JPS61187605A - 干渉計調整マウント - Google Patents

干渉計調整マウント

Info

Publication number
JPS61187605A
JPS61187605A JP60027980A JP2798085A JPS61187605A JP S61187605 A JPS61187605 A JP S61187605A JP 60027980 A JP60027980 A JP 60027980A JP 2798085 A JP2798085 A JP 2798085A JP S61187605 A JPS61187605 A JP S61187605A
Authority
JP
Japan
Prior art keywords
interferometer
stage
lens
fine movement
adjustment mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60027980A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0376844B2 (enrdf_load_stackoverflow
Inventor
Haruo Ogawa
小川　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP60027980A priority Critical patent/JPS61187605A/ja
Publication of JPS61187605A publication Critical patent/JPS61187605A/ja
Publication of JPH0376844B2 publication Critical patent/JPH0376844B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP60027980A 1985-02-15 1985-02-15 干渉計調整マウント Granted JPS61187605A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60027980A JPS61187605A (ja) 1985-02-15 1985-02-15 干渉計調整マウント

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60027980A JPS61187605A (ja) 1985-02-15 1985-02-15 干渉計調整マウント

Publications (2)

Publication Number Publication Date
JPS61187605A true JPS61187605A (ja) 1986-08-21
JPH0376844B2 JPH0376844B2 (enrdf_load_stackoverflow) 1991-12-06

Family

ID=12236003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60027980A Granted JPS61187605A (ja) 1985-02-15 1985-02-15 干渉計調整マウント

Country Status (1)

Country Link
JP (1) JPS61187605A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003102529A1 (fr) * 2002-06-04 2003-12-11 Nikon Corporation Procede de mesure de l'homogeneite de l'indice de refraction d'un element optique
US7245361B2 (en) 2002-06-04 2007-07-17 Nikon Corporation Method for evaluating refractive index homogeneity of optical member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003102529A1 (fr) * 2002-06-04 2003-12-11 Nikon Corporation Procede de mesure de l'homogeneite de l'indice de refraction d'un element optique
US7245361B2 (en) 2002-06-04 2007-07-17 Nikon Corporation Method for evaluating refractive index homogeneity of optical member

Also Published As

Publication number Publication date
JPH0376844B2 (enrdf_load_stackoverflow) 1991-12-06

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