JPS61164045U - - Google Patents

Info

Publication number
JPS61164045U
JPS61164045U JP4148886U JP4148886U JPS61164045U JP S61164045 U JPS61164045 U JP S61164045U JP 4148886 U JP4148886 U JP 4148886U JP 4148886 U JP4148886 U JP 4148886U JP S61164045 U JPS61164045 U JP S61164045U
Authority
JP
Japan
Prior art keywords
layer wiring
semiconductor device
aluminum
wiring
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4148886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4148886U priority Critical patent/JPS61164045U/ja
Publication of JPS61164045U publication Critical patent/JPS61164045U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4148886U 1986-03-20 1986-03-20 Pending JPS61164045U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4148886U JPS61164045U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4148886U JPS61164045U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Publications (1)

Publication Number Publication Date
JPS61164045U true JPS61164045U (enrdf_load_stackoverflow) 1986-10-11

Family

ID=30551360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4148886U Pending JPS61164045U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS61164045U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56104443A (en) * 1980-01-23 1981-08-20 Hitachi Ltd Manufacture of semiconductor device
JPS5739554A (en) * 1980-08-21 1982-03-04 Seiko Epson Corp Multilayer wiring method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56104443A (en) * 1980-01-23 1981-08-20 Hitachi Ltd Manufacture of semiconductor device
JPS5739554A (en) * 1980-08-21 1982-03-04 Seiko Epson Corp Multilayer wiring method

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