JPS6116930B2 - - Google Patents
Info
- Publication number
- JPS6116930B2 JPS6116930B2 JP17188179A JP17188179A JPS6116930B2 JP S6116930 B2 JPS6116930 B2 JP S6116930B2 JP 17188179 A JP17188179 A JP 17188179A JP 17188179 A JP17188179 A JP 17188179A JP S6116930 B2 JPS6116930 B2 JP S6116930B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- bridge
- electric heater
- cavity
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims 3
- 239000012777 electrically insulating material Substances 0.000 claims 3
- 239000003779 heat-resistant material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000001514 detection method Methods 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17188179A JPS5697857A (en) | 1979-12-29 | 1979-12-29 | Electric heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17188179A JPS5697857A (en) | 1979-12-29 | 1979-12-29 | Electric heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5697857A JPS5697857A (en) | 1981-08-06 |
| JPS6116930B2 true JPS6116930B2 (ru) | 1986-05-02 |
Family
ID=15931516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17188179A Granted JPS5697857A (en) | 1979-12-29 | 1979-12-29 | Electric heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5697857A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58102143A (ja) * | 1981-12-14 | 1983-06-17 | Mitsuteru Kimura | 橋架構造昇温体 |
| JPS61125157A (ja) * | 1984-11-22 | 1986-06-12 | Yamatake Honeywell Co Ltd | 冷却用集積素子 |
| JPH079411B2 (ja) * | 1986-03-24 | 1995-02-01 | リコ−精器株式会社 | 雰囲気検出装置 |
-
1979
- 1979-12-29 JP JP17188179A patent/JPS5697857A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5697857A (en) | 1981-08-06 |
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