JPS6444632U - - Google Patents

Info

Publication number
JPS6444632U
JPS6444632U JP13843887U JP13843887U JPS6444632U JP S6444632 U JPS6444632 U JP S6444632U JP 13843887 U JP13843887 U JP 13843887U JP 13843887 U JP13843887 U JP 13843887U JP S6444632 U JPS6444632 U JP S6444632U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
liquid processing
processing semiconductor
bubbles
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13843887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13843887U priority Critical patent/JPS6444632U/ja
Publication of JPS6444632U publication Critical patent/JPS6444632U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP13843887U 1987-09-10 1987-09-10 Pending JPS6444632U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13843887U JPS6444632U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13843887U JPS6444632U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Publications (1)

Publication Number Publication Date
JPS6444632U true JPS6444632U (enrdf_load_stackoverflow) 1989-03-16

Family

ID=31400775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13843887U Pending JPS6444632U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Country Status (1)

Country Link
JP (1) JPS6444632U (enrdf_load_stackoverflow)

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