JPS61168618A - Epoxy resin composition for semiconductor sealing - Google Patents

Epoxy resin composition for semiconductor sealing

Info

Publication number
JPS61168618A
JPS61168618A JP850385A JP850385A JPS61168618A JP S61168618 A JPS61168618 A JP S61168618A JP 850385 A JP850385 A JP 850385A JP 850385 A JP850385 A JP 850385A JP S61168618 A JPS61168618 A JP S61168618A
Authority
JP
Japan
Prior art keywords
epoxy resin
resin
resin composition
parts
semiconductor sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP850385A
Other languages
Japanese (ja)
Inventor
Makoto Yamagata
誠 山縣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP850385A priority Critical patent/JPS61168618A/en
Publication of JPS61168618A publication Critical patent/JPS61168618A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:A low-stress epoxy resin composition for semiconductor sealing excellent in moldability, moisture resistance and resistance to crack by heat shock, etc., comprising a specified epoxy resin, a curing agent, a cure accelerator, a filler, etc. CONSTITUTION:The desired epoxy resin composition for semiconductor sealing is obtained by adding a curing agent, a cure accelerator, a filler, a mold release, a surface treating agent, etc., to an epoxy resin entirely or partially consisting of an epoxy resin of the formula (wherein R is H, an alkyl or a halogen such as Cl or Br and n is 0-15).

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は信頼性に優れる半導体封止用低応力ニーキシ樹
脂組成物に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a low stress Nyxy resin composition for semiconductor encapsulation which has excellent reliability.

〔従来技術〕[Prior art]

近年、半導体関連技術の進歩はめざましく、LSIの集
積度はどんどん向上し、それに伴い配線の微細化とチッ
プサイズの大型化が進んでいる。
In recent years, advances in semiconductor-related technology have been remarkable, and the degree of integration of LSIs has been steadily improving, with interconnections becoming finer and chip sizes becoming larger.

この傾向は樹脂封止LSIのM配線変形、ノソツシペー
シ1ノ・クラック、樹脂クラックなどの故障を深刻化さ
せた。これらの問題の解決の為に、現在、半導体封止用
樹脂の低応力化が強く求められている。
This trend has aggravated failures such as deformation of the M wiring in resin-sealed LSIs, cracks in the space 1, and resin cracks. In order to solve these problems, there is currently a strong demand for lower stress in semiconductor encapsulating resins.

ニーキシ樹脂組成物はフェノール樹脂組成物やぼりエス
テル樹脂組成物に比べ耐湿性に優れる為広く半導体封止
用に用いられている。従来、半導体封止用としては、オ
ルトクレゾールノボラックエイキシ樹脂がニーキシ樹脂
として用いられて来たが、この樹脂を使用する限り樹脂
の低応力化には限界があった。また、低応カエボキシ樹
脂組成物を得る為に、合成ゴムの使用(特開昭58−1
76958、特開昭57−180626 、特開昭58
−174416 ”)や、シリコーン類の使用(特開昭
58−210920、特開昭57−3821)が検討さ
れて来たが、いずれも成形性(特に硬化性、パリ。
Nixi resin compositions are widely used for semiconductor encapsulation because they have better moisture resistance than phenolic resin compositions and ester resin compositions. Conventionally, ortho-cresol novolak eixy resin has been used as nixy resin for semiconductor encapsulation, but as long as this resin is used, there is a limit to the reduction in stress of the resin. In addition, in order to obtain a low-resistance carboxy resin composition, the use of synthetic rubber (Japanese Unexamined Patent Publication No. 58-1
76958, JP-A-57-180626, JP-A-58
-174416'') and the use of silicones (JP-A-58-210920, JP-A-57-3821) have been studied, but all of them have problems with moldability (particularly hardenability, Paris).

離型性)が劣ったシ、エイキシ樹脂の耐湿性をそこなう
などの問題があった。
There were problems such as poor mold releasability and deterioration of the moisture resistance of Eixy resin.

