JPS61165847A - Photomagnetic recording medium - Google Patents

Photomagnetic recording medium

Info

Publication number
JPS61165847A
JPS61165847A JP616385A JP616385A JPS61165847A JP S61165847 A JPS61165847 A JP S61165847A JP 616385 A JP616385 A JP 616385A JP 616385 A JP616385 A JP 616385A JP S61165847 A JPS61165847 A JP S61165847A
Authority
JP
Japan
Prior art keywords
rare earth
recording medium
earth metals
kinds
compsn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP616385A
Other languages
Japanese (ja)
Other versions
JP2619623B2 (en
Inventor
Shin Funada
舩田 伸
Tatsuya Shimoda
達也 下田
Satoshi Shimokawado
下川渡 聡
Mamoru Sugimoto
守 杉本
Akira Aoyama
明 青山
Satoshi Nehashi
聡 根橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP60006163A priority Critical patent/JP2619623B2/en
Publication of JPS61165847A publication Critical patent/JPS61165847A/en
Priority to US07/193,020 priority patent/US5100741A/en
Priority to US08/231,866 priority patent/US5529854A/en
Application granted granted Critical
Publication of JP2619623B2 publication Critical patent/JP2619623B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To make possible the manufacture of an alloy target necessary for manufacturing a film having a uniform compsn. by constituting the target of respectively >=1 kinds among light rare earth metals Sm, Nd, Pr, Ce and heavy rare earth metals Tb, Gd, Dy as well as transition metals Fe, Co, Ni. CONSTITUTION:This photomagnetic recording medium consists of >=1 kinds among the light rare earth metals Sm, Nd, Pr, Ce, >=1 kinds among the transition metals Fe, Ni, Co and >=1 kinds among the heavy rare earth metals Tb, Gd, Dy and is limited by 0<x<=0.5, 0.1<=y<=0.4 when the compsn. formula is expressed by {(Sm, Nd, Pr, Ce)1-x(Tb, Gd, Dy)x}y(Fe, Co, Ni)1-y. The alloy target can be easily manufactured of such compsn. and the characteristics equal to the characteristics of the photomagnetic recording medium used heretofore are obtainable. The Tb which is costly owing to the scarecity of resources can be replaced with the amply available hence inexpensive Nd and therefore htis recording medium is manufacturable without the run-out of the material which may arise in future if the use of Tb is continued.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光磁気記録媒体に関するもので、スパッタリン
グ等によりガラスあるいはプラスティック等の基層上に
作製した薄膜であり、−面に対して垂直な磁気異方性を
有し、レーザー等の加熱により反転磁区を作り情報を記
録することができ。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magneto-optical recording medium, which is a thin film made on a base layer of glass or plastic by sputtering etc. It has anisotropy and can record information by creating reversed magnetic domains by heating with a laser or other device.

記録した反転磁区をカー効果、ファラデー効果にLす反
射または透過レーザー光の偏光面の回転で読み出すこと
ができる光磁気記録媒体に関する。
The present invention relates to a magneto-optical recording medium in which recorded reversed magnetic domains can be read out by rotating the plane of polarization of reflected or transmitted laser light using the Kerr effect or Faraday effect.

〔従来の技術〕[Conventional technology]

従来の光磁気記録媒体は例えば、特開昭57−9494
8のLうに重希土類金属Tb、Gd、Dyのうち1種類
以上おLびFeまたは00のうち1種類以上で構成され
た非轟質薄−からなる。
Conventional magneto-optical recording media include, for example, Japanese Patent Application Laid-Open No. 57-9494.
8.L consists of a non-destructive thin film composed of one or more of the heavy rare earth metals Tb, Gd, and Dy and one or more of Fe or 00.

垂直磁化−を得るための条件は公知のLうにKuラン2
π と書きあられされる。但しKuは磁気異方性エネルギー
(erg/c+++りである。スパッタリングに工り作
製された重希土類金属−鉄系お工ひ重希土類金属ーコバ
ルト系合金は非晶質である。また、結晶質と同様にフェ
リ磁性体となるため、鐘も残留磁化が小さくなり、保磁
力が最も大きくなる組成、補償組成に近い組成からなる
薄膜を光磁気記録媒体として用いてきた。
The conditions for obtaining perpendicular magnetization are the well-known LuniKu run 2.
It is written as π. However, Ku is the magnetic anisotropy energy (erg/c+++).The heavy rare earth metal-cobalt alloy produced by sputtering is amorphous. Similarly, because it becomes a ferrimagnetic material, thin films with a composition close to the compensation composition, which has a small residual magnetization and the highest coercive force, have been used as magneto-optical recording media.

〔発明が解決し・工つとする問題点〕[Problems that the invention attempts to solve]

しかし、光磁気記録媒体として用いられるTb。 However, Tb is used as a magneto-optical recording medium.

Gd、Dyは公知の工うに補償組成付近で遷移金属と金
属間化合物を作りやすぐ、それらを熔融し鋳造しただけ
では割れやすいという欠点があり、合金ターゲットを作
製するには特殊な技術が必要である。従って、スパッタ
リングに工り薄膜を作製するには複合ターゲットが用い
られている。複合ターゲツト法では ■ 薄膜の組成制御が困難である。
Gd and Dy have the drawback that they are easily broken if the transition metal and intermetallic compound are created in the vicinity of the compensation composition using the known method, and then they are simply melted and cast, and special technology is required to create the alloy target. It is. Therefore, composite targets are used to fabricate thin films by sputtering. In the composite target method, ■ It is difficult to control the composition of the thin film.

■ 均一な組成の4111を得るためには、ベレットの
配置をくふうするなど、煩雑な手続きが必要である。 
   ′ という欠点を有する。特に上記0項は、4嗅組成の不均
一が再生時のノイズの原因となるため、光磁気記録媒体
のO/N向上のためには克服しなければならない重大な
欠陥である。
■ In order to obtain 4111 with a uniform composition, complicated procedures such as adjusting the arrangement of pellets are required.
′. In particular, the above-mentioned 0 term is a serious defect that must be overcome in order to improve the O/N of the magneto-optical recording medium, since the non-uniformity of the four-olfactory composition causes noise during reproduction.

そこで、本発明はこの工うな問題点を解決するもので、
その目的とするところは均一な組成の膜を作製するため
に必要な合金ターゲットの作製を可能にし、資源的に僅
少な重希土類金属を豊富な軽希土類金属で置換すること
により従来のものと比べ安価で高性能な光磁気記録媒体
を提供することにある。
Therefore, the present invention aims to solve this difficult problem.
The purpose is to make it possible to create the alloy target necessary to create a film with a uniform composition, and to replace the heavy rare earth metals, which are scarce in terms of resources, with the abundant light rare earth metals, compared to conventional ones. The objective is to provide an inexpensive and high-performance magneto-optical recording medium.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の光磁気記録媒体は軽希土頌金[8m。 The magneto-optical recording medium of the present invention is made of light rare earth alloy [8m.

Nd、Pr、Oe(以下% LFIと工ぶ。)お裏び重
希土類金属Tb、Gd、Dy(以下、BRと工ぶ。)お
よび遷移金属IPe、Co、Ni(以下、TMと工ぶ、
)それぞれ−fa@以上からなる。組成式を(LRI 
−X HRx ) 7 T M I −yとしたとき本
発明では”17は0 (x≦(L5゜(Ll≦y≦cL
4である。Xはより好ましぐは、α2≦X<α5最も好
ましくは155≦X≦15である。またy#i工す好ま
しくはrl、2≦y≦14最も好ましくFia、zo≦
y(L155である。
Nd, Pr, Oe (hereinafter referred to as %LFI), heavy rare earth metals Tb, Gd, Dy (hereinafter referred to as BR) and transition metals IPe, Co, Ni (hereinafter referred to as TM).
) each consists of -fa@ or more. The composition formula is (LRI
-X HRx ) 7 T M I -y In the present invention, 17 is 0 (x≦(L5゜(Ll≦y≦cL
It is 4. More preferably, X satisfies α2≦X<α5, most preferably 155≦X≦15. Also, y#i is preferably rl, 2≦y≦14, most preferably Fia, zo≦
y(L155.

〔実施例〕〔Example〕

実施例にニジ、本発明の効果について述べる。 The effects of the present invention will be described in Examples.

本実捲例で示す薄膜はすべてスパッタリングにより作製
した。スパッタリング条件は初期真空度5XlO’″”
 TOrr以下、アルゴン圧5 m Torr 、+基
板バイアス電圧Ovである。
All the thin films shown in this actual winding example were produced by sputtering. Sputtering conditions are initial vacuum level 5XlO'''
TOrr or less, argon pressure 5 mTorr, +substrate bias voltage Ov.

第1図に(Nd、−xDyx)yFe、−7のカー回転
角(以下θにと呼ぶ)の組成依存性を示す。カー回転角
はでθの組成ではtf決まプ、Dyの竜を変化させても
変わらず18分程度となる。この値は従来用いられてい
るTb、Feと同程度である。
FIG. 1 shows the composition dependence of the Kerr rotation angle (hereinafter referred to as θ) of (Nd, -xDyx)yFe, -7. The Kerr rotation angle is fixed at tf depending on the composition of θ, and remains unchanged at about 18 minutes even if the dragon of Dy is changed. This value is comparable to that of conventionally used Tb and Fe.

第2図に(N d+−XD7X )o、tm l’el
ljl (N (11−xOdX )a、nF15e、
y* + (N (1+ −XT ”X )a、* F
’96.TI  の保磁力(以下、Hcと工ぶ)のNd
K対する重希土類金属の置換量依存性を示す。最もEc
の増大効果が大きいのはTbである。第1因と第2図か
られかるL5に、Hcが最大となる組成に訃いてakは
減少しない。
In Figure 2, (N d+-XD7X )o, tm l'el
ljl (N (11-xOdX)a, nF15e,
y* + (N (1+ −XT ”X )a, *F
'96. Nd of coercive force (hereinafter referred to as Hc) of TI
The dependence of K on the amount of heavy rare earth metal substitution is shown. Most Ec
Tb has a large effect of increasing . At L5, which is determined from the first factor and FIG. 2, ak does not decrease due to the composition in which Hc becomes maximum.

Haは記録ビットの安定性IC,6には記録ビットの読
み出し特性に密接に関係している。従って、RFI置換
により)lcを増大できかつ、akを下げないというこ
とは、安定な記録ビットを得るうえで有利匁ことである
Ha is closely related to the stability IC of the recorded bits, and 6 is closely related to the read characteristics of the recorded bits. Therefore, being able to increase lc (by RFI replacement) without lowering ak is advantageous in obtaining stable recording bits.

W、1図に示したように、akが従来から用いられてき
たTt)、Feと同程度である。さらにθにの向上をは
かるため、Fe f Co 、 Niで置換した例−(
N (io、a T 1)oa )o、ta (Fe6
,1.−ycOyNi6.、 )o、tlのθにのFe
に対するCO置換量依存性を第5図に示す。θにはy=
15のとき最大値22分を示す。akが大きいとして知
られているGdFeと同程度にまでひきあげることがで
きた。なお、F+5t−Ni、Co で置換したことに
よるHaの変化はみられていない。公知の工うに記録・
再生時のC/NはRを反射率としたとき、/TTTに比
例するため、θにの向上にLす。
As shown in Figure 1, W and ak are comparable to the conventionally used Tt) and Fe. In order to further improve θ, an example in which Fe f Co and Ni were substituted - (
N (io, a T 1) oa ) o, ta (Fe6
,1. -ycOyNi6. , ) Fe at θ of o, tl
Figure 5 shows the dependence of CO on the amount of CO substitution. y= for θ
When it is 15, the maximum value is 22 minutes. It was possible to raise the ak to the same level as GdFe, which is known to have a high ak. Note that no change in Ha was observed due to substitution with F+5t-Ni, Co. Records of known sea urchins
Since the C/N during reproduction is proportional to /TTT when R is the reflectance, it is L for improving θ.

再生時のC/ Nは向上している。C/N during playback has improved.

