JPS61173072U - - Google Patents

Info

Publication number
JPS61173072U
JPS61173072U JP5549385U JP5549385U JPS61173072U JP S61173072 U JPS61173072 U JP S61173072U JP 5549385 U JP5549385 U JP 5549385U JP 5549385 U JP5549385 U JP 5549385U JP S61173072 U JPS61173072 U JP S61173072U
Authority
JP
Japan
Prior art keywords
corona
voltage
high frequency
test object
detection circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5549385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5549385U priority Critical patent/JPS61173072U/ja
Publication of JPS61173072U publication Critical patent/JPS61173072U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Relating To Insulation (AREA)
JP5549385U 1985-04-16 1985-04-16 Pending JPS61173072U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5549385U JPS61173072U (OSRAM) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5549385U JPS61173072U (OSRAM) 1985-04-16 1985-04-16

Publications (1)

Publication Number Publication Date
JPS61173072U true JPS61173072U (OSRAM) 1986-10-28

Family

ID=30578219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5549385U Pending JPS61173072U (OSRAM) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPS61173072U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148300A (ja) * 2000-11-10 2002-05-22 Matsushita Electric Ind Co Ltd 小型電気機械の非破壊絶縁試験方法および装置
JP2014142266A (ja) * 2013-01-24 2014-08-07 Tokyo Electron Ltd 試験装置及びプラズマ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147075A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Withstand voltage tester

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147075A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Withstand voltage tester

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148300A (ja) * 2000-11-10 2002-05-22 Matsushita Electric Ind Co Ltd 小型電気機械の非破壊絶縁試験方法および装置
JP2014142266A (ja) * 2013-01-24 2014-08-07 Tokyo Electron Ltd 試験装置及びプラズマ処理装置
US9673027B2 (en) 2013-01-24 2017-06-06 Tokyo Electron Limited Test apparatus and plasma processing apparatus

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