〔発明の目的〕[Purpose of the invention]

本発明は、従来オルトクレゾールノボラックエメキシ樹
脂などの使用によっては得ることのできなかった信頼性
に優れる半導体封止用低応力エイキシ樹脂を得んとして
研究した結果、一般式 (式中Rは水素原子、アルキル基、塩素、臭素等のハロ
ゲンなどを表す。又、nは0〜15の整数を表す。)で
示されるエイキシ樹脂をエポキシ樹脂の全部もしくは一
部として使用することにょシ、成形性、耐湿性に優れ、
熱衝撃を受けた場合の耐クラツク性等に優れる低応力エ
イキシ樹脂組成物が得られ−ることを見い出したもので
ある。
The present invention was developed as a result of research aimed at obtaining a low-stress epoxy resin for semiconductor encapsulation with excellent reliability, which could not be obtained by using conventional ortho-cresol novolac emexy resins. Represents atoms, alkyl groups, halogens such as chlorine, bromine, etc. (n represents an integer from 0 to 15). , excellent moisture resistance,
It has been discovered that a low stress epoxy resin composition having excellent crack resistance when subjected to thermal shock can be obtained.

〔発明の構成〕[Structure of the invention]

本発明は、 一般式 (式中Rは水素原子、アルキル基、塩素、臭素等のハロ
ゲンなどを表す。又、nはO〜15の整数を表す。)で
示されるエピキシ樹脂をエポキシ樹脂の全部もしくは一
部として用いることを特徴とするニーキシ樹脂・硬化剤
・硬化促進剤・充填剤・離型剤・表面処理剤等よ構成る
半導体封止用エイキシ樹脂組成物である。
In the present invention, an epixy resin represented by the general formula (wherein R represents a hydrogen atom, an alkyl group, a halogen such as chlorine or bromine, etc., and n represents an integer from O to 15) Alternatively, it is an Eixy resin composition for semiconductor encapsulation, which is characterized in that it is used as a part of Nyxy resin, a curing agent, a curing accelerator, a filler, a mold release agent, a surface treatment agent, and the like.

上記一般式で表わされるニーキシ樹脂は、分子中に可撓
性構造を有する多官能エイキシ樹脂であり、これを用い
る事によシ架橋密度の高い、冷態時寸法変化が小さくか
つ可撓性に豊むエイキシ樹脂成形物を与えるエイキシ樹
脂組成物を得ることができる。
The Nyxy resin represented by the general formula above is a multifunctional Axy resin that has a flexible structure in its molecules, and by using this resin, it has a high crosslinking density, small dimensional change when cold, and flexibility. It is possible to obtain an eixi resin composition that gives a rich eixi resin molded article.

このようなエイキシ樹脂の使用量は、これを調節するこ
とにより、低応カニIキシ樹脂の特性を最大限に引き出
すことができる。低応力の効果を出す為には好ましくは
エイキシ樹脂の50重量−以上、更に好ましくは70重
量−以上の使用がのぞましい。
By adjusting the amount of such Eixy resin used, the characteristics of the low-resistance Crab I xy resin can be maximized. In order to obtain the effect of low stress, it is preferable to use Eixy resin in an amount of 50 weight or more, more preferably 70 weight or more.

又、nは好ましくはθ〜5更に好ましくは3〜4がのぞ
ましい。
Further, n is preferably θ to 5, more preferably 3 to 4.

ここでいう硬化剤とは、フェノールノボラック類が好適
であるが酸無水物、アミンを挙げることもできる。これ
らは単独で用いてもよいが併用もできる。フェノールノ
ボラック類とは、ノボラック骨格中にフェノール性水酸
基、又はこの誘導体を含むもの全般をいう。フェノール
類(7ヱノール、′アルキルフェノール、レゾルシン等
)の単一成分ノボラックだけではなく、フェノール類の
任意の組み合せによる共縮合ノボラックや、フェノール
類と他の樹脂との共縮合ノボラックも含む。
The curing agent mentioned here is preferably phenol novolacs, but may also include acid anhydrides and amines. These may be used alone or in combination. Phenol novolacs refer to all compounds containing a phenolic hydroxyl group or a derivative thereof in the novolak skeleton. It includes not only single-component novolacs of phenols (7-enol, 'alkylphenol, resorcinol, etc.), but also co-condensed novolacs of any combination of phenols, and co-condensed novolacs of phenols and other resins.

