JPS61171244U - - Google Patents

Info

Publication number
JPS61171244U
JPS61171244U JP5524485U JP5524485U JPS61171244U JP S61171244 U JPS61171244 U JP S61171244U JP 5524485 U JP5524485 U JP 5524485U JP 5524485 U JP5524485 U JP 5524485U JP S61171244 U JPS61171244 U JP S61171244U
Authority
JP
Japan
Prior art keywords
processing
substrate
tank
holding rod
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5524485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234823Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985055244U priority Critical patent/JPH0234823Y2/ja
Publication of JPS61171244U publication Critical patent/JPS61171244U/ja
Application granted granted Critical
Publication of JPH0234823Y2 publication Critical patent/JPH0234823Y2/ja
Expired legal-status Critical Current

Links

JP1985055244U 1985-04-12 1985-04-12 Expired JPH0234823Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (de) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985055244U JPH0234823Y2 (de) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61171244U true JPS61171244U (de) 1986-10-24
JPH0234823Y2 JPH0234823Y2 (de) 1990-09-19

Family

ID=30577735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985055244U Expired JPH0234823Y2 (de) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0234823Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (de) * 1971-07-12 1973-02-28
JPS544668U (de) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (de) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264335A (en) * 1975-11-21 1977-05-27 Ibuki Kogyo Co Ltd Supersonic beauty apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4817894U (de) * 1971-07-12 1973-02-28
JPS544668U (de) * 1977-06-14 1979-01-12
JPS5494274A (en) * 1978-01-10 1979-07-25 Toshiba Corp Liquid terating device of semiconductor wafers
JPS5744685U (de) * 1980-08-15 1982-03-11
JPS5752138A (en) * 1980-09-16 1982-03-27 Mitsubishi Electric Corp Etching device for semiconductor substrate
JPS5764740A (en) * 1980-10-09 1982-04-20 Nippon Telegr & Teleph Corp <Ntt> Developing device
JPS584143A (ja) * 1981-06-30 1983-01-11 Fujitsu Ltd ポジ・レジスト膜の現像方法
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332023A (ja) * 1989-06-29 1991-02-12 Toho Kasei Kk ウェット処理マシン

Also Published As

Publication number Publication date
JPH0234823Y2 (de) 1990-09-19

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