JPS6116692Y2 - - Google Patents
Info
- Publication number
- JPS6116692Y2 JPS6116692Y2 JP1189680U JP1189680U JPS6116692Y2 JP S6116692 Y2 JPS6116692 Y2 JP S6116692Y2 JP 1189680 U JP1189680 U JP 1189680U JP 1189680 U JP1189680 U JP 1189680U JP S6116692 Y2 JPS6116692 Y2 JP S6116692Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- tweezers
- clamping part
- plate holder
- gripping groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1189680U JPS6116692Y2 (enrdf_load_stackoverflow) | 1980-02-04 | 1980-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1189680U JPS6116692Y2 (enrdf_load_stackoverflow) | 1980-02-04 | 1980-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56114543U JPS56114543U (enrdf_load_stackoverflow) | 1981-09-03 |
| JPS6116692Y2 true JPS6116692Y2 (enrdf_load_stackoverflow) | 1986-05-22 |
Family
ID=29608498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1189680U Expired JPS6116692Y2 (enrdf_load_stackoverflow) | 1980-02-04 | 1980-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6116692Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-02-04 JP JP1189680U patent/JPS6116692Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56114543U (enrdf_load_stackoverflow) | 1981-09-03 |
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