又、ここでいうエポキシ樹脂とは、エダキシ基を有する
もの全般をいう。たとえば、ビスフェノール型エイキシ
樹脂・ノボラック型工ぽキシ樹脂−トリアジン核含有ニ
ーキシ樹脂等のことをいう。
Moreover, the epoxy resin referred to herein refers to all resins having an edoxy group. For example, it refers to bisphenol type epoxy resin, novolac type epoxy resin, triazine core-containing neixy resin, etc.

〔発明の効果〕〔Effect of the invention〕

このように本発明方法に従うと、成形性、耐湿性に優れ
、かつ熱衝撃を受けた場合の耐クラツク性等にすぐれる
低応カニIキシ樹脂組成物を得ることができる。特に、
半導体封止用途では今後ますますプラスチックノξツケ
ージ化が予想され、又、そのためにプラスチックの低応
力化が要求されている今日においては本発明の産業的意
味役割は非常に大きい。
According to the method of the present invention, it is possible to obtain a low-resistance resin composition having excellent moldability, moisture resistance, and crack resistance when subjected to thermal shock. especially,
In the future, it is expected that plastic packaging will be used more and more in semiconductor encapsulation applications, and as a result, there is a demand for lower stress in plastics, so the present invention plays a very important role in industry.

〔実施例〕〔Example〕

以下、半導体封止用成形材料での検討例で説明する。例
で用いた部は全て重責部である。本発明による実施例は
従来の技術による比較例に比べ成形性φ耐湿性・耐クラ
ツク性の点で優れておシ工業的に利用できる高付加価値
を有している。
The following is an explanation using a study example of a molding material for semiconductor encapsulation. The departments used in the example are all departments with major responsibilities. The examples according to the present invention are superior in moldability, moisture resistance, and crack resistance compared to comparative examples according to the prior art, and have high added value that can be used industrially.

実施例で用いたエピキシ樹脂とは次の通りである。The epixy resins used in the examples are as follows.

エポキシ樹脂A : DCE−400(1陽国策)ぞル
プ製) エピキシ当量   310f/ef 軟化点      65℃ 実施例1〜4 溶融シリカ(前置M)70部に表面処理剤(日本ユニカ
ーA−186)0.4部を加えミキサーで混合した。更
にニーキシ樹脂AをX部、オルトクレゾールノボラック
エピキシ樹脂(旭チバ: ECN −1273−) 2
0− X部、フェノールノボラック(注文ベークライト
製)10部、硬化促進剤(ケーアイ化成PP−360/
四国化成2MZ = 9/1 ) 0.2部、顔料(三
菱化成)05部、離型剤(ヘキストジャノンヘキストO
F/ヘキス)S=1/1)0.4部を加え混合した後コ
ニーダーで混練し4種のニブキシ樹脂組成物を得た。こ
れらの成形材料の成形性、耐クツツク性を測定した結果
、表のように比較例に比べて優れることがわかった。又
エピキシ樹脂Aの使用量は多り程耐クラック性に優れる
ことがわがりた。
Epoxy resin A: DCE-400 (manufactured by 1 Yokokusaku) Group) Epixy equivalent: 310 f/ef Softening point: 65°C Examples 1 to 4 70 parts of fused silica (prefix M) and surface treatment agent (Nippon Unicar A-186) 0.4 part was added and mixed using a mixer. Furthermore, X part of Niexy resin A, ortho-cresol novolac epixy resin (Asahi Ciba: ECN-1273-) 2
0-X part, 10 parts of phenol novolac (made by custom Bakelite), curing accelerator (K.I.
Shikoku Kasei 2MZ = 9/1) 0.2 parts, pigment (Mitsubishi Kasei) 05 parts, mold release agent (Hoechst Janone Hoechst O
F/hex)S=1/1) 0.4 part was added and mixed, and then kneaded in a co-kneader to obtain four types of niboxy resin compositions. As a result of measuring the moldability and shoe resistance of these molding materials, it was found that they were superior to the comparative examples as shown in the table. It was also found that the greater the amount of epixy resin A used, the better the crack resistance.

