JPS61168164U - - Google Patents
Info
- Publication number
- JPS61168164U JPS61168164U JP4878285U JP4878285U JPS61168164U JP S61168164 U JPS61168164 U JP S61168164U JP 4878285 U JP4878285 U JP 4878285U JP 4878285 U JP4878285 U JP 4878285U JP S61168164 U JPS61168164 U JP S61168164U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetic field
- magnetic
- sputtering
- sputtering surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 230000004907 flux Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Magnetic Films (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878285U JPS61168164U (de) | 1985-04-02 | 1985-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4878285U JPS61168164U (de) | 1985-04-02 | 1985-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61168164U true JPS61168164U (de) | 1986-10-18 |
Family
ID=30565361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4878285U Pending JPS61168164U (de) | 1985-04-02 | 1985-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61168164U (de) |
-
1985
- 1985-04-02 JP JP4878285U patent/JPS61168164U/ja active Pending
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