JPS61166748U - - Google Patents

Info

Publication number
JPS61166748U
JPS61166748U JP1985049670U JP4967085U JPS61166748U JP S61166748 U JPS61166748 U JP S61166748U JP 1985049670 U JP1985049670 U JP 1985049670U JP 4967085 U JP4967085 U JP 4967085U JP S61166748 U JPS61166748 U JP S61166748U
Authority
JP
Japan
Prior art keywords
polishing
polishing plate
cylindrical wall
polishing device
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985049670U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985049670U priority Critical patent/JPS61166748U/ja
Publication of JPS61166748U publication Critical patent/JPS61166748U/ja
Pending legal-status Critical Current

Links

JP1985049670U 1985-04-03 1985-04-03 Pending JPS61166748U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985049670U JPS61166748U (US20110009641A1-20110113-C00185.png) 1985-04-03 1985-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985049670U JPS61166748U (US20110009641A1-20110113-C00185.png) 1985-04-03 1985-04-03

Publications (1)

Publication Number Publication Date
JPS61166748U true JPS61166748U (US20110009641A1-20110113-C00185.png) 1986-10-16

Family

ID=30567079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985049670U Pending JPS61166748U (US20110009641A1-20110113-C00185.png) 1985-04-03 1985-04-03

Country Status (1)

Country Link
JP (1) JPS61166748U (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106312795A (zh) * 2015-07-01 2017-01-11 不二越机械工业株式会社 研磨装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106312795A (zh) * 2015-07-01 2017-01-11 不二越机械工业株式会社 研磨装置
JP2017013183A (ja) * 2015-07-01 2017-01-19 不二越機械工業株式会社 研磨装置

Similar Documents

Publication Publication Date Title
JPS6218853U (US20110009641A1-20110113-C00185.png)
JPS61166748U (US20110009641A1-20110113-C00185.png)
JPS6150652U (US20110009641A1-20110113-C00185.png)
JPS6016538U (ja) 半導体ウエハの片面処理装置
JPS6397454U (US20110009641A1-20110113-C00185.png)
JPH02132941U (US20110009641A1-20110113-C00185.png)
JPS5979000U (ja) 原子炉容器フランジ面錆除去装置
JPS6183032U (US20110009641A1-20110113-C00185.png)
JPS62178371U (US20110009641A1-20110113-C00185.png)
JPS6228432U (US20110009641A1-20110113-C00185.png)
JPS60134542U (ja) 刃物研磨機の防水装置
JPH0314156U (US20110009641A1-20110113-C00185.png)
JPS63170464U (US20110009641A1-20110113-C00185.png)
JPH042557U (US20110009641A1-20110113-C00185.png)
JPS63176059U (US20110009641A1-20110113-C00185.png)
JPH0215864U (US20110009641A1-20110113-C00185.png)
JPS61166747U (US20110009641A1-20110113-C00185.png)
JPS6383253U (US20110009641A1-20110113-C00185.png)
JPS6190243U (US20110009641A1-20110113-C00185.png)
JPS63149052U (US20110009641A1-20110113-C00185.png)
JPS62100848U (US20110009641A1-20110113-C00185.png)
JPS6394657U (US20110009641A1-20110113-C00185.png)
JPS6082461U (ja) 真空蒸着装置における基板ホルダ−
JPS58114042U (ja) シリコンウエハ−の洗浄装置
JPS6150631U (US20110009641A1-20110113-C00185.png)