比較例1 溶融シリカ70部、オルトクレゾールノボラックエメキ
シ樹脂20部、フェノールノボラック10部、表面処理
剤α4部、硬化促進剤0.2部、顔料0、5部、離型剤
0.4部(いずれも実施例と同一原料)を実施例と同様
に材料化した。この成形材料の成形性・耐クラツク性・
耐湿性の結果は表の通りで実施例に比べて耐クラツク性
の点で大幅に劣る。
Comparative Example 1 70 parts of fused silica, 20 parts of orthocresol novolak emexy resin, 10 parts of phenol novolac, 4 parts of surface treatment agent α, 0.2 parts of curing accelerator, 0.5 parts of pigment, 0.4 parts of mold release agent ( The same raw materials as in the examples) were made into materials in the same manner as in the examples. The moldability, crack resistance, and
The moisture resistance results are shown in the table, and the crack resistance is significantly inferior to that of the Examples.

比較例2 溶融シリカ70部、表面処理剤064部、カルボキシル
基含有アクリロニトリル−ブタジェン共重合体(ハイカ
ーCTBN 1300 X 8 ) 2部、オルトクレ
ゾールノボラックエピキシ樹脂20部、フェノールノボ
ラック10部、顔料0.5部、硬化促進剤0.2部、離
型剤0.4部を実施例と同様に材料化した。この材料の
成形性・耐クラツク性・耐湿性の結果は表の通シで実施
例に比べて成形性・耐湿性の点で大幅に劣る。
Comparative Example 2 70 parts of fused silica, 064 parts of surface treatment agent, 2 parts of carboxyl group-containing acrylonitrile-butadiene copolymer (Hiker CTBN 1300 X 8), 20 parts of ortho-cresol novolak epixy resin, 10 parts of phenol novolac, 0.0 parts of pigment. 5 parts of curing accelerator, 0.2 part of curing accelerator, and 0.4 part of mold release agent were prepared in the same manner as in the example. The results of the moldability, crack resistance, and moisture resistance of this material are shown in the table, and the results show that the material is significantly inferior to the Examples in terms of moldability and moisture resistance.

*1.16 pin DIPを成形した時のリードビン
上のパリ発生程度で判定タイバ一部までの距離の3以下
の時A 、 X〜電の時B、匙〜この時C1%以上(タ
イバーを超えた)D *2TCT、 4+w+X 9mの大きさの模擬素子を
封止した1 6 pin DIP K−65℃(30分
);室温(5分)、:XSO℃(30分)なる熱衝撃を
200サイクル与えクラック発生数/総数で判定 *3TST、 4s+X65w+の大きさの模擬素子を
封止した1 6 pln DIPに一165℃(2分)
:XSO’C(2分)なる熱衝撃を200サイクル与え
クラック発生数/総数で判定 *4耐湿性、アルミ模擬素子を封止した1 6 pln
DTPを135℃、100%の条件で1000hr保管
しアルミ腐食による不良率/総数で判定
*1.16 When molding pin DIP, judge the degree of occurrence of paris on the lead bin.A when the distance to a part of the tie bar is 3 or less, 200 cycles of thermal shock: D Judging by the number of cracks generated/total number *3TST, 16 pln DIP sealed with a simulated element of size 4s + x 65w + -165℃ (2 minutes)
200 cycles of thermal shock:
Store DTP at 135℃ and 100% condition for 1000 hours and judge by defect rate/total number due to aluminum corrosion

Claims (1)

