JPS611845U - semiconductor wafer - Google Patents
semiconductor waferInfo
- Publication number
- JPS611845U JPS611845U JP8563584U JP8563584U JPS611845U JP S611845 U JPS611845 U JP S611845U JP 8563584 U JP8563584 U JP 8563584U JP 8563584 U JP8563584 U JP 8563584U JP S611845 U JPS611845 U JP S611845U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- abstract
- transistor elements
- electrodes
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第1図は本考案の一実施例を示す断面図、第2図及び第
3図は従来の半導体ウエーハを示す各断面図である。
18・・・裏面電極(コレクタ電極)、19・・・トラ
ンジスタ素子、20・・・半導体ウエーハ、21・・・
溝。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing an embodiment of the present invention, and FIGS. 2 and 3 are sectional views showing a conventional semiconductor wafer. 18... Back electrode (collector electrode), 19... Transistor element, 20... Semiconductor wafer, 21...
groove.
Claims (1)
体ウエーハにおいて、裏面のトランジスタ素子間に裏面
電極より深く溝を形成したことを特徴とする半導体ウエ
ーハ。1. A semiconductor wafer on which a plurality of transistor elements including front electrodes are formed, characterized in that grooves are formed between the transistor elements on the back surface deeper than the back electrodes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8563584U JPS611845U (en) | 1984-06-08 | 1984-06-08 | semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8563584U JPS611845U (en) | 1984-06-08 | 1984-06-08 | semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS611845U true JPS611845U (en) | 1986-01-08 |
Family
ID=30636208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8563584U Pending JPS611845U (en) | 1984-06-08 | 1984-06-08 | semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS611845U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5040836A (en) * | 1973-08-14 | 1975-04-14 | ||
JPS5144637A (en) * | 1975-08-22 | 1976-04-16 | Sankyo Co | JOSOZAI |
-
1984
- 1984-06-08 JP JP8563584U patent/JPS611845U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5040836A (en) * | 1973-08-14 | 1975-04-14 | ||
JPS5144637A (en) * | 1975-08-22 | 1976-04-16 | Sankyo Co | JOSOZAI |
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