200900167 九、發明說明： 【發明所屬之技術領域】 等之子部件上附著之微細塵埃(顆粒) 、二曰η尤’、疋關於一種利用900 KHz以上之超音 波振動的超音波洗淨裝置及超音波洗淨方法。 【先前技術】 雄ίΐ： ί 製造聽巾，作為絲料體晶圓、硬 部件上附著之微細粉塵、灰鮮㈣的機構， ㈣有超音波振崎作為被洗物之電子部件表面進行清 各種超音波洗淨裝置。 作為超音波洗淨裝置之—例，麟了洗賴㈣槽及配置於 外槽内之内槽構成的2槽結構裝置。該裝置使用金屬洗淨槽時， 為防止溶離_金祕子_於被洗物上，設置了由石英玻璃等 製作之内槽，及由獨鋼等金屬㈣或樹脂材料㈣作且安裝 振動板之外槽。'^ 又，於外槽儲存有媒介液，用以將藉由驅動超音波換能器而 ( 產生之超音波振動傳輸至浸潰於内槽中所儲存之洗淨液的被洗構 件。内槽以其底板浸於媒介液之狀態配置於外槽内。此種結構之 超音波洗淨裝置利用特定信號使振動板產生振動，並使用所產生 之超音波振動，對浸潰於内槽内洗淨液中之被洗物進行清洗。 專利文獻1揭示了一種超音波振動板，該超音波振動板之板 厚形成為共振頻率大致1/2波長之整數倍，從而實現高頻超音波振 動之音響損失亦較少。 於具有内槽與外槽之2槽機構，内槽底板與外槽底板平行配 置之超音波洗淨裝置中，為將自超音波換能器照射之超音波有效 傳輸至被洗構件，與專利文獻1之超音波振動板一樣，内槽底板 5 200900167 之板厚形成為超音波振動頻率1/2波長的整數倍。即，將超音波振 動頻率之波長設為;I，整數設為n，則内槽底板之板厚t為： t=nxA/2 · · ·式⑴。 另外’整數η採用1或2較小之整數。其原因在於，n若為3 以上，則内槽底板之板厚變厚，内槽自身内部的超音波振動減弱， 從而導致洗淨效率變差。 例如，内槽使用石英玻璃時，通常使用板厚如下之内槽：石 英玻璃之音速約為6000 m/s，當超音波振動頻率為75〇 ωζ時， 波長；I為8 mm，若η=ι，則根據式（1)可得内槽底板之板厚（ 為4 mm;當超音波振動頻率為9〇〇 KHz、n= i時，板厚丨為3 3血^。 立又，使用2槽結構之洗淨裝置時，傳播於外槽媒介液中之超 二波振動致使媒介液中產生氣泡時，該氣泡會附著於内槽底面， ‘致發生超音波難以在内槽内傳播的現象。因此，專利文獻2、專 利文獻3揭示了如下超音波洗淨裝置，卩卩，使_底面相對於安 裝有超音波換能器之外槽底面傾斜，使附著於⑽ 著傾斜方向上升，從而可纽地絲氣泡。 — 【專利文獻1】日本專利實公昭62—164979號公報 【專利文獻2】曰本專利特開平3 一222419號公報 【專利文獻3】曰本專利特開平9一47733號公報 [發明所欲解決之問題] 近年來’隨著被洗物之微細化，需要超音波之高頻化。） =作為被洗物之晶圓日益大口徑化，洗淨槽之内槽亦變大 具有^夠之機械強度。然而，隨著超音波之高頻化，戸 若^必須進—步_。例如，假缺音波振動頻率為2 ΜΗ 夕^石英玻璃製内槽，當η為1時，根據式⑴可得内槽 板厚t為1.5mm，當時，板厚tJ^3rnm，因此， 200900167 製ie及内槽強度等女全方面存在問題。又，隨著被洗物之大型化， 需要增大内槽之板厚以確保内槽機械強度。 又，如專利文獻2、專利文獻3所揭示，使内槽底面相對於安 裝有超音波換能ϋ之外槽底面傾斜，以此緩解⑽底面之氣泡引 發的傳輸問題及為實現與超音波振動共振而對板厚的限制。然 而，右以内槽底面與外槽底面所成之傾斜角在20。以上之方式使内 槽底面傾斜，則必須加深内槽深度以使被洗物沒人洗淨液中，從 而存在必須增大整個洗淨裝置之問題。 又，由於外槽底板與内槽底板之位置騎、、内槽底板之板厚 =差、底板形狀、換能ϋ振動特性之不均或換能器之安裝精度， 内槽内部分區域產生音壓不均。其結果為，洗淨製程 因此’本發明之發明者通過實驗發現，在超音波振動頻率為2 率Γί 要厚度，且不會降低超音波洗淨之效 2批目的在於提供—魏音波洗較置 確伴先"'般伴隨超音波之高頻化而減薄内槽底板板Ϊ Ϊ 槽内的音壓，並支持超音波之高頻化。 動胡題’本發明之超音波洗料置係_超音波振 淨的超音波洗淨裝置，其特徵在於， :曰/ X之超曰波振動產生機構及 由上述傳輪媒介而置部’利用經 淨液内的上述被洗物進行皮f動對幻貝於内部所儲存之洗 進冼乎，上述内槽底板之板厚為超音波振 200900167 動頻率的2分之1波長（本味具、 配置，以使上述内槽底板與上述;卜槽^反不倍平^述内槽底板傾斜 頻率^90^==裝置之特徵在於，上述超音波振動 上述内槽底板板 傾斜Ϊ度置之特徵在於，上述内槽底板之 作為蝴槽底板以 行洗淨的超音波洗先用超音波振動對被洗物進 超音波振紐賴構及包含卜^ # ’具備產生超音波振動之 介而傳輸之超音波振動，對浸部，利用經由上述傳輸媒 被洗物進行洗淨；上述 、稍鮮之洗絲⑽上述 之】波長（半波長）超音波振動頻率的2分 述内槽底板與上述外槽底板不°平行迷内槽底板傾斜配置，以使上 頻率音波洗淨方法之特徵在於，上述超音波振動 厚為超音波振動頻’上述内槽底板板 傾^度之特^°，上述内槽椒 又’本㈣之超音錢淨枝之特徵在於，上勒槽底板以 200900167 作為超音波振動之次級音源發揮作用之方式構成。 [發明效果] 根據本發明祕，⑽底板之板料超妓振_率的2分 ,1波長（半波長）之整數倍’内槽底板傾斜配置以使内槽底板 ”外槽底板不平行，㈣槽底板可為具有足_械強度之板厚。 又，根據本發明所述，可以使用於9〇〇 KHz以上之超音波振 中’亦可使用於2 MHz之頻率中，故可伴隨被洗物之微細 化而實現超音波之高頻化。 、又’根據本發明所述’内槽底板之傾斜角度為i。以上、1〇。 以内，不需要如先前之傾斜角度，故被洗物不受内槽傾斜的影塑。 祕2根據本發日猶^ 底板料超音波鶴之次級切、 =作用’故藉由駐波引發之超音波魏及作為次級音源之内槽 ^板的超音波鋪，可抑制音叙降低，提錢淨效率良好 曰波洗淨裝置及超音波洗淨方法。 【實施方式】 =二參關式’制本㈣之超音波洗淨裝置的實施形態。 LI 4她1之超音波洗淨裝置正面所視之剖面圖。圖2 超音波洗較置㈣對於㈣餘之板厚測定内 曰内曰壓之結果關，Κ 3絲示哺雜與 =對於内槽底板之板厚測_之結果的圖，卜槽== 設置，底板板厚為共振頻率 之= 音波透射狀態的說明圖，圖5係内槽以： 之情形的模賴。 H心重反射 轉置1如圖1所示’係具備内槽3 構。崎3 _於洗淨被洗物讀， ^開口且具相斜之底板3a。内槽3之内部儲存有用 9 200900167 被洗物w之洗淨液。 另外，向後述外槽5内之純水等施加超音波振動時，於 純水等中之氣體成分會變為氣泡而顯現，氣泡有 ^ 之底板3a上。氣泡附著後，超音波便難以在内槽3内=於^^ 使该底板3a傾斜，便可有效地去除附著於底板如上之氣泡。 ^槽5係將來自超音波振動產生機構之超音波振_接傳輸 作的間接槽。外槽5上端開口，其内部儲存純水、藥液等 媒介。外槽底板上聯結有用於產生超音波振動之超音 波振動產生機構。另外，外槽底板5&為大致 ;反二，平方向以特定角度⑷所示之㈧二而= 之底板3a配置成與外槽底板5a形成角度0。另外日 板3a與外槽底板化所成角度g被設置為丨。以上、1〇。以二。- 超音波振誠生親具_定於㈣紐5 振動板7之換能器9，以及向換應 振盡器11销器U具有域部13與 。力率放大益IS。振蘯部^生成具有特定頻率之高頻信夢 唬經功率放大器15放大，並輸入至換能器9。 ； 外槽5之材料可使用不_或歸等，内槽材料可使用且 =熱性及抗藥劑性之石英玻璃、藍寶石 等 =液，過氧化氯，、純水、包含過氧化氣-鹽=、 ^。虱-裇·純水等。振動板之材料可使用sus m鶴 本發明之超音波洗雜置丨之内槽3朗石英麵，内槽底 斜配置以使⑽底板3a鱗槽5之底板砰行。又，内 口又本發明之超音波洗淨裝置1以90Θ KHz以 10 200900167 上之超音波振動頻率進行洗淨。 於包含上述結構之超音波洗淨裝置i m㈣内儲存液 體，對距_槽3之開，特定深度處之音麵度進行了測定。 f定音壓強度時，使用2 MHz超音波振動辭，於⑽底板如 目對於外槽底板5a傾斜的肢設置為2。之狀態下，分麟内样底 板3已之3111111、4.51111]1、6111111三種板厚，測定了音壓強度。_ 、另外’哺底板3a之板厚被設置為超音波振賴率的2分之 (1波長（半波長）之整數倍’整數n為2、3、4。2臟2超音波振 =頻率之石央玻璃的波長；^ 3 _，η = 2時内槽底板如之板厚 、' mm n 3日守内槽底板3a之板厚為4.5 mm，n=4時内槽底板 3a之板厚為6 mm。 "" 圖2表示於上述條件下，對哺底板％之板厚測定内槽3内 之音壓強度的結果。另外，圖2之圖表縱軸所示相對音壓，係以 内槽底板3a之板厚為3 mm時音壓傳感器測得之音壓值為卜以 内樽底板3a之板厚為3 mm時的音壓值為基準值，依據板厚為* $ mm、6 mm時之音壓值與基準值之比率表示其音壓值者。 I 如圖2所示，與超音波振動頻率2 MHz、内槽底板如之板厚 ^mm%·的音壓強度相比，板厚為4 5麵時之音壓強度增加為 反旱3 mm者的I.4倍，板厚為6jnm時之音壓強度增加為板厚3 mm者的1.43倍。由此可知’對内槽底板3a之板厚依次增加相當 於超音波鶴醉半波長之厚鱗，音壓強度隨之增加。 繼而，為研究内槽底板3a才目對於外槽底板5a傾斜設置時對 内槽3之音壓所造成的影響，而對内槽底板知與外槽底板&平 行設置時之音壓強度進行了測定。另外，測定音壓時，與圖2所 不底板板n形成為超音波脑解的1/2波長之整數倍。 圖3表不内槽底板3a與外槽底板5a平行設置時對内槽底板 11 200900167 3a之板厚測定音壓的結果。另外，圖3之圖表縱軸所示相對音壓， 係以内槽底板3a之板厚為3 mm時音壓傳感器測得之音壓值為 1，以内槽底板3a之板厚為3 mm時的音壓值為基準值，依據板厚 為4.5 mm、6 mm時之音壓值與基準值之比率表示其音壓值者。 、如圖3所示，與超音波振動頻率2MHz、内槽底板％之板厚 為3 mm時的音壓強度相比，板厚為4.5mm時之音壓強度減少為 板厚3 mm者的0.88倍’板厚為6 mm時之音壓強度減少為板厚3 mm者的0.88倍。 如此，内槽底板3a與外槽底板5a平行設置時，隨著内槽底 板3a之板厚加厚，音壓減少，與圖2所示之測定資料相異。 圖4係内槽底板3a與外槽底板5a平行設置，底板板厚為共 振頻率的1/2波長之2倍時超音波透射狀態的說明圖。 /、 如圖4所示，當輸入至換能器9之超音波振動經由振動板7， 施加至作為傳輸媒介之純水等時，内槽3之底板如與換能器9之 間形成駐波。另外’駐波絲自鶴板7之人射波與反射波疊加 而形成的音波，所述反射波係入射波於外槽5内之傳輸媒介中傳 播，到達内槽3之底板3a後反射而形成者。自内槽底板3a之下 表面向其照射超音波時，内槽底板3a内部會產生駐波，藉此，如 圖4之前頭所示，超音波向洗淨槽之内槽3透射（駐波引發的超 音波透射現象）。 ° 如此，内槽底板3a與外槽底板5a平行時，由超音波換能器 ^生之超音波振動通過外槽5之媒介液，傳輸至内槽底板允，並 藉由駐波引發的超音波透射現象，自内槽底板知被釋放到洗淨液 中。另外’如上所述，η採用1或2較小之整數。其原因在於，n 若為3以上，則内槽底板3a之板厚變厚，内槽3内的超音波振動 減弱。圖3所示之測定結果亦表明了上述原因。另外，如本實施 12 200900167 开%般内槽底板3a與外槽底板5a相互傾斜時，亦會發生駐波引 發的超音波透射現象。 然而，如圖2所不，使内槽底板3a相對於外槽底板％傾斜， 則音壓增加。於内槽底板3a傾斜之狀態下，使内槽底板如之板 厚加厚則音壓增加之理由推斷如下。 圖5係表示内槽底板3a傾斜時超音波多重反射之情形的模式 圖。超音波洗賴巾’為去除聚積於㈣3底部之氣泡，内槽底 板3a相對於安裝有換能器9之外槽底板化傾斜。自内槽底板如 入射之超音波到達⑽底板3a上辦，由於㈣底板3a以角度 Θ傾斜’故如圖5所不，内槽底板3a之崎會發生超音波漫反射。 亚^，内槽底板3a之内部反復發生漫反射後，内槽底板如内部 •^超音波能量上升，其縣為’㈣底板3a變為新振動源，向洗 淨槽内放射超音波。即，⑽練％作為超妓鶴之次級音源 發揮作用。又’内槽底板3a之板厚越厚，則内槽底板％内部越 易，生漫反射’超音波能量進—步上升。但是，若内槽底板如之 板厚過厚，則底板3a重量增加，接近剛體，結果反而會造成反效 果口此’内槽底板3a之板厚較好的是超音波振動頻率的2分之 1波長（半波長）之整數倍，整數至5最佳。 又、，内槽底板3a之板厚設置為超音波振動頻率的2分之i波 長（半波長）之整數倍’亦會發生圖4所示駐波引發的超音波透 射現象。 因此Μ吏上述内槽底板3a之板厚為超音波振動頻率的2分之 波長（半波長）之整數倍，並使内槽底板％傾斜以使上述内槽 2板3a與上述外槽底板5a不平行，則不僅會發生駐波引發的超 曰Ϊί射，同時還會發生如下現象，即由於内槽底板3a内部 σ曰波上升，内槽底板3a作為超音波振動之次級音源發揮 13 200900167 作用之現象，即便使内槽底板3a之板厚加厚，對於僅發生内槽底 板3a與外槽底板5a平行時駐波引發的超音波透射現象之底板， 推斷音壓亦會增加。 如此，將内槽底板3a之板厚設置為超音波振動頻率的2分之 1波長（半波長）之整數倍，並使内槽底板如傾斜配置，則藉由 駐波引發的超音錄動之透射’以及哺底板因其内部發生之漫 反射而作為超音波鷄之次級音源，產生超音波能量，導致内槽3 内之音壓上升。 因此，例如於石英玻璃之洗淨槽内進行超音波振動頻率為2 MHz之超音波振動時，内槽底板3a之板厚依據ηχ入/2且n選擇3 或4，則3x；l/2 = 4.5 mm或4χ；1/2 = 6·0 mm，可獲得足夠之機械 強度。又，超音波振動頻率為2 MHz以上時，例如為3 MHz時， η選擇為4或5。 一根據本發明之超音波洗淨裝置1及超音波洗淨料，無需如 先前般伴隨超音波之高頻化而減薄内槽板厚，可確保洗淨槽内的 音壓，並因應超音波之高頻化。 又，本發明之超音波洗淨裝置丨及超音波洗淨方法利用駐波 引發的超音波it射現象，以及底㈣部超音波能量上升從而使底 板作為超音波振紅次級音源轉侧的贼，即便超音波振動 頻率或内槽底板3a之板厚存在若干偏差，僅駐㈣發的超音波透 射現象會受縣干影響，且又朋了底板這—次級音源 ，故内槽3 内可獲得洗淨所需之超音波音壓。 ,以上所說明之超音波洗淨裝置1於使用2 MHz超音波振動頻 率’内槽底板3a與外槽底板化所成之傾斜角度設置為2。之狀態 下内槽底板3a之板厚為超音波振動頻率的2分之1波長（半波 長）之2、3、4倍的板厚，然本發明之超音波洗淨裝置丨及超音 14 200900167 皮先淨方法可於ΚΉζιχ上之超音波振動頻率中使用，内槽底 板％與外槽底板5a所成之傾斜角度為ν以上、w。以内時有效: 又’内槽底板3a之板厚可為超音波振動頻率之半波長的整數 至5倍。因此’可結合超音波洗淨抑斤用超音波振動頻率、被洗 物之大小，選擇適宜之内槽3的板厚、底板傾斜角度。 如上所述，根據本發明，内槽底板如之板厚為超音波振動頻 ，之2分之1波長（半波長）的紐倍，内槽底板如傾斜配置以 Ϊ内Ϊ底板如與外槽底板&不平行，藉此，内槽底板3a可為具 有足夠機械強度的板厚。 又’根據本發明，可用於_ KHz以上之超音波振動頻率令， 於2廳、3耻之頻率中，故可伴隨被洗物之微細化， 實現超音波之高頻化。 又，根據本發g，内槽底板如作為超音波振動之次級音源發 揮作用’故藉由駐波引發的超料透射以及作為次級音源之内才: 底板3.a的超音波振動，可抑制音壓降低，提供洗 ^ 音波洗淨灯。 之起 於施加超音波振動之同時，自喷嘴向被洗物喷淋狀地 出洗喊之超音时淋洗淨巾，於超音波換能器與洗淨液之間設 置用於儲存媒介液之隔板，使隔板相對於換能器傾斜，如此，本 發明便可適用於超音波噴淋洗淨。另外，隔板板厚為心/2，敫 數η使用3至5。 玉 本發明於不麟其本質雜之前提下可具體化為多種形式。 因此，上述實施形態主要用於說明，並非限制本發明 【圖式簡單說明】 圖1係自實施形態相關之超音波洗淨裝置正面所視之剖面圖。 圖2係表示圖丨所示超音波洗淨裝置中相對於内槽底°板之0板 15 200900167 厚測定内槽内音壓之結果的圖。 圖3係表洲槽敍與賴额平行龍時相雜内槽底板 之板厚測定音壓之結果的圖。 3 _ 圖4係内槽底板與外槽底板平行設置，底板板厚為共振頻率 的1/2波長之2倍時超音波透射狀態的說明圖。 圖5係内槽底板傾斜時超音波多重反射之情形的模式圖。 【主要元件符號說明】 1 超音波洗淨裝置 3 内槽 3a 内槽底板 5 外槽 5a 外槽底板 7 振動阪 9 換能器 11 振盪器 13 振盪部 15 功率放大器 w 被洗物（晶圓） 16200900167 IX. Description of the invention: [Technical field to which the invention pertains] Fine dust (particles) attached to sub-components, etc., 曰 尤 ', 疋 About a ultrasonic cleaning device using ultrasonic vibration of 900 KHz or more and super Sound wave cleaning method. [Prior Art] 雄 ΐ ΐ 听 听 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造 制造Ultrasonic cleaning device. As an example of the ultrasonic cleaning device, there is a two-slot structure device which is formed by a tank (4) groove and an inner groove disposed in the outer tank. When the metal cleaning tank is used in the apparatus, in order to prevent the elution, the inner tank made of quartz glass or the like is provided, and the metal (4) or the resin material (4) such as steel is used and the vibrating plate is installed. Outside the slot. '^ Also, a medium is stored in the outer tank for driving the ultrasonic transducer (the generated ultrasonic vibration is transmitted to the washed member that is immersed in the cleaning liquid stored in the inner tank). The groove is disposed in the outer tank with the bottom plate immersed in the medium. The ultrasonic cleaning device of this structure uses a specific signal to vibrate the vibrating plate, and uses the generated ultrasonic vibration to impregnate the inner groove. The object to be washed is washed in the cleaning liquid. Patent Document 1 discloses an ultrasonic vibration plate having a plate thickness of an integral multiple of a resonance frequency of about 1/2 wavelength, thereby realizing a high-frequency ultrasonic vibration. The loss is also less. In the ultrasonic cleaning device with the inner slot and the outer slot, the inner slot bottom plate and the outer slot bottom plate are arranged in parallel, in order to effectively transmit the ultrasonic wave irradiated from the ultrasonic transducer to the The washing member is the same as the ultrasonic vibration plate of Patent Document 1, and the plate thickness of the inner groove bottom plate 5 200900167 is formed as an integral multiple of the ultrasonic vibration frequency 1/2 wavelength. That is, the wavelength of the ultrasonic vibration frequency is set to be; The integer is set to n Then, the plate thickness t of the inner groove bottom plate is: t=nxA/2 · · · Equation (1). In addition, the integer η is a smaller integer of 1 or 2. The reason is that if n is 3 or more, the plate of the inner groove bottom plate Thickness and thickening, the ultrasonic vibration inside the inner groove is weakened, resulting in poor cleaning efficiency. For example, when quartz glass is used for the inner groove, the inner groove with the following thickness is generally used: the sound velocity of quartz glass is about 6000 m/s. When the ultrasonic vibration frequency is 75〇ωζ, the wavelength; I is 8 mm. If η=ι, the plate thickness of the inner groove bottom plate can be obtained according to formula (1) (4 mm; when the ultrasonic vibration frequency is 9) When 〇〇KHz and n=i, the thickness of the plate is 3 3 blood ^. When the cleaning device of the 2-slot structure is used, the super-two-wave vibration propagated in the outer tank medium causes bubbles to be generated in the medium. The bubble adheres to the bottom surface of the inner groove, and the phenomenon that the ultrasonic wave is hard to propagate in the inner groove is caused. Therefore, Patent Document 2 and Patent Document 3 disclose the following ultrasonic cleaning device, so that the bottom surface is opposite to the bottom surface. The bottom surface of the groove is tilted outside the ultrasonic transducer, so that it adheres to (10) the tilt direction, thereby [Patent Document 1] Japanese Patent Application Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Problems to be Solved by the Invention] In recent years, as the size of the object to be washed is increased, the frequency of the ultrasonic wave is required.) = The wafer as the object to be washed is increasingly larger in diameter, and the groove in the cleaning tank is also changed. The mechanical strength is large enough. However, with the high frequency of the ultrasonic wave, if it is necessary, the vibration frequency is 2 ΜΗ ^ ^ quartz glass inner groove, when η is 1 According to the formula (1), the inner groove thickness t is 1.5 mm. At that time, the plate thickness is tJ^3rnm. Therefore, there are problems in the female and the inner groove strength of the 200900167. Further, as the size of the laundry is increased, it is necessary to increase the thickness of the inner groove to ensure the mechanical strength of the inner groove. Further, as disclosed in Patent Document 2 and Patent Document 3, the bottom surface of the inner groove is inclined with respect to the bottom surface of the groove to which the ultrasonic transducer is mounted, thereby alleviating the transmission problem caused by the bubble of the bottom surface (10) and realizing the vibration with the ultrasonic wave. Resonance limits the thickness of the plate. However, the angle of inclination between the bottom surface of the right inner groove and the bottom surface of the outer groove is 20. In the above manner, if the bottom surface of the inner tank is inclined, the depth of the inner tank must be deepened so that the laundry is not washed in any one of the liquid, and there is a problem that the entire washing apparatus must be enlarged. Moreover, due to the position of the outer groove bottom plate and the inner groove bottom plate, the thickness of the inner groove bottom plate = the difference, the shape of the bottom plate, the vibration characteristics of the transducer, or the installation accuracy of the transducer, the inner portion of the inner groove generates a sound. Uneven pressure. As a result, the cleaning process thus found that the inventors of the present invention found through experiments that the ultrasonic vibration frequency is 2% Γί thickness, and does not reduce the effect of ultrasonic cleaning. The purpose of the two batches is to provide - Wei Yinbo washing It is true that with the high frequency of the ultrasonic wave, the sound pressure in the inner groove plate Ϊ 槽 groove is reduced, and the high frequency of the ultrasonic wave is supported. The ultrasonic washing device of the present invention is characterized in that: 曰/X super chopping vibration generating mechanism and the portion of the transmitting medium by the above-mentioned transmission medium The thickness of the bottom plate of the inner tank is 1/2 wavelength of the dynamic frequency of the ultrasonic wave 200900167 by using the above-mentioned object to be washed in the purified liquid. Having a configuration, such that the inner groove bottom plate and the above-mentioned inner groove are not doubling the inner groove bottom plate tilting frequency ^90^== device is characterized in that the ultrasonic wave vibrates the inner groove bottom plate inclined degree The ultrasonic wave of the bottom plate of the inner groove is washed by the ultrasonic wave, and the ultrasonic wave is applied to the ultrasonic wave and the ultrasonic wave is applied to the object to be washed. The supersonic vibration transmitted is used to wash the immersed portion by the transport medium, and the above-mentioned slightly washed wire (10) has a wavelength (half-wavelength) ultrasonic vibration frequency of 2 points. In parallel with the above-mentioned outer groove bottom plate, the inner groove bottom plate is inclined The method for arranging the upper frequency sound wave is characterized in that the ultrasonic vibration is thicker than the ultrasonic vibration frequency of the above-mentioned inner groove bottom plate, and the inner groove is the same as the ultra-sound money of the present (four) The net branch is characterized in that the bottom plate of the upper groove is configured to function as a secondary sound source of ultrasonic vibration in 200900167. [Effect of the Invention] According to the secret of the present invention, (10) the sheet material of the bottom plate exceeds the vibration rate of 2 points, 1 An integer multiple of the wavelength (half wavelength) 'the inner groove bottom plate is inclined so that the inner groove bottom plate' outer groove bottom plate is not parallel, and the (four) groove bottom plate may have a plate thickness having a sufficient strength. Further, according to the present invention, it can be used In the ultrasonic vibration of 9 kHz or more, it can also be used at a frequency of 2 MHz, so that the frequency of the ultrasonic waves can be increased with the miniaturization of the object to be washed. The inclination angle of the bottom plate of the groove is i. Above, 1〇. Within, the angle of the object is not affected by the inclination of the inner groove. The secret 2 is based on the date of the hair. Secondary cut, = action', so it is triggered by standing wave The ultrasonic wave and the ultrasonic wave paving of the inner slot of the secondary sound source can suppress the reduction of the sound, and the net cleaning efficiency is good. The cleaning device and the ultrasonic cleaning method are provided. [Embodiment] = two-way type The embodiment of the ultrasonic cleaning device of the system (4). The cross-sectional view of the front side of the ultrasonic cleaning device of LI 4; Fig. 2 Ultrasonic washing and comparison (4) For the measurement of the thickness of the remaining (4) The result of the pressure is off, Κ 3 wire shows the feeding and = the result of the plate thickness measurement of the inner groove bottom plate, the groove == setting, the thickness of the bottom plate is the resonance frequency = the explanatory diagram of the sound wave transmission state, Fig. 5 The inner groove is in the form of: The H-heart reflex transposition 1 is as shown in Fig. 1 'with the inner groove 3 structure. Saki 3 _ in the washed wash reading, ^ open and inclined bottom plate 3a The internal storage of the inner tank 3 is useful for the washing liquid of 9 200900167. When ultrasonic vibration is applied to pure water or the like in the outer tank 5 to be described later, the gas component in pure water or the like becomes bubbles and appears on the bottom plate 3a. After the bubble is attached, it is difficult for the ultrasonic wave to tilt the bottom plate 3a in the inner groove 3, and the air bubbles adhering to the bottom plate can be effectively removed. The slot 5 is an indirect slot for transmitting ultrasonic waves from the ultrasonic vibration generating mechanism. The upper end of the outer tank 5 is open, and the inside thereof stores medium such as pure water or chemical liquid. An ultrasonic vibration generating mechanism for generating ultrasonic vibration is coupled to the outer tank bottom plate. Further, the outer tank bottom plate 5& is substantially; in the opposite direction, the bottom plate 3a indicated by a specific angle (4) in the flat direction is disposed to form an angle 0 with the outer groove bottom plate 5a. Further, the angle g formed by the bottom plate 3a and the outer groove bottom plate is set to 丨. Above, 1〇. Take two. - Ultrasonic vibrations are _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The power rate is amplified by the benefit IS. The vibrating section generates a high frequency dream with a specific frequency, which is amplified by the power amplifier 15 and input to the transducer 9. The material of the outer tank 5 can be used without or grading, the inner tank material can be used and = thermal and chemical resistant quartz glass, sapphire, etc., liquid chlorine peroxide, pure water, containing peroxidation gas - salt = , ^.虱-裇·pure water, etc. The material of the vibrating plate can be used as the sus m crane. The inner surface of the ultrasonic wave washing and disposing device of the present invention is a triangular quartz surface, and the inner groove bottom is obliquely arranged so that the bottom plate of the bottom plate 3a of the bottom plate 3a is chopped. Further, the ultrasonic cleaning device 1 of the present invention is further cleaned at a supersonic vibration frequency of 10 200900167 at 90 Θ KHz. The liquid was stored in the ultrasonic cleaning device i m (4) including the above structure, and the sound surface at a certain depth was measured from the opening of the groove 3. When the t-pressure intensity is used, the 2 MHz ultrasonic vibration is used, and the (10) bottom plate is set to 2 for the inclined body of the outer groove bottom plate 5a. In the state, the thickness of the sound pressure is measured by three thicknesses of 3111111, 4.51111]1, and 6111111. _ , and the thickness of the 'neck plate 3a' is set to 2 points of the ultrasonic sound absorption rate (an integral multiple of 1 wavelength (half wavelength)' integer n is 2, 3, 4. 2 dirty 2 ultrasonic vibration = frequency The wavelength of the core glass; ^ 3 _, η = 2 when the inner groove bottom plate is thick, the thickness of the 'mm n 3 day inner groove bottom plate 3a is 4.5 mm, and the plate of the inner groove bottom plate 3a when n=4 The thickness is 6 mm. "" Fig. 2 shows the results of measuring the sound pressure intensity in the inner groove 3 with respect to the thickness of the bottom plate under the above conditions. In addition, the relative sound pressure is shown by the vertical axis of the graph of Fig. 2, When the thickness of the inner groove bottom plate 3a is 3 mm, the sound pressure value measured by the sound pressure sensor is the reference value when the thickness of the inner bottom plate 3a is 3 mm, and the thickness is * $ mm, The ratio of the sound pressure value to the reference value at 6 mm indicates the sound pressure value. I As shown in Fig. 2, with the ultrasonic vibration frequency of 2 MHz, the inner groove bottom plate such as the plate thickness ^mm%· Compared with the case where the thickness of the plate is 4 5, the sound pressure intensity is increased by 1.4 times of the drought resistance of 3 mm, and the sound pressure intensity of the plate thickness of 6 jnm is 1.43 times of the plate thickness of 3 mm. According to the thickness of the inner groove bottom plate 3a Increasing the thick scale corresponding to the half-wavelength of the ultrasonic wave, the sound pressure intensity is increased. Then, in order to study the influence of the inner groove bottom plate 3a on the sound pressure of the inner groove 3 when the outer groove bottom plate 5a is inclined, The sound pressure intensity of the inner tank bottom plate is determined in parallel with the outer tank bottom plate. In addition, when the sound pressure is measured, the bottom plate n of FIG. 2 is formed as a 1/2 wavelength of the ultrasonic brain solution. Figure 3 shows the result of measuring the sound pressure of the plate thickness of the inner groove bottom plate 11 200900167 3a when the inner groove bottom plate 3a is disposed in parallel with the outer groove bottom plate 5a. In addition, the relative sound pressure indicated by the vertical axis of the graph of Fig. 3 is The sound pressure value measured by the sound pressure sensor is 1 when the plate thickness of the inner groove bottom plate 3a is 3 mm, and the sound pressure value when the plate thickness of the inner groove bottom plate 3a is 3 mm is the reference value, according to the plate thickness of 4.5 mm, 6 The ratio of the sound pressure value to the reference value in mm indicates the sound pressure value. As shown in Fig. 3, compared with the sound pressure intensity when the ultrasonic vibration frequency is 2 MHz and the thickness of the inner groove bottom plate is 3 mm. When the thickness is 4.5mm, the sound pressure intensity is reduced to 0.88 times the thickness of 3 mm, and the sound pressure intensity is 6 mm. When the inner groove bottom plate 3a is arranged in parallel with the outer groove bottom plate 5a, the sound pressure is reduced as the inner groove bottom plate 3a is thickened, and the measurement data shown in Fig. 2 is obtained. Fig. 4 is an explanatory view showing the state of ultrasonic transmission when the inner groove bottom plate 3a is arranged in parallel with the outer groove bottom plate 5a, and the bottom plate thickness is twice the 1/2 wavelength of the resonance frequency. When the ultrasonic vibration input to the transducer 9 is applied to the pure water or the like as a transmission medium via the vibrating plate 7, the bottom plate of the inner tank 3 forms a standing wave with the transducer 9. In addition, the acoustic wave formed by the superimposed wave and the reflected wave of the standing wave is transmitted by the incident wave in the transmission medium in the outer groove 5, and reaches the bottom plate 3a of the inner groove 3 and is reflected. Former. When the ultrasonic wave is irradiated from the lower surface of the inner groove bottom plate 3a, a standing wave is generated inside the inner groove bottom plate 3a, whereby the ultrasonic wave is transmitted to the inner groove 3 of the cleaning groove as shown in the head of Fig. 4 (standing wave) The induced ultrasonic transmission phenomenon). ° When the inner groove bottom plate 3a is parallel to the outer groove bottom plate 5a, the ultrasonic wave excited by the ultrasonic transducer vibrates through the medium liquid of the outer groove 5, and is transmitted to the inner groove bottom plate, and is supercharged by the standing wave. The sound wave transmission phenomenon is released from the inner tank bottom plate into the washing liquid. Further, as described above, η is a smaller integer of 1 or 2. The reason for this is that if n is 3 or more, the thickness of the inner groove bottom plate 3a is increased, and the ultrasonic vibration in the inner groove 3 is weakened. The measurement results shown in Fig. 3 also indicate the above reasons. Further, when the inner groove bottom plate 3a and the outer groove bottom plate 5a are inclined to each other as in the case of the present embodiment, the ultrasonic wave transmission phenomenon caused by the standing wave also occurs. However, as shown in Fig. 2, the inner groove bottom plate 3a is inclined with respect to the outer groove bottom plate, and the sound pressure is increased. In the state where the inner groove bottom plate 3a is inclined, the reason why the inner groove bottom plate is thickened and the sound pressure is increased is inferred as follows. Fig. 5 is a schematic view showing the state of ultrasonic multi-reflection when the inner groove bottom plate 3a is inclined. In order to remove the air bubbles accumulated at the bottom of the (4) 3, the inner groove bottom plate 3a is inclined with respect to the groove of the groove in which the transducer 9 is mounted. Since the incident inner bottom plate reaches the (10) bottom plate 3a, since the (four) bottom plate 3a is inclined at an angle 故, as shown in Fig. 5, ultrasonic wave diffuse reflection occurs in the inner groove bottom plate 3a. When the inside of the inner groove bottom plate 3a is repeatedly diffused and reflected, the inner bottom plate bottom plate is internally charged. The super-sonic energy rises, and the county's bottom plate 3a becomes a new vibration source, and ultrasonic waves are radiated into the cleaning tank. That is, (10) training % plays a role as a secondary sound source of the super crane. Further, the thicker the plate thickness of the inner groove bottom plate 3a, the easier the inner groove bottom portion is, and the diffuse reflection 'ultrasonic energy is stepped up. However, if the inner groove bottom plate is too thick, the weight of the bottom plate 3a increases, which is close to the rigid body, and the result is a counter effect. The thickness of the inner groove bottom plate 3a is preferably 2 minutes of the ultrasonic vibration frequency. An integer multiple of 1 wavelength (half wavelength), integer to 5 is optimal. Further, the plate thickness of the inner groove bottom plate 3a is set to an integral multiple of the i-wavelength (half wavelength) of the ultrasonic vibration frequency, and the ultrasonic wave induced by the standing wave shown in Fig. 4 also occurs. Therefore, the thickness of the inner groove bottom plate 3a is an integral multiple of a wavelength (half wavelength) of the ultrasonic vibration frequency, and the inner groove bottom plate % is inclined so that the inner groove 2 plate 3a and the outer groove bottom plate 5a are If it is not parallel, not only the super-stroke caused by the standing wave will occur, but also the phenomenon that the inner groove bottom plate 3a acts as a secondary sound source of ultrasonic vibration due to the rise of the internal σ wave in the inner groove bottom plate 3a 2009 2009167 In the phenomenon of the action, even if the thickness of the inner groove bottom plate 3a is increased, it is estimated that the sound pressure is also increased in the bottom plate which causes the ultrasonic wave transmission phenomenon caused by the standing wave when the inner groove bottom plate 3a and the outer groove bottom plate 5a are parallel. In this manner, the plate thickness of the inner groove bottom plate 3a is set to an integral multiple of one-half of the wavelength (half wavelength) of the ultrasonic vibration frequency, and the inner groove bottom plate is disposed obliquely, and the ultrasonic recording by the standing wave is performed. The transmission 'and the bottom plate are used as the secondary sound source of the ultrasonic chicken due to the diffuse reflection inside the bottom plate, and the ultrasonic energy is generated, resulting in an increase in the sound pressure in the inner groove 3. Therefore, for example, when ultrasonic vibration with a ultrasonic vibration frequency of 2 MHz is performed in a cleaning tank of quartz glass, the thickness of the inner groove bottom plate 3a is selected according to ηχ/2 and n is 3 or 4, then 3x; l/2 = 4.5 mm or 4 χ; 1/2 = 6·0 mm for sufficient mechanical strength. Further, when the ultrasonic vibration frequency is 2 MHz or more, for example, when 3 MHz, η is selected to be 4 or 5. According to the ultrasonic cleaning device 1 and the ultrasonic cleaning material of the present invention, it is not necessary to reduce the thickness of the inner groove with the high frequency of the ultrasonic wave as before, and the sound pressure in the cleaning tank can be ensured, and the ultrasonic pressure is ensured. High frequency of sound waves. Moreover, the ultrasonic cleaning device and the ultrasonic cleaning method of the present invention utilize the ultrasonic wave-induced emission phenomenon caused by the standing wave, and the ultrasonic energy of the bottom (four) portion rises, so that the bottom plate is turned to the side of the ultrasonic secondary sound source. The thief, even if there is some deviation in the ultrasonic vibration frequency or the plate thickness of the inner groove bottom plate 3a, only the ultrasonic transmission phenomenon in the station (four) will be affected by the county, and the bottom plate is also the secondary sound source, so the inner groove 3 The ultrasonic sound pressure required for washing can be obtained. The ultrasonic cleaning device 1 described above is set to 2 at an inclination angle of the inner groove bottom plate 3a and the outer groove bottom plate using a 2 MHz ultrasonic vibration frequency. In the state in which the thickness of the inner groove bottom plate 3a is 2, 3, or 4 times the wavelength of one-half of the ultrasonic vibration frequency (half wavelength), the ultrasonic cleaning device of the present invention and the supersonic 14 200900167 The skin first cleaning method can be used in the ultrasonic vibration frequency on the ΚΉζιχ, and the inclination angle of the inner groove bottom plate % and the outer groove bottom plate 5a is ν or more and w. It is effective when it is inside: The plate thickness of the inner groove bottom plate 3a may be an integer of five times the half wavelength of the ultrasonic vibration frequency. Therefore, the thickness of the ultrasonic wave and the size of the object to be washed can be combined with the ultrasonic cleaning, and the thickness of the inner groove 3 and the inclination angle of the bottom plate can be selected. As described above, according to the present invention, the inner groove bottom plate has a plate thickness of ultrasonic vibration frequency, one-half of a wavelength (half wavelength) of the doubling, and the inner groove bottom plate is inclined to be disposed inside the inner bottom plate such as the outer groove. The bottom plate & is not parallel, whereby the inner groove bottom plate 3a can be a plate thickness having sufficient mechanical strength. Further, according to the present invention, the ultrasonic vibration frequency of _ KHz or more can be used in the frequency of 2 halls and 3 shame, so that the frequency of the ultrasonic waves can be increased with the miniaturization of the object to be washed. Moreover, according to the present invention, the inner groove bottom plate functions as a secondary sound source for ultrasonic vibration, so that the super-material transmission by the standing wave and the secondary sound source are: the ultrasonic vibration of the bottom plate 3.a, It can suppress the sound pressure reduction and provide a washing wave cleaning lamp. At the same time as the ultrasonic vibration is applied, the cleaning towel is sprayed from the nozzle to the object to be washed, and is disposed between the ultrasonic transducer and the cleaning liquid for storing the medium. The partition is such that the partition is inclined relative to the transducer, and thus, the present invention is applicable to ultrasonic spray cleaning. Further, the thickness of the separator plate is 2/2, and the number of turns η is 3 to 5. Jade The invention can be embodied in various forms before being extracted from the essence. Therefore, the above-described embodiments are mainly for the purpose of illustration and not limitation of the invention. FIG. 1 is a cross-sectional view of the front side of the ultrasonic cleaning apparatus according to the embodiment. Fig. 2 is a view showing the result of measuring the sound pressure in the inner groove with respect to the 0 plate 15 200900167 of the inner groove bottom plate in the ultrasonic cleaning device shown in Fig. 2. Fig. 3 is a graph showing the results of measuring the sound pressure of the plate thickness of the bottom groove of the parallel groove in the table. 3 _ Fig. 4 is an explanatory diagram of the ultrasonic transmission state when the inner groove bottom plate and the outer groove bottom plate are arranged in parallel, and the bottom plate thickness is twice the 1/2 wavelength of the resonance frequency. Fig. 5 is a schematic view showing the state of ultrasonic multi-reflection when the inner bottom plate is inclined. [Description of main components] 1 Ultrasonic cleaning device 3 Inner groove 3a Inner groove bottom plate 5 External groove 5a Outer groove bottom plate 7 Vibration Han 9 Transducer 11 Oscillator 13 Oscillator 15 Power amplifier w Washed material (wafer) 16