【特許請求の範囲】 一般式 ▲数式、化学式、表等があります▼ (式中Rは水素原子、アルキル基、塩素、臭素等のハロ
ゲンなどを表す。又、nは0〜15の整数を表す。)で
示されるエポキシ樹脂をエポキシ樹脂の全部もしくは一
部として用いることを特徴とするエポキシ樹脂・硬化剤
・硬化促進剤・充填剤・離型剤・表面処理剤等より成る
半導体封止用エポキシ樹脂組成物。
[Claims] General formula ▲ Numerical formula, chemical formula, table, etc. ▼ (In the formula, R represents a hydrogen atom, an alkyl group, halogen such as chlorine, bromine, etc. Also, n represents an integer from 0 to 15. An epoxy for semiconductor encapsulation consisting of an epoxy resin, a curing agent, a curing accelerator, a filler, a mold release agent, a surface treatment agent, etc., characterized by using the epoxy resin shown in (.) as all or a part of the epoxy resin. Resin composition.
JP850385A 1985-01-22 1985-01-22 Epoxy resin composition for semiconductor sealing Pending JPS61168618A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP850385A JPS61168618A (en) 1985-01-22 1985-01-22 Epoxy resin composition for semiconductor sealing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP850385A JPS61168618A (en) 1985-01-22 1985-01-22 Epoxy resin composition for semiconductor sealing

Publications (1)

Publication Number Publication Date
JPS61168618A true JPS61168618A (en) 1986-07-30

Family

ID=11694915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP850385A Pending JPS61168618A (en) 1985-01-22 1985-01-22 Epoxy resin composition for semiconductor sealing

Country Status (1)

Country Link
JP (1) JPS61168618A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291615A (en) * 1985-06-19 1986-12-22 Sanyo Kokusaku Pulp Co Ltd Epoxy resin composition
JPS61293219A (en) * 1985-06-20 1986-12-24 Sanyo Kokusaku Pulp Co Ltd Sealing resin composition
JPS6239616A (en) * 1985-08-13 1987-02-20 Sanyo Kokusaku Pulp Co Ltd Epoxy resin composition
JPS6270413A (en) * 1985-08-26 1987-03-31 ザ ダウ ケミカル カンパニ− Improved sealing composition
JPS62246921A (en) * 1986-04-19 1987-10-28 Toshiba Chem Corp Sealing resin composition
US5284929A (en) * 1993-03-10 1994-02-08 Shell Oil Company Epoxy resins with cyclohexenenorbornene moieties
JPH06298903A (en) * 1993-04-19 1994-10-25 Sumitomo Bakelite Co Ltd Epoxy resin composition
JPH07118504A (en) * 1993-10-26 1995-05-09 Matsushita Electric Works Ltd Epoxy resin molding material for sealing semiconductor
WO2003029323A1 (en) * 2001-09-28 2003-04-10 Nippon Petrochemicals Co.,Ltd. Phenolic resin, epoxy resin, processes for production thereof and epoxy resin composition

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291615A (en) * 1985-06-19 1986-12-22 Sanyo Kokusaku Pulp Co Ltd Epoxy resin composition
JPS61293219A (en) * 1985-06-20 1986-12-24 Sanyo Kokusaku Pulp Co Ltd Sealing resin composition
JPS6239616A (en) * 1985-08-13 1987-02-20 Sanyo Kokusaku Pulp Co Ltd Epoxy resin composition
JPS6270413A (en) * 1985-08-26 1987-03-31 ザ ダウ ケミカル カンパニ− Improved sealing composition
JPS62246921A (en) * 1986-04-19 1987-10-28 Toshiba Chem Corp Sealing resin composition
US5284929A (en) * 1993-03-10 1994-02-08 Shell Oil Company Epoxy resins with cyclohexenenorbornene moieties
US5359023A (en) * 1993-03-10 1994-10-25 Shell Oil Company Cyclohexanenorbornane epoxy resin with curing agent
JPH06298903A (en) * 1993-04-19 1994-10-25 Sumitomo Bakelite Co Ltd Epoxy resin composition
JPH07118504A (en) * 1993-10-26 1995-05-09 Matsushita Electric Works Ltd Epoxy resin molding material for sealing semiconductor
WO2003029323A1 (en) * 2001-09-28 2003-04-10 Nippon Petrochemicals Co.,Ltd. Phenolic resin, epoxy resin, processes for production thereof and epoxy resin composition

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