JPS61160045A - Detection and quantitative analysis of sulfur and sulfur monitor - Google Patents
Detection and quantitative analysis of sulfur and sulfur monitorInfo
- Publication number
- JPS61160045A JPS61160045A JP94585A JP94585A JPS61160045A JP S61160045 A JPS61160045 A JP S61160045A JP 94585 A JP94585 A JP 94585A JP 94585 A JP94585 A JP 94585A JP S61160045 A JPS61160045 A JP S61160045A
- Authority
- JP
- Japan
- Prior art keywords
- peak
- group
- gaseous
- wavelengths
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title abstract description 11
- 238000004445 quantitative analysis Methods 0.000 title abstract 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 title 2
- 229910052717 sulfur Inorganic materials 0.000 title 2
- 239000011593 sulfur Substances 0.000 title 2
- 238000010521 absorption reaction Methods 0.000 claims abstract description 9
- 230000003595 spectral effect Effects 0.000 claims abstract description 9
- 238000001228 spectrum Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 9
- 238000005375 photometry Methods 0.000 claims 1
- 230000001066 destructive effect Effects 0.000 abstract description 3
- 238000011002 quantification Methods 0.000 description 9
- 238000002835 absorbance Methods 0.000 description 7
- 238000000862 absorption spectrum Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000011896 sensitive detection Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 240000006829 Ficus sundaica Species 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/74—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using flameless atomising, e.g. graphite furnaces
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は新規なＳの定量方法及び該方法を利用したその
場での高感度な検知定量が可能なＳモニターに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a novel method for quantifying S and an S monitor capable of highly sensitive detection and quantification on the spot using the method.
本発明はＳを用いる半導体製造品及び製造装置、廃棄物
処理装置等、例えばＺｎ８ 、 Ｏｄｅ 。The present invention relates to semiconductor products, manufacturing equipment, waste treatment equipment, etc. that use S, such as Zn8 and Ode.
Ｚｎ５ｘＳｅ 、−ｘ等の化合物半導体のエビ成長装置
（ＯＶＤ炉、ＬＰＦ炉等）、高圧ＨＢ炉、アニーリング
炉、Ｓ圧アニーリング炉、ＭＢＨ装置、ＭＯＯＶＤ装置
等に８検出定量高感度モニターとして利用したシ、ある
いは、Ｓを含有する合金やセラミックス、ガラス等の溶
解炉等に利用することができる。This system was used as an 8-detection quantitative high-sensitivity monitor for compound semiconductors such as Zn5xSe and -x in growth equipment (OVD furnace, LPF furnace, etc.), high-pressure HB furnace, annealing furnace, S-pressure annealing furnace, MBH equipment, MOOVD equipment, etc. Alternatively, it can be used in a melting furnace for S-containing alloys, ceramics, glass, etc.
（従来の技術）
従来、Ｓを検出する場合に、非破壊で、系を乱さず、そ
の場でガス状Ｓを検知定量する方法は殆んど知られてお
らず、Ｓの検出は破壊検知が主である。ガス状物質の非
破壊検出・定量法としては、ガスクロマトグラフィーが
考えられるが、■測定系内に試料を導くまでに、導入管
壁に付着し、正確な定量ができない、■系内からのサン
プリングを要するため系を乱してしまう、という本質的
な問題点があるため不適であシ、実用されていない。ま
た、原子吸光分析は、原子状態の試料について厳密に測
定できるが、試料を２０００℃以上の高温状態とする必
要があり、原子化温度以下の検知定量は原理的に不可能
であるに加え、用いうるホロカソードランプがない。(Prior art) Conventionally, when detecting S, there is almost no known method for detecting and quantifying gaseous S on the spot in a non-destructive manner without disturbing the system. is the main thing. Gas chromatography can be considered as a non-destructive detection/quantification method for gaseous substances; It is unsuitable and has not been put to practical use because it has the essential problem of disturbing the system because it requires sampling. In addition, atomic absorption spectrometry can accurately measure samples in the atomic state, but it requires the sample to be heated to a high temperature of 2000°C or higher, and detection and quantification at temperatures below the atomization temperature is theoretically impossible. There are no hollow cathode lamps available.
