JPS5986484A - Supersonic motor - Google Patents

Supersonic motor

Info

Publication number
JPS5986484A
JPS5986484A JP57197237A JP19723782A JPS5986484A JP S5986484 A JPS5986484 A JP S5986484A JP 57197237 A JP57197237 A JP 57197237A JP 19723782 A JP19723782 A JP 19723782A JP S5986484 A JPS5986484 A JP S5986484A
Authority
JP
Japan
Prior art keywords
vibrator
electrostrictive element
motor
ultrasonic motor
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57197237A
Other languages
Japanese (ja)
Inventor
Naoya Kaneda
直也 金田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP57197237A priority Critical patent/JPS5986484A/en
Publication of JPS5986484A publication Critical patent/JPS5986484A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To simplify the manufacture of an electrostrictive element and the assembling of a motor and to improve the driving efficiency of a supersonic motor by flattening the electrostrictive element mounting surface of a vibrator. CONSTITUTION:An electrostrictive element 3 is bonded to the outer periphery of a cylindrical vibrator 2. A movable element 1 is rotatably driven by generating elastic traveling wave at the vibrator 2 by means of the element 3. The outer peripheral surface of the vibrator 2 is formed in a polygonal shape due to the array of a flat surface 2a, and the element 3 is bonded to the flat surface 2a. The profile of the polygonal shape of the vibrator 2 is decided by a resonance frequency determined by the shape of the material.

Description

【発明の詳細な説明】 (技術分野) 本発明は超音波モータ、特に、弾性振動子に電歪素子に
よって進行弾性波を発生させ、これにより移動体を駆動
する様な超音波モータに関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an ultrasonic motor, and particularly to an ultrasonic motor that generates traveling elastic waves in an elastic vibrator using an electrostrictive element and drives a moving body using the traveling elastic waves.

(従来技術) 超音波モータとは、例えば、固定体と移動体を備え、こ
れらの固定体と移動体のうち少くとも一方は複数の電歪
素子で駆動される少くとも一つの振動子を含み、前記電
歪素子の引出しリードは駆動電源に接続され、固定体と
移動体はトルクを伝達するために振動子の表面上の少く
とも一点において互いに押し合い、そして電歪素子に加
える超音波電気エネルギーを機械振動エネルギーに変換
させ、該機械的振動エネルギーを移動体の一方向運動に
変える様な装置であり、この種の装置1学に関しては、
すでに特開昭52−29192号公報等で開示されてい
る。
(Prior Art) An ultrasonic motor includes, for example, a fixed body and a movable body, and at least one of the fixed body and the movable body includes at least one vibrator driven by a plurality of electrostrictive elements. , the extraction lead of the electrostrictive element is connected to a driving power source, the fixed body and the movable body press each other at at least one point on the surface of the vibrator to transmit torque, and ultrasonic electrical energy is applied to the electrostrictive element. It is a device that converts mechanical vibration energy into mechanical vibration energy and converts the mechanical vibration energy into unidirectional movement of a moving object. Regarding the science of this type of device,
This has already been disclosed in Japanese Unexamined Patent Publication No. 52-29192.

特にここでは機械的振動エネルギーとして、表面弾性波
を用い、該弾性波によって移動体を摩擦駆動する様にし
、且つ、その際少くとも一つの電歪素子の振動によって
定在波を発生させる様な構成のモータ転について述べる
In particular, here, a surface acoustic wave is used as the mechanical vibration energy, and the moving body is frictionally driven by the elastic wave, and at the same time, a standing wave is generated by the vibration of at least one electrostrictive element. The motor rotation of the configuration will be described.

第1図はこの種のモータの、駆動原理を示すもので、1
を移動体、2を弾性振動子とする。X軸は振動子2の表
面上に起きる表面波の進行方向を示しz軸をその法線方
向とする。
Figure 1 shows the driving principle of this type of motor.
Let be a moving body and 2 be an elastic vibrator. The X-axis indicates the traveling direction of a surface wave occurring on the surface of the vibrator 2, and the z-axis is the normal direction thereof.

弾性振動子2に不図示の電歪素子により振動を与えると
、表面弾性波が発生し4H動子表面上を伝搬していく。
When the elastic vibrator 2 is vibrated by an electrostrictive element (not shown), a surface acoustic wave is generated and propagates on the surface of the 4H oscillator.

この弾性波は縦波と横波を伴った表面波で、その質点の
運動は楕円軌道を描く振動となる。質点Aについて着目
すると、縦振巾u1横振巾Wの楕円運動を行なっておシ
、表面波の進行方向を+X方向とすると楕円運動は反時
計方向に回転している。この表面波は一波長ごとに頂点
A 、A’・・・・・を有し、その頂点速度はX成分の
みであって、V=2πfu (但しfは振動数)である
。そこでこの表面に移動体1の表面を加圧接触させると
移動体表面は頂点A。
This elastic wave is a surface wave with longitudinal waves and transverse waves, and the motion of the mass point is vibration that describes an elliptical orbit. Focusing on the mass point A, it performs an elliptical motion with a vertical oscillation width u1 and a lateral oscillation width W. If the traveling direction of the surface wave is the +X direction, the elliptical motion rotates counterclockwise. This surface wave has vertices A, A', etc. for each wavelength, and its apex velocity is only the X component, V=2πfu (where f is the frequency). Therefore, when the surface of the moving body 1 is brought into pressure contact with this surface, the surface of the moving body reaches the vertex A.

A′・・・・・のみに接触するから、移動体1は振動子
2との間の摩擦力によシ矢印Nの方向に駆動されること
になる。
Since it contacts only A', the moving body 1 is driven in the direction of arrow N by the frictional force between it and the vibrator 2.

矢印N方向の移動体1の移動速度は振動数fに比例する
。又、加圧接触による摩擦駆動を行なうため縦振+lJ
uばかりでなく、横損r11wにも依存する。即ち、移
動体1の移動速度は楕円運動の大きさに比例し、横内運
動の大きい方が速度が高い。従って、移動体速度は市、
歪素子に加える電圧に比例する。
The moving speed of the moving body 1 in the direction of arrow N is proportional to the frequency f. In addition, since frictional drive is performed by pressurized contact, longitudinal vibration +lJ
It depends not only on u but also on lateral loss r11w. That is, the moving speed of the moving body 1 is proportional to the magnitude of the elliptical motion, and the larger the lateral motion, the higher the speed. Therefore, the moving object speed is city,
It is proportional to the voltage applied to the strain element.

第2図は第1図に示した弾性振動子2に表面波を発生さ
せるための原理を示すものである。
FIG. 2 shows the principle for generating surface waves in the elastic vibrator 2 shown in FIG. 1.

3a及び3bは弾性振動子2の共(和周波数から最も効
率よく弾性波を得ることのできる様な間隔で弾性振動子
2に貼シ付けた、例えば、PssT等の電歪素子であり
、3aは線Aに、3bは線Bに接続されている。4はと
のモータの駆動用の電源であり、V = Vosinω
tという電圧を供給しており、図からも明らかなように
1.IJAにtよV == Vo sin ”tの電圧
が加わる。線Bには90°位相シフタ5によJ)V=V
O81n(ωt±−)の電圧が加えられる。+、−は移
動体の移動方向により切換る。即ち90°位相シフタ5
によって+90’位相をずらす場合と一90°位相をず
らす場合によって移動体進行方向が異なる。
3a and 3b are electrostrictive elements, such as PssT, attached to the elastic vibrator 2 at intervals such that elastic waves can be most efficiently obtained from the sum frequency; is connected to line A, and 3b is connected to line B. 4 is the power source for driving the motor, and V = Vosinω
t is supplied, and as is clear from the figure, 1. A voltage of t is applied to IJA.A voltage of t is applied to line B by 90° phase shifter 5.
A voltage of O81n (ωt±-) is applied. + and - are switched depending on the moving direction of the moving body. That is, 90° phase shifter 5
The traveling direction of the moving object differs depending on whether the phase is shifted by +90' or the phase is shifted by 190°.

(イ)〜(ロ)は時間に応じた振動子2の振動状態をt
=4−一、に)はt = −−4−−、−の状態″であ
る。
(a) to (b) represent the vibration state of the vibrator 2 according to time t
=4−1, ni) is the state of t=−−4−−,−.

ω   ω         2ω   ω弾性波は第
2図中右方向に進むが、摂動子2の駆動面の任意の質点
は反時計方向の楕円運動を行なう。しだがって駆動面に
圧接される不図示の移動体は左方向に移動する。
ω ω 2ω ω The elastic wave propagates rightward in FIG. 2, but any mass point on the driving surface of the perturber 2 performs an elliptical motion in the counterclockwise direction. Therefore, the moving body (not shown) that is pressed against the drive surface moves to the left.

@3図は以上説明した原理に基いて(1ヤ成しだ回転駆
動型超音波モータの一例を示し、電歪素子3a及び3b
は弾性振動子2の外周面に、振動子2の材質形状より決
定される最も効率のよい間隔を持って貼り付けられてい
る。したがってとの振動子2を前述の方法に則って駆動
すると振動子2の外周面及び内周面に弾性進行波が発生
するものである。したがって、ここで移動体1をその外
周面が摂動子2の内周面に圧接するように構成すれば、
振動子2を固定すると移動体1が逆に、移動体1を固定
すると振動子2が回転するものである。尚、図で移動体
1は切欠部1aを有し振動子2に組込む際には半径方向
に圧接力を持つよう構成してあふが、この圧接機構は他
にも種々の構成が可能である。
Figure @3 shows an example of a one-layer rotation drive type ultrasonic motor based on the principle explained above, and includes electrostrictive elements 3a and 3b.
are attached to the outer peripheral surface of the elastic vibrator 2 at the most efficient intervals determined by the material shape of the vibrator 2. Therefore, when the vibrator 2 is driven according to the method described above, elastic traveling waves are generated on the outer and inner circumferential surfaces of the vibrator 2. Therefore, if the moving body 1 is configured so that its outer circumferential surface is in pressure contact with the inner circumferential surface of the perturber 2,
When the vibrator 2 is fixed, the movable body 1 rotates, and when the movable body 1 is fixed, the vibrator 2 rotates. In the figure, the movable body 1 has a notch 1a and is configured to have a pressure contact force in the radial direction when it is assembled into the vibrator 2, but this pressure contact mechanism can have various other configurations. .

PA4図は、第3図で示した型の超音波モータを例えば
焦点調節用レンズの駆動に用いた場合の例を示すもので
ある。図で焦点調節に関与するレンズ群8は、前玉ホル
ダー6に押え環7で止められている。ホルダー6の後端
伺近にはヘリコ・fドネジが切ってあり、固5ぜ鏡筒1
1の前端付近のヘリコイドネジに螺合している。9は固
定鏡筒11に止められた指標Jx3である。固定鏡筒1
1の内部にはカム環19が回動自在に設けられており、
その内周面には変倍系レンズ17及び補正系レンズ18
をズーミングの為に所定の関係の下に移動させる為のカ
ムnが切ってあυ、変倍系レンズ17のホルダー14と
補正系レンズ18のホルダー15は夫々の植立ピン2゜
及び21においてこのカム溝に係合している。
FIG. PA4 shows an example in which the ultrasonic motor of the type shown in FIG. 3 is used, for example, to drive a focusing lens. In the figure, a lens group 8 involved in focus adjustment is secured to a front lens holder 6 with a presser ring 7. There is a helical screw cut near the rear end of the holder 6, which allows the lens barrel 1 to be fixed.
It is screwed into the helicoid screw near the front end of 1. 9 is an index Jx3 fixed to the fixed lens barrel 11. Fixed lens barrel 1
A cam ring 19 is rotatably provided inside the cam ring 1.
A variable power lens 17 and a correction lens 18 are provided on the inner peripheral surface of the lens.
The cam n for moving the lens to a predetermined relationship for zooming is cut, and the holder 14 of the variable power lens 17 and the holder 15 of the correction lens 18 are held at the respective planting pins 2° and 21. It engages with this cam groove.

バー13はホルダー14.15の案内であり、その前端
部と後端部は、固定森筒11に固定されたズーム前板1
2とズーム後板22に夫々固定されている。ズーム操作
fJiNoは、外部ズーム操作つまみ16を有し、不図
示の連結機構によってカム環19を外部よシ回転操作し
得る様連結されている。23はズーム後板22に増刊け
られた後部固定鏡筒で、絞り24及び絞り駆動用メータ
ー25を間にはさんで且つ、リレー系レンズ28のボル
ダ−27を内部に支持している。
The bar 13 is a guide for the holder 14.15, and its front and rear ends are connected to the zoom front plate 1 fixed to the fixed cylinder 11.
2 and the zoom rear plate 22, respectively. The zoom operation fJiNo has an external zoom operation knob 16, which is connected by a connection mechanism (not shown) so that the cam ring 19 can be externally rotated. Reference numeral 23 denotes a rear fixed lens barrel added to the zoom rear plate 22, which holds an aperture 24 and an aperture driving meter 25 therebetween, and supports a boulder 27 of a relay lens 28 inside.

尚、リレー系レンズボルダ−27は組立調整後セットビ
ス26によって鏡筒26に固定されるものである。
The relay lens boulder 27 is fixed to the lens barrel 26 with a set screw 26 after assembly and adjustment.

以上述べたズームl/ンズ組立体は極く一般的な構成で
あるが、ここで焦点81間節用レンズl!f−8の駆動
用に、?43図に示したタイプの超音波モータを配置し
ている。即ち、前玉ボルダ−60後端部(世し、指標環
9の下側で、外部からは見えない部位)に電歪素子3を
有する弾性振動子2を適宜の手段で固定し、その内周面
を固定鏡時11に、部位29で圧接させている。これに
より前玉ホルダー7が前述した原理で振動子20表面弾
性波で固定鏡筒11に対し回転する。
The zoom l/lens assembly described above has a very general configuration, but here, the focal point 81 intersegmental lens l! For driving f-8? An ultrasonic motor of the type shown in Fig. 43 is arranged. That is, the elastic vibrator 2 having the electrostrictive element 3 is fixed to the rear end of the front ball boulder 60 (the part below the index ring 9 and is not visible from the outside) by an appropriate means, and the inside of the elastic vibrator 2 is fixed. The peripheral surface is brought into pressure contact with the fixed mirror 11 at a portion 29. As a result, the front lens holder 7 rotates relative to the fixed lens barrel 11 by the surface acoustic waves of the vibrator 20 according to the principle described above.

圧接機構としては部位29にゴム部材等が配される。不
図示の自動焦点調′f11j (iJ、 4’Nと本超
音波モータを連動させればAP(オート・フォーカス)
モータとしで活用できる。
A rubber member or the like is disposed at the portion 29 as a pressure contact mechanism. AP (auto focus) can be achieved by linking automatic focus adjustment 'f11j (iJ, 4'N, not shown) with this ultrasonic motor.
Can be used as a motor.

以上のように、レンズ駆動用モータとして超音波モータ
を用いることによってレンズの寸法を大きくすることな
しにモータを組込めるというメリットの他に、騒音がな
い、減速機構が不用である等々のメリットが得られるこ
とは容易に理解出来る処である。
As mentioned above, by using an ultrasonic motor as a lens drive motor, in addition to the advantage of being able to incorporate the motor without increasing the size of the lens, there are other advantages such as no noise and no need for a speed reduction mechanism. What you get is easy to understand.

しかしながらQl< 3図に示しだ型の超音波モータの
場合、゛「電歪素子3を円弧状に成形したυ、或いは、
電歪素子に円弧状のひずみを与えて接着しなければなら
ず、そのために電盃素子の成形、接着上、コスト的にも
又、製作上も不利な点があった。
However, in the case of the type of ultrasonic motor shown in Fig.
It is necessary to give an arcuate strain to the electrostrictive element before adhering it, which is disadvantageous in terms of molding and adhesion of the electrostrictive element, cost, and manufacturing.

(目的) 本発明は以上に述べた様な油清にv6みて為されたもの
で、lI′fに、回転駆動に適用される超丘波モータと
して、コスト面でも、又製造部で°もよシ優利で、且つ
駆動効率の面でも1憂れた回転駆動用の超音波モータを
提供することをその目的とするものである。
(Purpose) The present invention has been made in view of the above-mentioned oil purifier, and is intended to be used as an ultra-hill wave motor applied to rotational drive in terms of cost and manufacturing department. It is an object of the present invention to provide an ultrasonic motor for rotational driving which is advantageous in terms of efficiency and is also excellent in terms of driving efficiency.

(実施例) 以下、本発明の一実施例について第5図を参照して説明
するに、同図は第3図に示した従来の構成に対して、円
筒状振動子2の外周の′電歪素子3を平面に貼シ付ける
ことを目的としておシ、図のように振動子2の外周面は
平面2aの配列による多角形状をなしている。ここで、
前述の通ルこの多角形の形状は振動子2の材質形状によ
って決まる共振周波数によって決定されるものである。
(Embodiment) Hereinafter, an embodiment of the present invention will be explained with reference to FIG. In order to attach the strain element 3 to a flat surface, the outer circumferential surface of the vibrator 2 has a polygonal shape formed by an arrangement of flat surfaces 2a, as shown in the figure. here,
As mentioned above, the shape of this polygon is determined by the resonance frequency determined by the shape of the material of the vibrator 2.

勿論、この平面2a上には電歪素子3が貼付される。Of course, the electrostrictive element 3 is attached on this plane 2a.

斯くして、実施例の構成によれば、円筒状振動子2上の
電歪素子取り付は面が何れも平面であることによって、
従来の欠点を悉く解消させることが出来る様になる。尚
、勿論電歪素子数υ付は面2aは振動子2の内周面に形
成しても良く、その場合は、移動体1はその外周に係合
さぜられることになる。
Thus, according to the configuration of the embodiment, the electrostrictive element can be mounted on the cylindrical vibrator 2 because all the surfaces are flat.
It becomes possible to eliminate all the drawbacks of the conventional method. Of course, the surface 2a with the number of electrostrictive elements υ may be formed on the inner circumferential surface of the vibrator 2, and in that case, the movable body 1 will be engaged with the outer circumference thereof.

(効果) 以上説明したように、本発明によれば、電歪素子によっ
て4辰動子に弾性進行波を発生さぜることによυ移動体
を回転駆動する回転駆動型超音波モータとして、振動子
のIK電歪素子取付は面を平面とすることにより従来に
比して電歪素子の製作、モータの組立等が簡単となりコ
スト面でも又製作面でも有利となり、且つ駆動効率が格
段に向上するものである。
(Effects) As explained above, according to the present invention, as a rotary drive type ultrasonic motor that rotationally drives a υ moving body by generating elastic traveling waves in four radial elements using an electrostrictive element, The mounting surface of the IK electrostrictive element on the vibrator is flat, which makes manufacturing the electrostrictive element and assembling the motor easier than before, which is advantageous in terms of cost and production, and the drive efficiency is significantly improved. It will improve.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は弾性振動子の表面弾性波を利用した超音波モー
タの原理説明図、第2図は超音波モータの駆動方法の説
明図、2115図は超音波モータの一例を示す要部分解
斜視図、;’、(r、 4図は第3図に示しだタイプの
超音波モータを焦点調節用レンズの駆動用としてズーム
l/クズ組立体内に組込んだ例を示す断面図、第5図は
本発明を第3図に示した如き構成の超音波モータに適用
した場合の一実施例の要部分解斜視図である。 1・・・移動体 2・・・弾性摂動子 2a・・・電歪素子取り付は用事面 3・・・電歪素子 特許出願人 キャノン株式会社 840 汀 少 ゴ ゝ3 2α 445− ノf ノ2 σ
Fig. 1 is an explanatory diagram of the principle of an ultrasonic motor that utilizes surface acoustic waves of an elastic vibrator, Fig. 2 is an explanatory diagram of the driving method of an ultrasonic motor, and Fig. 2115 is an exploded perspective view of essential parts showing an example of an ultrasonic motor. Fig. 4 is a sectional view showing an example in which the ultrasonic motor of the type shown in Fig. 3 is incorporated into the zoom l/kuzu assembly for driving the focusing lens; Fig. 5 3 is an exploded perspective view of essential parts of an embodiment in which the present invention is applied to an ultrasonic motor having the configuration shown in FIG. 3. 1... Moving body 2... Elastic perturber 2a... Mounting the electrostrictive element is a practical matter 3...Electrostrictive element patent applicant Canon Corporation 840 汀小Goゝ3 2α 445- nof ノ2 σ

Claims (2)

【特許請求の範囲】[Claims] (1)弾性振動子に電歪素子によって進行弾性波を発生
させ、これにょシ移動体を回転駆動する超音波モータに
おいて、電歪素子数シ付は面を平面としたことを特徴と
する超音波モータ。
(1) In an ultrasonic motor that generates a traveling elastic wave in an elastic vibrator using an electrostrictive element and rotates a moving object, the ultrasonic motor is characterized in that the surface of the electrostrictive element is flat. sonic motor.
(2)前記振動子は円筒状であり、この円筒状振動子の
内周外周のうち、どちらが一方の面は円状であり、他方
の面に少くとも2つ以上の平面を設けて該平面に前記電
歪素子を取υ付ける様にした特許請求の範囲第(1)項
に記載の超音波モータ。
(2) The vibrator is cylindrical, and one surface of the inner and outer circumferences of the cylindrical vibrator is circular, and the other surface is provided with at least two flat surfaces. The ultrasonic motor according to claim 1, wherein the electrostrictive element is attached to the ultrasonic motor.
JP57197237A 1982-11-09 1982-11-09 Supersonic motor Pending JPS5986484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57197237A JPS5986484A (en) 1982-11-09 1982-11-09 Supersonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57197237A JPS5986484A (en) 1982-11-09 1982-11-09 Supersonic motor

Publications (1)

Publication Number Publication Date
JPS5986484A true JPS5986484A (en) 1984-05-18

Family

ID=16371125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57197237A Pending JPS5986484A (en) 1982-11-09 1982-11-09 Supersonic motor

Country Status (1)

Country Link
JP (1) JPS5986484A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61167437A (en) * 1985-01-21 1986-07-29 Hitachi Maxell Ltd Driving gear in vacuum vessel
JPS63124779A (en) * 1986-11-11 1988-05-28 Nikon Corp Ultrasonic motor
JPS63137588U (en) * 1987-02-25 1988-09-09
JPH026298A (en) * 1988-06-27 1990-01-10 Shimadzu Corp Device for positioning of structure
US5218258A (en) * 1990-09-04 1993-06-08 Mitsubishi Jukogyo Kabushiki Kaisha Ultrasonic motor and laser beam welding apparatus using the same
EP0613194A1 (en) * 1993-02-26 1994-08-31 Daimler-Benz Aktiengesellschaft Drive for a vibration motor with cylindrical vibrating member
JP2013233066A (en) * 2012-04-03 2013-11-14 Ricoh Co Ltd Rotation drive transmission device and image forming apparatus using the same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61167437A (en) * 1985-01-21 1986-07-29 Hitachi Maxell Ltd Driving gear in vacuum vessel
JPH0661447B2 (en) * 1985-01-21 1994-08-17 日立マクセル株式会社 Vacuum tank drive
JPS63124779A (en) * 1986-11-11 1988-05-28 Nikon Corp Ultrasonic motor
JPS63137588U (en) * 1987-02-25 1988-09-09
JPH026298A (en) * 1988-06-27 1990-01-10 Shimadzu Corp Device for positioning of structure
US5218258A (en) * 1990-09-04 1993-06-08 Mitsubishi Jukogyo Kabushiki Kaisha Ultrasonic motor and laser beam welding apparatus using the same
EP0613194A1 (en) * 1993-02-26 1994-08-31 Daimler-Benz Aktiengesellschaft Drive for a vibration motor with cylindrical vibrating member
JP2013233066A (en) * 2012-04-03 2013-11-14 Ricoh Co Ltd Rotation drive transmission device and image forming apparatus using the same

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