JPS61170570A - 導電性グラフアイト膜の形成方法 - Google Patents
導電性グラフアイト膜の形成方法Info
- Publication number
- JPS61170570A JPS61170570A JP1076385A JP1076385A JPS61170570A JP S61170570 A JPS61170570 A JP S61170570A JP 1076385 A JP1076385 A JP 1076385A JP 1076385 A JP1076385 A JP 1076385A JP S61170570 A JPS61170570 A JP S61170570A
- Authority
- JP
- Japan
- Prior art keywords
- graphite film
- film
- base material
- carbon film
- conductive graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 239000010439 graphite Substances 0.000 title claims abstract description 34
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 34
- 230000015572 biosynthetic process Effects 0.000 title description 3
- 239000000463 material Substances 0.000 claims abstract description 27
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 10
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 6
- 239000002994 raw material Substances 0.000 claims abstract description 6
- 239000002019 doping agent Substances 0.000 claims abstract description 4
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 4
- 150000003624 transition metals Chemical class 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 27
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 230000005684 electric field Effects 0.000 abstract description 3
- 238000005087 graphitization Methods 0.000 abstract description 3
- 230000003197 catalytic effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 33
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 239000000428 dust Substances 0.000 description 7
- 239000003575 carbonaceous material Substances 0.000 description 6
- 238000005979 thermal decomposition reaction Methods 0.000 description 5
- 229910021469 graphitizable carbon Inorganic materials 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910019800 NbF 5 Inorganic materials 0.000 description 1
- 101100258315 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) crc-1 gene Proteins 0.000 description 1
- PWHVEHULNLETOV-UHFFFAOYSA-N Nic-1 Natural products C12OC2C2(O)CC=CC(=O)C2(C)C(CCC2=C3)C1C2=CC=C3C(C)C1OC(O)C2(C)OC2(C)C1 PWHVEHULNLETOV-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 150000007824 aliphatic compounds Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001345 alkine derivatives Chemical class 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- -1 covar lath Chemical compound 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021382 natural graphite Inorganic materials 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001494 silver tetrafluoroborate Inorganic materials 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1076385A JPS61170570A (ja) | 1985-01-25 | 1985-01-25 | 導電性グラフアイト膜の形成方法 |
| US06/822,244 US4645713A (en) | 1985-01-25 | 1986-01-27 | Method for forming conductive graphite film and film formed thereby |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1076385A JPS61170570A (ja) | 1985-01-25 | 1985-01-25 | 導電性グラフアイト膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61170570A true JPS61170570A (ja) | 1986-08-01 |
| JPH0362791B2 JPH0362791B2 (enrdf_load_stackoverflow) | 1991-09-27 |
Family
ID=11759369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1076385A Granted JPS61170570A (ja) | 1985-01-25 | 1985-01-25 | 導電性グラフアイト膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61170570A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62124273A (ja) * | 1985-11-22 | 1987-06-05 | Agency Of Ind Science & Technol | 導電性グラフアイト膜の形成方法 |
| JPS63293163A (ja) * | 1987-05-27 | 1988-11-30 | Agency Of Ind Science & Technol | 炭素材料の製造方法 |
| JPS63293164A (ja) * | 1987-05-27 | 1988-11-30 | Agency Of Ind Science & Technol | 炭素材料の製造法 |
| US4795656A (en) * | 1986-08-26 | 1989-01-03 | Kozo Iizuka, Director-General, Agency Of Industrial Science And Technology | Cluster ion plating method for producing electrically conductive carbon film |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49127893A (enrdf_load_stackoverflow) * | 1973-04-12 | 1974-12-06 |
-
1985
- 1985-01-25 JP JP1076385A patent/JPS61170570A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49127893A (enrdf_load_stackoverflow) * | 1973-04-12 | 1974-12-06 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62124273A (ja) * | 1985-11-22 | 1987-06-05 | Agency Of Ind Science & Technol | 導電性グラフアイト膜の形成方法 |
| US4795656A (en) * | 1986-08-26 | 1989-01-03 | Kozo Iizuka, Director-General, Agency Of Industrial Science And Technology | Cluster ion plating method for producing electrically conductive carbon film |
| JPS63293163A (ja) * | 1987-05-27 | 1988-11-30 | Agency Of Ind Science & Technol | 炭素材料の製造方法 |
| JPS63293164A (ja) * | 1987-05-27 | 1988-11-30 | Agency Of Ind Science & Technol | 炭素材料の製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0362791B2 (enrdf_load_stackoverflow) | 1991-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |