JPS61157330U - - Google Patents
Info
- Publication number
- JPS61157330U JPS61157330U JP3982685U JP3982685U JPS61157330U JP S61157330 U JPS61157330 U JP S61157330U JP 3982685 U JP3982685 U JP 3982685U JP 3982685 U JP3982685 U JP 3982685U JP S61157330 U JPS61157330 U JP S61157330U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum chamber
- etching process
- flow rate
- polyester resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 229920001225 polyester resin Polymers 0.000 claims description 2
- 239000004645 polyester resin Substances 0.000 claims description 2
- 229920001169 thermoplastic Polymers 0.000 claims description 2
- 239000004416 thermosoftening plastic Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3982685U JPS61157330U (enExample) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3982685U JPS61157330U (enExample) | 1985-03-22 | 1985-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157330U true JPS61157330U (enExample) | 1986-09-30 |
Family
ID=30548139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3982685U Pending JPS61157330U (enExample) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157330U (enExample) |
-
1985
- 1985-03-22 JP JP3982685U patent/JPS61157330U/ja active Pending
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