JPS6118346B2 - - Google Patents

Info

Publication number
JPS6118346B2
JPS6118346B2 JP51016698A JP1669876A JPS6118346B2 JP S6118346 B2 JPS6118346 B2 JP S6118346B2 JP 51016698 A JP51016698 A JP 51016698A JP 1669876 A JP1669876 A JP 1669876A JP S6118346 B2 JPS6118346 B2 JP S6118346B2
Authority
JP
Japan
Prior art keywords
arsenic
oxide film
region
substrate
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51016698A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5299785A (en
Inventor
Yasutaka Ikushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP1669876A priority Critical patent/JPS5299785A/ja
Publication of JPS5299785A publication Critical patent/JPS5299785A/ja
Publication of JPS6118346B2 publication Critical patent/JPS6118346B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP1669876A 1976-02-18 1976-02-18 Production of semiconductor device Granted JPS5299785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1669876A JPS5299785A (en) 1976-02-18 1976-02-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1669876A JPS5299785A (en) 1976-02-18 1976-02-18 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5299785A JPS5299785A (en) 1977-08-22
JPS6118346B2 true JPS6118346B2 (enExample) 1986-05-12

Family

ID=11923503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1669876A Granted JPS5299785A (en) 1976-02-18 1976-02-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5299785A (enExample)

Also Published As

Publication number Publication date
JPS5299785A (en) 1977-08-22

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