（発明が解決しようとする問題点）
本発明は上記した現状に鑑みてなされたもので、非破壊
で、系をみださず、その場でガス状Ｓの高感度検知・定
量が可能な方法及び該方法を利用した高感度モニターの
提供を目的とするものである。(Problems to be Solved by the Invention) The present invention was made in view of the above-mentioned current situation, and enables highly sensitive detection and quantification of gaseous S on the spot without destroying the system. The object of the present invention is to provide a method and a highly sensitive monitor using the method.
（問題点を解決しようとする手段）
すなわち、本発明はガス状Ｓに、波長２６３ｎｍ、 ２
６ ａ ５ ｎｍ、 ２６８ ｎｍ、２７ （Ｌ ５
ｎｍ、 ２７３ｎｍ、 ２７６ ｍｍ、２７９ ｎｍ、
２８２ ｎｍ の山ピークを有する第１群ピーク及び
波長２６４．５ ｎｍ。(Means for solving the problem) That is, the present invention provides gaseous S with a wavelength of 263 nm, 2
6 a 5 nm, 268 nm, 27 (L 5
nm, 273 nm, 276 mm, 279 nm,
The first group peak has a peak of 282 nm and a wavelength of 264.5 nm.
２６７ ｎｍ、 ２６９．５ ｎｍ、 ２７２ ｎＪｎ
、２７５ ｎｍ５２７８ ｎｍ％ ２８１ ｎｍ の
谷ピークを有する第１群ピークのスペクトル線を、入射
し、上記ガス状Ｓによる上記入射スペクトル線の吸収を
測定し、各光強度のピーク高さから８の検知・定量を行
う方法および炉またはヒータ付容器の光の進行方向に窓
部を設け、一方の窓部に波長２６３ｎｍ、 ２６ ！Ｌ
５ ｎｍ、 ２６８ ｎｍ、 ２７１５ ｎｍ、 ２７
３ｎｊ！１．２７６ ｎｍ、 ２７９ ｍｍ、 ２８２
ｎｍ の山ピークを有する第１群ピーク及び波長２６
４．５ ｎｍ。267 nm, 269.5 nm, 272 nJn
, 275 nm 5278 nm% 281 nm The spectral line of the first group peak having a valley peak is incident, and the absorption of the incident spectral line by the gaseous S is measured, and 8 detections are made from the peak height of each light intensity.・Method for quantitative determination: A window is provided in the direction of light propagation in a furnace or a container with a heater, and one window has a wavelength of 263 nm, 26! L
5 nm, 268 nm, 2715 nm, 27
3nj! 1.276 nm, 279 mm, 282
1st group peak with peak of nm and wavelength 26
4.5 nm.
２６７ ｎｍ、 ２６９．５ ｎｍ、 ２７２ ｎｍ％
２７５ ｎｍ。267 nm, 269.5 nm, 272 nm%
275 nm.
２７８ ｎｍ、 ２８１ｎｍ の谷ピークを有する第
１群ピークのスペクトル線発光部、他方の窓にはヒータ
付容器内のガス状日を通過１７た前記スペクトル線の光
強度のピーク高さから８を検知定量する受光、測光部を
接続してなる、Ｓモニターである。8 is detected from the peak height of the light intensity of the spectral line that passed through the gaseous sun in the container with a heater in the other window. This is an S monitor that is connected to a light receiving and photometric unit for quantitative measurement.
以下に本発明につき詳細に説明する。The present invention will be explained in detail below.
