP
Japan
Prior art keywords
dilution
valve
tank
pump
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7050485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7050485U priority Critical patent/JPS61188351U/ja
Publication of JPS61188351U publication Critical patent/JPS61188351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP7050485U 1985-05-15 1985-05-15 Pending JPS61188351U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7050485U JPS61188351U (enrdf_load_stackoverflow) 1985-05-15 1985-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7050485U JPS61188351U (enrdf_load_stackoverflow) 1985-05-15 1985-05-15

Publications (1)

Publication Number Publication Date
JPS61188351U true JPS61188351U (enrdf_load_stackoverflow) 1986-11-25

Family

ID=30607135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7050485U Pending JPS61188351U (enrdf_load_stackoverflow) 1985-05-15 1985-05-15

Country Status (1)

Country Link
JP (1) JPS61188351U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413849B1 (ko) * 2000-12-28 2004-01-07 장영철 포토레지스트 도포 장치 및 방법
JP2011177758A (ja) * 2010-03-02 2011-09-15 Disco Corp レーザー加工装置
JP2011177757A (ja) * 2010-03-02 2011-09-15 Disco Corp レーザー加工装置
JP2014216471A (ja) * 2013-04-25 2014-11-17 大日本印刷株式会社 インプリント装置及びインプリント方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413849B1 (ko) * 2000-12-28 2004-01-07 장영철 포토레지스트 도포 장치 및 방법
JP2011177758A (ja) * 2010-03-02 2011-09-15 Disco Corp レーザー加工装置
JP2011177757A (ja) * 2010-03-02 2011-09-15 Disco Corp レーザー加工装置
JP2014216471A (ja) * 2013-04-25 2014-11-17 大日本印刷株式会社 インプリント装置及びインプリント方法

Similar Documents

Publication Publication Date Title
JPS61188351U (enrdf_load_stackoverflow)
US6419408B1 (en) Developing process and developing unit
JPS61181347U (enrdf_load_stackoverflow)
JPH08156751A (ja) 薬液の希釈方法及び薬液の自動希釈装置
JPS575046A (en) Developing apparatus for photoresist
JPS6268140U (enrdf_load_stackoverflow)
JPS59232417A (ja) 半導体ウエ−ハのレジスト現像装置
JP4554236B2 (ja) 液供給機構および液供給方法
JPS5973749U (ja) 半導体製造装置
JPS6444632U (enrdf_load_stackoverflow)
JPH1119570A (ja) 液供給機構
JPS5846118U (ja) 薬液計量混合装置における計量タンク
JPS59119459U (ja) 現像装置
JPH01236961A (ja) 液体噴霧装置
JPS634497Y2 (enrdf_load_stackoverflow)
JPS6083240U (ja) スピン現像機
JPS62104261U (enrdf_load_stackoverflow)
JPS6351638U (enrdf_load_stackoverflow)
JPS6376327A (ja) レジスト吐出・吸引装置
JPS62263634A (ja) レジスト現像装置
JPS64429U (enrdf_load_stackoverflow)
JPS6299073U (enrdf_load_stackoverflow)
JPS6141252U (ja) 印刷製版用感光材料処理装置
JPH04324003A (ja) ヒドラジン原液投入装置
JPH01149664U (enrdf_load_stackoverflow)