JPS61167437A - Driving gear in vacuum vessel - Google Patents

Abstract

PURPOSE:To eliminate the generation of a gas, etc., damaging the vacuum atmosphere by using as a driving source a piezoelectric motor utilizing the rotation moment generated in a rotor pressed on the end surface of an ultrasonic vibrator generating ultrasonic vibration. CONSTITUTION:A rewinding roll 3 and a winding roll 4 both using a piezoelectric motor 2 as a power source are placed on both sides of a vaporization source 5 in a vacuum vessel 1 of a vacuum vapor deposition device. A base film 6 can be continuously vapor-deposited while being moved along a guide roller 7. The film can be vapor-deposited, when needed, while being heated by a heater 8. The driving gear in the vacuum vessel never generates a gas causing the damage of the vacuum atmosphere that must be controlled to the utmost. Consequently, the gear can be operated safely for a long time in the vacuum vessel.

Description

[Detailed Description of the Invention] [Industrial Field of Application and Object of the Invention] The present invention relates to a drive mechanism in a vacuum device, and an object of the present invention is to provide a drive mechanism that does not generate gases that disturb the vacuum atmosphere. purpose.

[Conventional technology]

Since the drive mechanism within the vacuum device must not generate gas or the like that would disturb the vacuum, the power source is usually placed outside the vacuum device. This is because there is a risk of gas generation if an electric motor, air cylinder, hydraulic pump, etc. is used as a power source in a vacuum device. For this reason, there were problems such as the drive mechanism becoming complicated and the device becoming a large and heavy object. If there were a vacuum motor that could directly drive the drive device, great technological progress could be expected, but until now such a motor had not been found and it was a defective technology in the vacuum technology field.

[Means for solving problems]

This invention solves the above-mentioned drawbacks of the prior art.
The objective is achieved by a vacuum chamber drive device characterized by using an ultrasonic motor as a drive source, which utilizes rotational torque generated in a rotor crimped to the end face of an ultrasonic vibrator that generates ultrasonic vibrations. This has been achieved.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 FIG. 1 is a diagram showing an embodiment of a vacuum chamber drive device according to the present invention. In the vacuum evaporation apparatus shown in FIG. 1, a piezoelectric motor 2, an unwinding roll 3 and a take-up roll 4 which are powered by the piezoelectric motor 2 are placed on the left and right sides with an evaporation source 5 in between, in a vacuum chamber 1. This device is capable of continuous vapor deposition while moving the film roller along guide rollers 7. Note that it is also possible to perform the vapor deposition while heating with the heater 8 when necessary.

Embodiment 2 FIG. 2 is a substrate drive device showing another embodiment of the vacuum chamber drive device according to the present invention. A substrate 10 on a substrate holder 9 is rotated by a piezoelectric motor 2 serving as a driving device. This driving device is set in a vacuum chamber, an evaporation source and a shutter are attached to predetermined positions, and the evaporation operation is performed on the substrate 10 in a turret type manner. The substrate 10 is supplied onto the substrate holder 9 from an automatic supply device (not shown), and is discharged from the holder by an automatic discharge device (not shown), thereby performing a vapor deposition operation in an assembly line manner. When vacuum evaporation work was performed using this turret type drive mechanism, very good test results were obtained with no gas being generated from the piezoelectric motor 2.

As explained above, the present invention uses an ultrasonic motor as a drive source, which utilizes rotational torque generated in a rotor crimped to the end face of an ultrasonic vibrator that generates ultrasonic vibrations. The in-vacuum chamber drive device of the present invention did not generate any gas that would disturb the vacuum atmosphere, which must be suppressed as much as possible, and was able to safely operate for a long time in the vacuum chamber. In other words, the stator of a piezoelectric motor generally consists of a ceramic transducer that excites ultrasonic vibrations and an ultrasonic resonator made of metal parts, and the rotor consists of a metal rotating disk with a shaft as its axis. Therefore, there is no risk of gas generation in a vacuum atmosphere no matter which part you take.In particular, the cantilever-shaped ultrasonic motor used in the embodiment of the present invention is made of ceramic with P b ( Z r + T I ) Since the resonator is composed of an aluminum member and steel bolts using an Os-based piezoelectric material, there is no source of gas generation even if it is heated.

[Brief explanation of drawings]

FIG. 1 is a plan view of a vacuum evaporation apparatus which is an embodiment of the vacuum chamber drive apparatus according to the present invention, and FIG. 2 is a perspective view of a substrate rotation apparatus which is an application example of the apparatus of the present invention. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Piezoelectric motor, 3... Unwinding roll, 4... Winding roll, 5... Guide roller, 6... Base film, 7... Heater, 8...
- Evaporation source, 9... substrate, 10... substrate holder. Figure 1

Claims (1)

[Claims] A vacuum chamber drive device characterized in that a piezoelectric motor is used as a drive source, which utilizes rotational torque generated in a rotor crimped to the end face of an ultrasonic vibrator that generates ultrasonic vibrations.