本発明者らは、ガス状日（ガス状ではＢｔ−ｓ８４、”
＠、’８等になると考えられているが、特定されていな
い。）の吸光スペクトルを詳細に研究の結果、第１図に
示すように、波長２６５ｎｍ２６１５ ｎｍ、 ２６８
ｎｍ、 ２７ Ｑ、 ５ ｎｍ、 ２７５ ｎｕ。The inventors discovered that gaseous days (Bt-s84 in gaseous form,
It is thought that it will be @, '8, etc., but it has not been specified. ) As a result of detailed research on the absorption spectra of
nm, 27 Q, 5 nm, 275 nu.
２７６ ｎｍ０．２７９ ｎｍ及び２８２ｎｍｌＣ第■
群の吸光の山ピーク、そして波長２６４．５ ｔｋｍ、
２６７ ｎｍ、２６９．５ ｎｍ、２７２ ｎｍ、
２７５ ｎｍ、 ２７８ ｎｍ 及び２８１ ｎｍ に
第■群の吸光の谷ピークを有することを発見した。そし
てこのような第１群及び第■群の山と谷のピークは温度
３００℃程度のＳの分子の状況のスペクトルで得られる
という知見をも得て、ガス状日の吸収による２ ６５
ｎｍ 及び２６５．５ ｎｍ の吸光ピークを利用する
ことにより、ガス状日を高感度でかつその場でさえ検出
・定量を可能としたものである。276 nm0.279 nm and 282 nmlC No.
The absorption peak of the group, and the wavelength of 264.5 tkm,
267 nm, 269.5 nm, 272 nm,
It was discovered that the absorption valley peaks of group Ⅰ were at 275 nm, 278 nm, and 281 nm. We also obtained the knowledge that the peaks and valleys of the first and second groups can be obtained from the spectrum of the S molecule at a temperature of about 300°C.
By utilizing the absorption peaks at 265.5 nm and 265.5 nm, gaseous conditions can be detected and quantified with high sensitivity even on the spot.
本発明は第２図に示すように、炉、ヒータ付セルあるい
は筒部１に窓２を取り付け、発光部５において上記第１
群ピーク及び第１群ピークのスペクトル線を発光させ、
この光を窓２から入射し、受光部４において光強度のピ
ーク高さを測定することにより、炉またはセル中のＳを
検知定量するものである。この日の検知、定量は、上記
第１群ピーク及び第１群ピークのピーり吸収がＳ濃度に
比例することから求める。As shown in FIG.
emitting the spectral lines of the group peak and the first group peak,
By entering this light through the window 2 and measuring the peak height of the light intensity at the light receiving section 4, S in the furnace or cell is detected and quantified. Detection and quantification on this day are determined from the fact that the first group peak and peak absorption of the first group peak are proportional to the S concentration.
ピーク吸収とＳ濃度の関係は
ＤＯＣＯ・・・（２）
上記（１） 、 ＋２１式で表される。ここでＴはピー
クでの吸光度（％）、Ｃは日の濃度である。The relationship between peak absorption and S concentration is expressed by DOCO...(2) above (1), +21 formula. where T is the peak absorbance (%) and C is the daily concentration.
上記第！及び■群ピークのスペクトル発光源としては、
ホロカソードランプを用い、第１及び第１群ピークを中
心したフィルターを各々設けたものが使用できる。また
該フィルターは受光部に設けることもできる。Number above! And as the spectral emission source of group peak,
It is possible to use a hollow cathode lamp provided with filters centered on the first and first group peaks. Further, the filter can also be provided in the light receiving section.
さらに検出結果をコンピュータ処理し、その結果を表示
するようにできる。このようにすれば、はぼ実時間で８
を定量検出できるので、その場でのＳの検知定量とＳの
投入量Ｓ圧コントロール等を制御しうる高感度日モニタ
ーを実現できる。Furthermore, the detection results can be processed by computer and the results can be displayed. In this way, it will be 8 in real time.
Since it is possible to quantitatively detect S, it is possible to realize a highly sensitive day monitor that can detect and quantify S on the spot and control the amount of S input and S pressure.
