JPS61159782A - Silent discharge type gas laser device - Google Patents

Abstract

PURPOSE:To increase discharge power density by coating the surface of at least one electrode of a grounding-side metallic electrode and a high-voltage side metallic electrode with a dielectric consisting of a ceramics material. CONSTITUTION:Dielectrics composed of a ceramics material 12 are mounted onto both high-voltage and grounding-side metallic electrodes 1, 2. Accordingly, discharge power density can be increased remarkably, and a laser can be oscillated at low voltage or low supply frequency on the same power density.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] This invention relates to an improvement of a silent discharge type laser device.

[Conventional technology]

First, a conventional gas laser device m will be explained using a horizontally pumped Cot V-laser as an example.

Figure 1 is the W Narihara diagram, in which (1) the Fi ground side metal electrode, (2) the high voltage side metal tg disposed opposite to this ground side metal tffl (1), and the discharge surface is It is covered with a dielectric (3) made of a material such as lead-containing glass or mica. Both of these [41] are placed in a container filled with laser contaminant gas. (4) is the discharge space.

(5) is a transformer, (6) is a high frequency power supply, (7) is a total mirror, and (8) is this total reflection! ! ! (7) and the output 141 reflecting mirror (partially transmitted) installed on the optical axis of the laser beam VC9,
(9) is a cooling water circulation pump, 0M is a cooler, and 0M is an ion exchange water purifier.

In the above configuration, the high voltage side metal! ! (2),
4E frequency It & (6) and AC height 1 from transformer (5)
When pressure is applied, a silent discharge occurs due to the dielectric (3) between both electrodes.
Since it is an alternating current discharge via an electric current, there is no transition to an arc discharge, and a non-equilibrium discharge in which only the temperature of a single molecule is high and the temperature of a single molecule does not rise can be stably maintained at 1 J! I can border. Although a description of the photoinduced radiation process by excited molecules in the discharge space (4) will be omitted, it is assumed that a silent discharge occurs in the discharge space (4).

Laser oscillation occurs within the cocarrier composed of the total reflection i1f (7) and the output side reflector (8), and the output side reflector (8)
) outputs laser light. Both the ground side metal electrode (1) and the voltage field metal electrode (2) are cooled by cooling water with low electrical conductivity, and the cooling water is supplied by a cooling water circulation pump (9).
), the water is circulated through the cooler αO and the ion exchange deionizer a5. The ion exchange water purifier A5 is for cooling water! Kiden 41f
This is necessary in order to reduce current leakage from the soldering pressure round metal pole (2). Although not shown in Figure 1, gas in the discharge space is flowing at high speed between the electrodes in a direction perpendicular to the laser beam.

Figure 5 is an enlarged view of the discharge electrode section, and the discharge surfaces of the ground 111 metal electrode ff1 (1), the high voltage side metal W, and the pole (2) are parallel flat plates, and W* is as shown in the figure. Occurs uniformly between both electrodes.

In the embodiment shown in FIG. 5, the dielectric (3) is connected to a high voltage III
Although the metal was provided on the pole (2) side, the ground side metal electrode (g r
m, or connect the high voltage side metal to the pole (2) and ground II.
It is clear that the same effect can be obtained by providing both I metal electrodes (1). FIG. 6 ij This is an example in which a dielectric material is provided on both the high voltage and ground side metal electrodes.

One reflection is required for laser oscillation to occur! ! (7) Laser gain sufficient to overcome the loss of the output side reflector (8) is required in the discharge space, and the laser gain is the length of the discharge space in the optical axis direction and the emitted force density (per unit volume). Since it is determined by the discharge power input into the tl!, if the length in the optical axis direction is determined, [The force is dense*'e, and no ejaculation occurs with the obanako than the value. How to increase discharge power density! Either increase the frequency of the E source, increase the applied voltage, or increase the capacitance of the dielectric.

[Problem that the invention seeks to solve]

The conventional silent discharge type is a laser device, which is configured as described above, and the 5 frequencies are typically about 100 KHz at most, and there is a limit to the high applied voltage due to the end insulation. . Furthermore, the relative permittivity of the dielectric is at most 7.
There was a limit to the improvement of the discharge power density.

If the frequency is increased or the applied voltage is set to K<L, the device itself becomes larger and more expensive.

This invention was made to solve this problem, and it is possible to reduce the power supply frequency or increase the capacitance even when the voltage is reduced, thereby increasing the radiation ft to obtain a predetermined laser gain.
The object of the present invention is to obtain a silent discharge type gas laser device 1 that can obtain a power vM.

[Means for solving problems]

In the gas laser device according to the present invention, at least one of the metal electrodes on the ground side and the metal on the high voltage side is made of W, and the surface of the electrode is covered with a dielectric material made of ceramic material.

[For production]

In accordance with the present invention, the discharge power density is increased by a dielectric material made of a ceramic material coated on at least one of the electrode points of the ground side metal KW and the NEW voltage side metal electrode.

[Embodiments of the invention]

FIG. 1 is an original seal drawing of W/lF1!2 showing an embodiment of the present invention.

FIG. 2 is an enlarged view of the discharge electrode section shown in FIG. 1, and FIG. 8 is an enlarged view of the discharge electrode section, which is an example of a cell in which dielectrics are provided on both the high voltage and ground side metal electrodes.

In the figure, (1), (2), and (4) to αD are completely the same as the conventional floors. (5) is a ceramic material which is a dielectric covering the electrode surface 'f1. This ceramic material (2) will be explained in detail.

The following table shows how to obtain the same discharge power as in the conventional case using the parywum titanate ceramic materials of the present invention having dielectric constants of 500, 1200, and 2500.

Table 1 The dielectric constant of barium titanate-based set mix materials can be lowered by adding secondary components 1, such as magnetium oxide or calcium oxide, or it can be increased by using other components such as dantane oxide. It is.

Made of Baliwam titanate ceramic material with a dielectric constant of 500! So, the dielectric constant of the conventionally used dielectric is 5.
The value is 100 times higher than that of . Therefore, the discharge power density can be significantly increased. If the power density is the same, laser aftershock is possible with a lower voltage or lower power frequency. For example, in a silent discharge type CX3x gas laser device, when the frequency is from several IQB to several 100 KHz, the discharge power W is the power supply frequency, the static W of the dielectric of the laser electrode, and the capacitance c.
It is known that there is a proportional relationship to g*. Therefore,!
The radiation force can be increased by increasing the j source frequency f or the dielectric capacitance tcgft.

Those with a small dielectric constant are discharged wL! There is a disadvantage that the force density becomes small. According to Table 1, compared to the conventional example,
The discharge tube of the present invention has a large relative permittivity.

The capacity of the St body layer has increased significantly. Therefore, the discharge power density is improved, and at low power frequency or low voltage,
Conventional laser output can be obtained. However, it is unnecessary to mention that when the voltage is lowered, the applied voltage is equal to or higher than the discharge starting voltage.

In the above embodiment, a case was explained in which a barium titanate ceramic material was used as the dielectric material, but other than barium titanate ceramic material, strontium titanate ceramic material, magnesium titanate ceramic material, calcium titanate ceramic material A ceramic material may also be used and the same effect as in the above embodiment can be obtained.

〔Effect of the invention〕

As described above, according to the present invention, since the dielectric of the silent discharge electrode is covered with a ceramic material having a high dielectric constant, the capacitance Jl remains large ( However, it is possible to obtain a Group 1 efficiency for obtaining a predetermined laser gain.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing one embodiment of the present invention. Figure 2 is release! An enlarged view of the tiE pole part, Fig. 8 is an enlarged view of the discharge electrode part which is an example of a cell in which a dielectric is provided on both the high voltage and ground side metal wLWi, and Fig. 4 is an enlarged view of the conventional silent discharge type. A diagram of the configuration of the gas laser equipment. FIG. 5 is an enlarged view of the radiation pole part, and FIG. 6 is an enlarged view of the radiation tt pole part when a dielectric material is provided on both the high voltage and ground side metal electrodes. In the figure, (1) is the ground side metal electrode, (2) is the high voltage side metal electrode, (7) is the total reflection mirror, and (8) is the output side radiation *
. CI2 is a ceramic material. Note that the same reference numerals in each figure indicate parts corresponding to the same straddle. Figure 2 Figure 3 Each Figure 5 Figure 6 Poison

Claims (5)

[Claims] (1) A container filled with laser medium gas, metal electrodes placed opposite each other in this container, and mirrors placed on both sides of the optical axis of the laser beam that is excited and emitted by the discharge between these two electrodes. A silent discharge type gas laser device, characterized in that the surface of at least one of the two electrodes is coated with a dielectric material made of a ceramic material. (2) The silent discharge gas laser device according to claim 1, wherein the ceramic dielectric is a barium titanate ceramic material. (3) The silent discharge type gas laser device according to claim 1, wherein the dielectric material of the ceramic material is a strontium titanate ceramic material. (4) The silent discharge gas laser device according to claim 1, wherein the ceramic dielectric is a magnesium titanate ceramic material. (5) The silent discharge gas laser device according to claim 1, wherein the ceramic dielectric is a calcium titanate ceramic material.