JPS61175354U - - Google Patents
Info
- Publication number
- JPS61175354U JPS61175354U JP1985060694U JP6069485U JPS61175354U JP S61175354 U JPS61175354 U JP S61175354U JP 1985060694 U JP1985060694 U JP 1985060694U JP 6069485 U JP6069485 U JP 6069485U JP S61175354 U JPS61175354 U JP S61175354U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- parallel link
- jig
- turntable
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 241001417527 Pempheridae Species 0.000 claims description 2
- 239000006061 abrasive grain Substances 0.000 claims description 2
- 239000000498 cooling water Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Description
第１図は本考案によるラツプ装置の１実施例を
示す図、第２図は本考案による円盤揺動回転装置
の詳細図、第３図は従来のラツプ機の例を示す図
である。
１：ラツプ定盤、２：ラツプ廃液吸引パイプ、
３：スウイーパー、４：架台、５：ラツプリング
、６：ウオーム、７：偏心穴付ホイール、８：支
柱、９：加圧支持部、１０：加圧装置、１１：モ
ータ、１２：円錐台圧子、１３：ギヤ、１４：止
め具、１５：ターンテーブル、１６：空隙、１７
：支軸、１８：偏心穴、１９：円盤、２０：駆動
モータ、２１：ラツプリング支持アーム、２２：
ラツプ砥粒、２３：重り。
FIG. 1 is a diagram showing one embodiment of the lapping device according to the present invention, FIG. 2 is a detailed view of the disk swinging and rotating device according to the present invention, and FIG. 3 is a diagram showing an example of a conventional lapping machine. 1: Lap surface plate, 2: Lap waste liquid suction pipe,
3: Sweeper, 4: Frame, 5: Wrap ring, 6: Worm, 7: Wheel with eccentric hole, 8: Support column, 9: Pressure support section, 10: Pressure device, 11: Motor, 12: truncated conical indenter, 13: Gear, 14: Stopper, 15: Turntable, 16: Gap, 17
: Support shaft, 18: Eccentric hole, 19: Disk, 20: Drive motor, 21: Lappling support arm, 22:
Lap abrasive grain, 23: Weight.
Claims (1)
特徴とするラツピング装置、 (イ) 平行リンクに接続されたシリンダ加圧機構
、 (ロ) 偏心穴を有するギヤとウオームホイールを
組合せたラツプ軸の揺動回転機構、 (ハ) ワークを固定した治具底面に(イ)項の平行
リンク先端部に取付けた治具の強制自転駆動装置
を密着させ自動運動を与える装置、 (ニ) 外周縁で支持される定盤載荷用ターンテー
ブル、 (ホ) ラツピング砥粒を定盤中心方向へ流すため
(ハ)項の強制自転駆動装置部に取付けたスウイー
パー、 (ヘ) 内部に二層の冷却水通過空隙を有する定盤
支持ターンテーブル。[Claims for Utility Model Registration] A wrapping device characterized by comprising the following items (a) to (f): (a) a cylinder pressure mechanism connected to a parallel link; (b) an eccentric hole (c) A forced rotational drive device of the jig attached to the tip of the parallel link in (b) is brought into close contact with the bottom of the jig on which the workpiece is fixed. (d) A turntable for loading the surface plate supported by the outer periphery; (e) A device for providing automatic motion; (e) For flowing the lapping abrasive grains toward the center of the surface plate.
A sweeper attached to the forced rotation drive unit of item (c), and (f) a surface plate supporting turntable having two internal cooling water passage gaps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985060694U JPS61175354U (en) | 1985-04-23 | 1985-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985060694U JPS61175354U (en) | 1985-04-23 | 1985-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61175354U true JPS61175354U (en) | 1986-10-31 |
Family
ID=30588280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985060694U Pending JPS61175354U (en) | 1985-04-23 | 1985-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61175354U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01159171A (en) * | 1987-12-15 | 1989-06-22 | Toshiba Corp | Polishing surface plate |
| WO2008123407A1 (en) * | 2007-03-30 | 2008-10-16 | Thk Co., Ltd. | Rotation bearing, rotation table device, and method of dermining table diameter |
-
1985
- 1985-04-23 JP JP1985060694U patent/JPS61175354U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01159171A (en) * | 1987-12-15 | 1989-06-22 | Toshiba Corp | Polishing surface plate |
| WO2008123407A1 (en) * | 2007-03-30 | 2008-10-16 | Thk Co., Ltd. | Rotation bearing, rotation table device, and method of dermining table diameter |
| JP5208921B2 (en) * | 2007-03-30 | 2013-06-12 | Ｔｈｋ株式会社 | Rotary bearing, rotary table device, table diameter determination method |
| TWI461253B (en) * | 2007-03-30 | 2014-11-21 | Thk Co Ltd | Rolling bearing, and rotary table apparatus |
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