（実施例）
第５図（ａ）は本発明の実施例で用いた装置の概略図で
あって、１はセル、２は窓、３は発光部、４は受光部、
５は加熱手段をあられす。なお第３図６）はこの装置の
温度分布を示すグラフである。(Example) FIG. 5(a) is a schematic diagram of an apparatus used in an example of the present invention, in which 1 is a cell, 2 is a window, 3 is a light emitting part, 4 is a light receiving part,
5 is the heating means. Note that FIG. 3 (6) is a graph showing the temperature distribution of this device.
セル１内に８を置き加熱手段５によりセル１内の温度を
２９８℃に一定にして保持したときのスペクトルを第４
図に示す。第１群ピークすなわち波長２６５ ｎｍ、
２６５．５ ｎｍ、 ２６８ ｍｍ、 ２７０．５ ｎ
ｍ、 ２７５ ｎｍ、 ２７６ ｎｍ、 ２７９ ｎｍ
及び２８２ ｎｍ を最大のピーク山とした吸収スペ
クトル及び第■群ピークすなわち波長２６４．５ｎｍ、
２６７ ｎｍ、 ２６９．５ ｎｍ、 ２７２ ｎｍ
、 ２７５ｎｍ、 ２７８ ｎｍ 及び２８１ ｎｍ
を谷のピークとした吸収スペクトルが明瞭に測定さ
れた。8 is placed in the cell 1 and the temperature inside the cell 1 is kept constant at 298°C by the heating means 5.
As shown in the figure. 1st group peak, i.e. wavelength 265 nm,
265.5 nm, 268 mm, 270.5 n
m, 275 nm, 276 nm, 279 nm
and an absorption spectrum with the maximum peak at 282 nm, and a group Ⅰ peak, that is, a wavelength of 264.5 nm,
267 nm, 269.5 nm, 272 nm
, 275 nm, 278 nm and 281 nm
The absorption spectrum with trough peak was clearly measured.
一方、日の投入量と、吸光度の間には、一般的に第５図
に示す関係があることを詳細な実験に確認した。ここで
ガス状Ｓが存在するとき検知される光強度を工、ガス状
Ｓがないときの光強度を工０ とすると、吸光度’ｒ（
％）は次式（３）％式％
したがって、前記の（１）および（２）弐によシ吸光度
からＳを定量できる。なおＡ点は、温度ｔにおける飽和
点をあられしておシ、
を
規定される。On the other hand, it was confirmed through detailed experiments that there is generally a relationship shown in FIG. 5 between the daily input amount and the absorbance. Here, if the light intensity detected when gaseous S is present is x, and the light intensity when there is no gaseous S is x0, then the absorbance 'r(
%) is the following formula (3) % Formula % Therefore, S can be quantified from the absorbance based on the above (1) and (2). Note that point A is defined as the saturation point at temperature t.
第５図の関係は第１群及び第１群の夫々の山と谷の吸収
スペクトルについて成立するので、いずれのピークの測
定によってもＳ量を求めることができる。検出は０．０
１ ｐｐｍオーダーまで可能である。Since the relationship shown in FIG. 5 holds true for the peak and valley absorption spectra of each of the first group and the first group, the amount of S can be determined by measuring any peak. Detection is 0.0
Possible up to 1 ppm order.
さらに上記の第１群及び第■群の山と谷の各スペクトル
線を同時に検知し、各々のピーク高さから同時に定量を
行うことができる。この場合は前記（１）、（３１式に
かえて、下記（ａ）〜（Ｃ）の評価手段による。なお五
、〒は夫々の平均値を、ｎ＝１，２・・・８は上記８種
類のピークについての、夫々の測定を表す。Furthermore, each of the peak and valley spectral lines of the first group and the second group can be simultaneously detected, and quantitative determination can be performed simultaneously from the height of each peak. In this case, the following evaluation methods (a) to (C) are used instead of the above formulas (1) and (31). Each measurement is shown for eight types of peaks.
ｎ＝１．２．−・・８
ｎ＝１．２ 、・・・８
ｎ＝１，２．・・・８
このような評価はコンピュータ等演算装置によれば容易
かつ迅速であり、実時間でＳ量を表示できるので、系の
制御ができる。n=1.2. -...8 n=1.2,...8 n=1,2. ...8 Such evaluation is easy and quick using an arithmetic device such as a computer, and since the amount of S can be displayed in real time, the system can be controlled.
（発明の効果） 本発明の効果は次のとおりである。(Effect of the invention) The effects of the present invention are as follows.
１）ガス状Ｓの吸収による上記第１群ピーク（山）第■
群ピーク（谷）のスペクトルを利用することによシ、ガ
ス状Ｓの高感度の検知・定量がその場で可能となった。1) The above first group peak (mountain) No. ■ due to absorption of gaseous S
By using the spectrum of group peaks (troughs), highly sensitive detection and quantification of gaseous S has become possible on the spot.
２）上記第１群ピーク及び第１群ピークのスペクトルの
ピーク高から同時に定量を行なうため、他物質から明確
に分離して検知精度が向上し、またＳの定量精度が大巾
に向上する。2) Since quantification is performed simultaneously from the peak height of the spectrum of the first group peak and the first group peak, the detection accuracy is improved by clearly separating it from other substances, and the quantification accuracy of S is greatly improved.
３）本発明の高感度日モニターはＳ量のその場検知・定
量が可能であり、さらにコンピューター等演算装置と組
合すことによシ、各スペクトルの吸光度から実時間でＳ
量を検知定量し、該演算装置の出力信号によりＳ投入量
、Ｓ圧等をその場で制御することができる。3) The high-sensitivity daily monitor of the present invention is capable of on-the-spot detection and quantification of the amount of S. Furthermore, by combining it with a computing device such as a computer, it is possible to detect and quantify the amount of S in real time from the absorbance of each spectrum.
The amount can be detected and quantified, and the S input amount, S pressure, etc. can be controlled on the spot based on the output signal of the arithmetic device.
ｔｌｆ１１図はガス状Ｓの吸光スペクトルである。
第２図は本発明方法及びモニターの概略を示す模式図で
ある。第３図（ａ）は本発明の実施例で用いた装置の概
略図であり、第３図（ｂ）は第３図（ａ）装置における
温度分布を示すグラフである。第４図は本発明の実施例
で得られ九波長と吸光度の関係を示すグラフ、第５図は
Ｓ量と吸光度の関係を示すグラフである。
第１図
ｙ枳
第３図（α）The tlf11 diagram is an absorption spectrum of gaseous S. FIG. 2 is a schematic diagram showing the outline of the method and monitor of the present invention. FIG. 3(a) is a schematic diagram of the apparatus used in the embodiment of the present invention, and FIG. 3(b) is a graph showing the temperature distribution in the apparatus of FIG. 3(a). FIG. 4 is a graph showing the relationship between nine wavelengths and absorbance obtained in an example of the present invention, and FIG. 5 is a graph showing the relationship between S amount and absorbance. Figure 1 Figure 3 (α)
Claims (5)
２６８ｎｍ、２７０．５ｎｍ、２７３ｎｍ、２７６ｎｍ
、２７９ｎｍ、２８２ｎｍの山ピークを有する第１群ピ
ーク及び波長２６４．５ｎｍ、２６７ｎｍ、２６９．５
ｎｍ、２７２ｎｍ、２７５ｎｍ、２７８ｎｍ、２８１ｎ
ｍの谷ピークを有する第１群ピークのスペクトル線を、
入射し、上記ガス状Ｓによる上記入射スペクトル線の吸
収を測定し、各光強度のピーク高さからＳの検知・定量
を行う方法。(1) Gaseous S has wavelengths of 263 nm, 265.5 nm,
268nm, 270.5nm, 273nm, 276nm
, 279 nm, 282 nm peaks and wavelengths of 264.5 nm, 267 nm, 269.5
nm, 272nm, 275nm, 278nm, 281n
The spectral line of the first group peak with m valley peak is
A method of detecting and quantifying S by measuring the absorption of the incident spectrum line by the gaseous S, and detecting and quantifying S from the peak height of each light intensity.
