JPS61175424A - クリ−ンル−ム - Google Patents

クリ−ンル−ム

Info

Publication number
JPS61175424A
JPS61175424A JP60015510A JP1551085A JPS61175424A JP S61175424 A JPS61175424 A JP S61175424A JP 60015510 A JP60015510 A JP 60015510A JP 1551085 A JP1551085 A JP 1551085A JP S61175424 A JPS61175424 A JP S61175424A
Authority
JP
Japan
Prior art keywords
clean room
air
outside
internal part
double structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60015510A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kenichiro Saito
斉藤　研一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoki Construction Co Ltd
Original Assignee
Aoki Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoki Construction Co Ltd filed Critical Aoki Construction Co Ltd
Priority to JP60015510A priority Critical patent/JPS61175424A/ja
Publication of JPS61175424A publication Critical patent/JPS61175424A/ja
Publication of JPH0443142B2 publication Critical patent/JPH0443142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60015510A 1985-01-31 1985-01-31 クリ−ンル−ム Granted JPS61175424A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60015510A JPS61175424A (ja) 1985-01-31 1985-01-31 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60015510A JPS61175424A (ja) 1985-01-31 1985-01-31 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS61175424A true JPS61175424A (ja) 1986-08-07
JPH0443142B2 JPH0443142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-15

Family

ID=11890807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60015510A Granted JPS61175424A (ja) 1985-01-31 1985-01-31 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS61175424A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000027474A (ja) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd クリーンルーム
JP2000027351A (ja) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd クリーンルーム
JP2003035044A (ja) * 2001-07-23 2003-02-07 Nippon Soda Co Ltd 難分解性ハロゲン化合物の分解処理施設
JP2013050248A (ja) * 2011-08-30 2013-03-14 Shimizu Corp クリーンルーム
JP2013092325A (ja) * 2011-10-27 2013-05-16 Dai-Dan Co Ltd 空調運転開始時の室圧制御方法
DE102012020200A1 (de) * 2012-10-16 2014-04-17 Schilling Engineering GmbH Reinraumbegrenzungseinheit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000027474A (ja) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd クリーンルーム
JP2000027351A (ja) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd クリーンルーム
JP2003035044A (ja) * 2001-07-23 2003-02-07 Nippon Soda Co Ltd 難分解性ハロゲン化合物の分解処理施設
JP2013050248A (ja) * 2011-08-30 2013-03-14 Shimizu Corp クリーンルーム
JP2013092325A (ja) * 2011-10-27 2013-05-16 Dai-Dan Co Ltd 空調運転開始時の室圧制御方法
DE102012020200A1 (de) * 2012-10-16 2014-04-17 Schilling Engineering GmbH Reinraumbegrenzungseinheit
EP2722456A3 (de) * 2012-10-16 2016-09-28 Schilling Engineering GmbH Reinraumbegrenzungseinheit
EP2722456B1 (de) 2012-10-16 2021-04-07 Schilling Engineering GmbH Reinraumbegrenzungseinheit

Also Published As

Publication number Publication date
JPH0443142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees