JPS6118612Y2 - - Google Patents

Info

Publication number
JPS6118612Y2
JPS6118612Y2 JP11314283U JP11314283U JPS6118612Y2 JP S6118612 Y2 JPS6118612 Y2 JP S6118612Y2 JP 11314283 U JP11314283 U JP 11314283U JP 11314283 U JP11314283 U JP 11314283U JP S6118612 Y2 JPS6118612 Y2 JP S6118612Y2
Authority
JP
Japan
Prior art keywords
particle beam
dispersion
adjusting
optical system
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11314283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5946448U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11314283U priority Critical patent/JPS5946448U/ja
Publication of JPS5946448U publication Critical patent/JPS5946448U/ja
Application granted granted Critical
Publication of JPS6118612Y2 publication Critical patent/JPS6118612Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP11314283U 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置 Granted JPS5946448U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11314283U JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11314283U JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Publications (2)

Publication Number Publication Date
JPS5946448U JPS5946448U (ja) 1984-03-28
JPS6118612Y2 true JPS6118612Y2 (enrdf_load_html_response) 1986-06-05

Family

ID=30262023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11314283U Granted JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Country Status (1)

Country Link
JP (1) JPS5946448U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07118287B2 (ja) * 1992-08-10 1995-12-18 株式会社日立製作所 磁気四重極レンズ、これを用いたイオンビーム加速装置並びにイオンビーム減速装置

Also Published As

Publication number Publication date
JPS5946448U (ja) 1984-03-28

Similar Documents

Publication Publication Date Title
US4044255A (en) Corpuscular-beam transmission-type microscope including an improved beam deflection system
US4743756A (en) Parallel-detection electron energy-loss spectrometer
US5177361A (en) Electron energy filter
JPS5871545A (ja) 可変成形ビ−ム電子光学系
GB2061609A (en) Compensation for spherical aberration using a sextupale
US5336885A (en) Electron beam apparatus
JP2007280966A (ja) 電子光学レンズ装置
US4174479A (en) Mass spectrometer
US4044254A (en) Scanning corpuscular-beam transmission type microscope including a beam energy analyzer
JPS5978432A (ja) 多種形状粒子ビ−ム形成用の偏向対物系を備える装置
US4379231A (en) Electron microscope
EP1042784B1 (en) Wien filter
JPH0361160B2 (enrdf_load_html_response)
JPS6118612Y2 (enrdf_load_html_response)
JPS6333120B2 (enrdf_load_html_response)
US2814729A (en) X-ray microscope
US7060985B2 (en) Multipole field-producing apparatus in charged-particle optical system and aberration corrector
JP2006351312A (ja) イオン注入装置
JP2000517095A5 (enrdf_load_html_response)
US8952339B2 (en) Chromatic aberration corrector and method of controlling same
JP3397347B2 (ja) オメガフィルタ
JP2887362B2 (ja) 電子エネルギー損失同時検知器
EP0237165A2 (en) Treating work pieces with electro-magnetically scanned ion beams
US3213276A (en) Magnetic analyzing system for a mass spectrometer having bi-directional focusing
Larson Electrostatic ion optics and beam transport for ion implantation