第4図にNdt?Sm、Co、Prなどの軽希土類金属
で置換した((Ndt −X LRx)6,11 IJ
71L4 )6.tl”elL?Bの0kを示す。(但
し、LR=Sm、Oe、Prである。)8m置換にエリ
θには最も向上し、仄いでC1、Prの順となっている
。いずれもakが最大となるのはX=105のときであ
る。
Ndt in Figure 4? ((Ndt-X LRx)6,11 IJ substituted with light rare earth metals such as Sm, Co, and Pr
71L4)6. tl"elL?B shows 0k. (However, LR=Sm, Oe, Pr.) 8m substitution shows the greatest improvement in Eri θ, followed by C1 and Pr. Both are ak is maximum when X=105.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明にLれば、台金ターゲ・ソトを
容易に作製できる組成で従来用いられてきた光磁気記録
媒体と同等の特性を出すことができる。さらに、try
的に僅少なため高価7ThTbを豊富なため安価なNd
で置換することもできるため。
As described above, according to the present invention, it is possible to obtain properties equivalent to those of conventionally used magneto-optical recording media with a composition that allows easy production of base metal targets and substrates. Furthermore, try
7ThTb, which is expensive due to its scarcity, and Nd, which is inexpensive due to its abundance.
Because it can also be replaced with .

Tt)を使い続ければ将来起こるであろう材料の枯渇か
らも逃れることができるという効果を有する。
If Tt) is continued to be used, it has the effect of avoiding material depletion that may occur in the future.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(Nd+ −2CD7X)o、ts Flil(
L?Iのカー回転角のXX存性を示す図。 第2図(”+ −”D7” )o、ts Fea、n+
 (N”+ −xG” )o、ts ”a、ta +(
N (11−xT bX )。、1a F e(1,7
1の保磁力のX依存性を示す図。 第5図(Ndo、a T bo、* )n、ta (F
ee、o−yC!gyN t(1,1)o、ysのカー
回転角のy依存性を示す図。 里A 1’;4 ((Nd、 −xLRx)6.6 I
J7o41.、、、 Fe、、、、のカー回転角のy依
存性を示す図(LR=8m 、 Pr 、 Oe )以
   上
Figure 1 (Nd+ -2CD7X)o, ts Flil(
L? The figure which shows the XX existence of the Kerr rotation angle of I. Figure 2 ("+ -"D7") o, ts Fea, n+
(N"+ -xG") o, ts "a, ta + (
N (11-xTbX). , 1a F e(1,7
1 is a diagram showing the X dependence of coercive force of No. 1. Figure 5 (Ndo, a T bo, *) n, ta (F
ee, o-yC! A diagram showing the y dependence of the Kerr rotation angle of gyN t (1, 1) o, ys. SatoA 1';4 ((Nd, -xLRx)6.6 I
J7o41. , , The diagram showing the y dependence of the Kerr rotation angle of Fe, , (LR = 8m, Pr, Oe)

Claims (1)

【特許請求の範囲】 軽希土類金属Sm、Nd、Pr、Ceのうち1種類以上
、遷移金属Fe、Ni、Coのうち1種類以上および重
希土類金属Tb、Gd、Dyのうち1種類以上からなり
、組成式を {(Sm、Nd、Pr、Ce)_1_−_x(Tb、G
d、Dy)_x}_y(Fe、Co、Ni)_1_−_
yと表わしたとき 0<x≦0.5 0.1≦y≦0.4 で限定されることを特徴とする光磁気記録媒体。
[Scope of Claims] Consists of one or more of the light rare earth metals Sm, Nd, Pr, and Ce, one or more of the transition metals Fe, Ni, and Co, and one or more of the heavy rare earth metals Tb, Gd, and Dy. , the composition formula is {(Sm, Nd, Pr, Ce)_1_-_x(Tb, G
d, Dy)_x}_y(Fe, Co, Ni)_1_-_
A magneto-optical recording medium characterized in that, when expressed as y, the following conditions apply: 0<x≦0.5, 0.1≦y≦0.4.
JP60006163A 1984-09-12 1985-01-17 Magneto-optical recording medium Expired - Lifetime JP2619623B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60006163A JP2619623B2 (en) 1985-01-17 1985-01-17 Magneto-optical recording medium
US07/193,020 US5100741A (en) 1984-09-12 1988-05-12 Magneto-optic recording systems
US08/231,866 US5529854A (en) 1984-09-12 1994-04-25 Magneto-optic recording systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60006163A JP2619623B2 (en) 1985-01-17 1985-01-17 Magneto-optical recording medium

Publications (2)

Publication Number Publication Date
JPS61165847A true JPS61165847A (en) 1986-07-26
JP2619623B2 JP2619623B2 (en) 1997-06-11

Family

ID=11630858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60006163A Expired - Lifetime JP2619623B2 (en) 1984-09-12 1985-01-17 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JP2619623B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267950A (en) * 1986-05-16 1987-11-20 Sumitomo Electric Ind Ltd Magneto-optical recording medium
WO1988001425A1 (en) * 1986-08-22 1988-02-25 Mitsui Petrochemical Industries, Ltd. Optomagnetic recording medium and process for its manufacture
JPS63164049A (en) * 1986-08-22 1988-07-07 Mitsui Petrochem Ind Ltd Magneto-optical recording medium and its production
JPS63164050A (en) * 1986-08-22 1988-07-07 Mitsui Petrochem Ind Ltd Magneto-optical recording medium and its production
JPS63173249A (en) * 1987-01-13 1988-07-16 Daicel Chem Ind Ltd Magneto-optical recording medium
US5449566A (en) * 1992-09-09 1995-09-12 Mitsubishi Denki Kabushiki Kaisha Overwritable, high-density magneto-optical recording medium and recording/reproduction method therefor
EP1061511A3 (en) * 1999-06-15 2002-02-06 Sharp Kabushiki Kaisha Magnetooptical recording alloy

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178641A (en) * 1983-03-29 1984-10-09 Kokusai Denshin Denwa Co Ltd <Kdd> Photomagnetic recording medium
JPS6115308A (en) * 1984-07-02 1986-01-23 Hitachi Ltd Photomagnetic recording material
JPS6134744A (en) * 1984-07-25 1986-02-19 Hitachi Ltd Photoelectromagnetic recording medium

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178641A (en) * 1983-03-29 1984-10-09 Kokusai Denshin Denwa Co Ltd <Kdd> Photomagnetic recording medium
JPS6115308A (en) * 1984-07-02 1986-01-23 Hitachi Ltd Photomagnetic recording material
JPS6134744A (en) * 1984-07-25 1986-02-19 Hitachi Ltd Photoelectromagnetic recording medium

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267950A (en) * 1986-05-16 1987-11-20 Sumitomo Electric Ind Ltd Magneto-optical recording medium
WO1988001425A1 (en) * 1986-08-22 1988-02-25 Mitsui Petrochemical Industries, Ltd. Optomagnetic recording medium and process for its manufacture
JPS63164049A (en) * 1986-08-22 1988-07-07 Mitsui Petrochem Ind Ltd Magneto-optical recording medium and its production
JPS63164050A (en) * 1986-08-22 1988-07-07 Mitsui Petrochem Ind Ltd Magneto-optical recording medium and its production
US5053287A (en) * 1986-08-22 1991-10-01 Mitsui Petrochemical Industries, Ltd. Magnetooptical recording media and processes for production thereof
JPS63173249A (en) * 1987-01-13 1988-07-16 Daicel Chem Ind Ltd Magneto-optical recording medium
US5449566A (en) * 1992-09-09 1995-09-12 Mitsubishi Denki Kabushiki Kaisha Overwritable, high-density magneto-optical recording medium and recording/reproduction method therefor
US5764600A (en) * 1992-09-09 1998-06-09 Mitsubishi Denki Kabushiki Kaisha Overwritable, high-density magneto-optical recording medium and recording/reproduction method therefor
EP1061511A3 (en) * 1999-06-15 2002-02-06 Sharp Kabushiki Kaisha Magnetooptical recording alloy

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