け、一方の窓部に波長２６３ｎｍ、２６５．５ｎｍ、２
６８ｎｍ、２７０．５ｎｍ、２７３ｎｍ、２７６ｎｍ、
２７９ｎｍ、２８２ｎｍの山ピークを有する第１群ピー
ク及び波長２６４．５ｎｍ、２６７ｎｍ、２６９．５ｎ
ｍ、２７２ｎｍ、２７５ｎｍ、２７８ｎｍ、２８１ｎｍ
の谷ピークを有する第II群ピークのスペクトル線発光部
、他方の窓にはヒータ付容器内のガス状Ｓを通過した前
記スペクトル線の光強度のピーク高さからＳを検知定量
する受光、測光部を接続してなる、Ｓモニター。(2) A window is provided in the direction of light propagation in the furnace or container with a heater, and one window has wavelengths of 263 nm, 265.5 nm, and 2
68nm, 270.5nm, 273nm, 276nm,
1st group peaks with mountain peaks of 279 nm and 282 nm and wavelengths of 264.5 nm, 267 nm, and 269.5 nm
m, 272nm, 275nm, 278nm, 281nm
The other window has a light receiving and photometry unit that detects and quantifies S from the peak height of the light intensity of the spectral line that has passed through the gaseous S in the container with a heater. The S monitor is made by connecting the parts.
を検知・定量し、それによりＳ投入量コントロール、Ｓ
圧コントロールを実時間で制御する特許請求の範囲第（
２）項記載のＳモニター。(3) Based on the peak height of light intensity by computer
is detected and quantified, thereby controlling the amount of S input, S
Claim no.
S monitor described in section 2).
範囲第（２）項記載のＳモニター。(4) The S monitor according to claim (2), wherein the light emitting section is a hollow cathode lamp.
群ピークを中心とするフィルタを有する特許請求の範囲
第（２）項記載のＳモニター。(5) The light emitting part or the light receiving part is the peak of group I and the peak of group II.
The S monitor according to claim 2, which has a filter centered on the group peak.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP94585A JPS61160045A (en) | 1985-01-09 | 1985-01-09 | Detection and quantitative analysis of sulfur and sulfur monitor |
| US06/816,843 US4733084A (en) | 1985-01-09 | 1986-01-07 | Method of detection and quantitative determination of sulfur and sulfur monitor using the method |
| DE8686100248T DE3682592D1 (en) | 1985-01-09 | 1986-01-09 | METHOD FOR DETECTING AND QUANTATIVE DETERMINATION OF SULFUR AND SULFUR MONITOR USING THIS METHOD. |
| EP86100248A EP0187675B1 (en) | 1985-01-09 | 1986-01-09 | Method of detection and quantitative determination of sulfur and sulfur monitor using the method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP94585A JPS61160045A (en) | 1985-01-09 | 1985-01-09 | Detection and quantitative analysis of sulfur and sulfur monitor |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11515790A Division JPH0315739A (en) | 1990-05-02 | 1990-05-02 | Detection and determination of sulfur and sulfur monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61160045A true JPS61160045A (en) | 1986-07-19 |
| JPH0414742B2 JPH0414742B2 (en) | 1992-03-13 |
Family
ID=11487810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP94585A Granted JPS61160045A (en) | 1985-01-09 | 1985-01-09 | Detection and quantitative analysis of sulfur and sulfur monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61160045A (en) |
-
1985
- 1985-01-09 JP JP94585A patent/JPS61160045A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414742B2 (en) | 1992-03-13 |
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