JPS61164685A - 超音波振動子用振動板 - Google Patents

超音波振動子用振動板

Info

Publication number
JPS61164685A
JPS61164685A JP330885A JP330885A JPS61164685A JP S61164685 A JPS61164685 A JP S61164685A JP 330885 A JP330885 A JP 330885A JP 330885 A JP330885 A JP 330885A JP S61164685 A JPS61164685 A JP S61164685A
Authority
JP
Japan
Prior art keywords
ultrasonic
erosion
diaphragm
vibrator
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP330885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057070B2 (OSRAM
Inventor
元 柴田
北島 洋一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marine Instr Co Ltd
Original Assignee
Marine Instr Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marine Instr Co Ltd filed Critical Marine Instr Co Ltd
Priority to JP330885A priority Critical patent/JPS61164685A/ja
Publication of JPS61164685A publication Critical patent/JPS61164685A/ja
Publication of JPH057070B2 publication Critical patent/JPH057070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP330885A 1985-01-14 1985-01-14 超音波振動子用振動板 Granted JPS61164685A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP330885A JPS61164685A (ja) 1985-01-14 1985-01-14 超音波振動子用振動板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP330885A JPS61164685A (ja) 1985-01-14 1985-01-14 超音波振動子用振動板

Publications (2)

Publication Number Publication Date
JPS61164685A true JPS61164685A (ja) 1986-07-25
JPH057070B2 JPH057070B2 (OSRAM) 1993-01-28

Family

ID=11553724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP330885A Granted JPS61164685A (ja) 1985-01-14 1985-01-14 超音波振動子用振動板

Country Status (1)

Country Link
JP (1) JPS61164685A (OSRAM)

Also Published As

Publication number Publication date
JPH057070B2 (OSRAM) 1993-01-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term